Mubasa rekugadzira zvinhu zvepamusoro-soro uye tsvakurudzo yesainzi yemazuva ano, module yekufamba kwemhepo yakanyatsojeka yave chishandiso chakakosha chekushanda zvakanaka uye kuyera nekushanda kwayo kwakanaka kwazvo. Hwaro hwekunyatsojeka kwegranite, sehwaro hwekutsigira, hune zvinodiwa zvakasimba zvenzvimbo yekushanda, uye mamiriro akakodzera ezvakatipoteredza ndiwo hwaro hwekuona kuti inoshanda zvakanaka uye kuti inoshanda zvakanaka.
Chekutanga, kudzora tembiricha: "stabilizer" chaiyo
Kunyangwe granite ichizivikanwa nekugadzikana kwayo, haina kudzivirirwa zvachose kukuchinja kwetembiricha. Kunyangwe coefficient yayo yekuwedzera kwekupisa yakaderera, kazhinji 5-7 × 10⁻⁶/℃, mune zviitiko zvekudzora kufamba kwakanyatsojeka, kushanduka-shanduka kwetembiricha kunogona kukonzera shanduko dzehukuru uye kukanganisa kururama kwemodule. Muworkshop yekugadzira machipisi e semiconductor, maitiro e lithography anoda kunyatsorongeka kwedanho redanami, uye tembiricha ye ambient inochinja-chinja ne1 ° C, uye base ye granite ine kureba kwe side ye 1 mita inogona kuburitsa kuwedzera kana kudzikira kwe 5-7 microns. Kuchinja kudiki uku kunopfuudzwa ne ultra-precision motion module ye air float, iyo yakakwana kuita kuti chip lithography pattern deviation uye kuderedza zvakanyanya goho. Saka, yakashongedzerwa ne granite precision base yemhepo inoyangarara ultra-precision module, tembiricha yakakodzera yenzvimbo yekushanda inofanira kudzorwa pa20 ° C ± 1 ° C, nerubatsiro rwemidziyo yekupisa yakasimba-precision constant, senge constant conditioning air conditioning system, kutarisa nguva dzose uye kugadzirisa tembiricha yekunze, kuve nechokwadi chekuti tembiricha inochinja-chinja munzvimbo diki, kuchengetedza kugadzikana kwehukuru hwebase, kuve nechokwadi chekuti module inoshanda zvakanaka.
Chechipiri, kugadzirisa hunyoro: kiyi yekudzivirira hunyoro "dombo"
Hunyoro chimwe chinhu chakakosha chinokanganisa mashandiro ehwaro hwe granite. Munzvimbo ine hunyoro hwakawanda, granite inonyudza utsi hwemvura zviri nyore, izvo zvinogona kukonzera kuungana pamusoro, izvo zvisingangokanganisi chete kugadzikana kwekubatanidza kwe granite uye module yekufamba kwemhepo inoyerera zvakanyanya, asiwo zvinogona kukonzera kukanganiswa kwepamusoro uye kuderedza kupenya uye kururama kwenguva refu. Munzvimbo yekukuya lenzi ye optical, kana hunyoro hwacho hwakakwira kupfuura 60%RH kwenguva yakareba, unyoro hwemvura hunonamirwa pamusoro pehwaro hwe granite huchakanganisa kufamba kwegasi rinotsvedza, kuitira kuti kutsvedza kwe lenzi kuderedzwa, uye pamusoro pacho pave nezvikanganiso. Nokudaro, hunyoro hwenzvimbo yekushanda hunofanira kudzorwa zvakasimba pakati pe40%-60%RH, iyo inogona kutariswa uye kugadziriswa munguva chaiyo nekuisa dehumidifiers, hunyoro sensors nezvimwe zvishandiso kudzivirira kukuvara kwehwaro hwe granite nekuda kwehunyoro hwakawanda, uye kuve nechokwadi chekuti module yekufamba kwe ultra-precision yemhepo inoyerera inoshanda zvakanaka.
Chechitatu, vimbiso yekuchena: "muchengeti" wekururama
Kukuvadzwa kweguruva pahwaro hwegranite chaiyo yemodule yekufamba kwemhepo hakugone kurerutswa. Kana zvidimbu zvidiki zvapinda mugap refirimu regasi pakati pegasi rinotsvedza nehwaro hwegranite, zvinogona kuparadza kufanana kwefirimu regasi, kuwedzera kukweshana, uye kutokwenya pamusoro pehwaro, zvichikonzera kudzikira kwekufamba. Muworkshop yekugadzira zvinhu zvemuchadenga, kana zvidimbu zveguruva mumhepo zvikawira pahwaro hwegranite, nzira yekufamba kwechishandiso chekugadzira inogona kutsauka, zvichikanganisa kururama kwekugadzira zvikamu. Saka, nzvimbo yebasa inofanira kucheneswa zvakanyanya, kusvika pamazinga e10,000 kana kupfuura ehutsanana, kuburikidza nekuisa michina yekuchenesa mweya, senge mafirita emhepo anoshanda zvakanyanya (HEPA), kusefa zvidimbu zveguruva mumhepo, panguva imwe chete, vashandi vanofanirwa kupfeka mbatya dzisina guruva, machira eshangu, nezvimwewo, kuderedza guruva rinounzwa nevanhu. Chengetedza nzvimbo yekushanda yakanyatsonaka yehwaro hwegranite nemodule yekufamba yakanyatsonaka yemodule yekufamba kwemhepo.
Chechina, kupatsanurwa kwe vibration: kushanda zvakanaka kwe "shock pad"
Kudengenyeka kwekunze ndiko muvengi wekururama kwemodule yekufamba kwemhepo inoyerera. Kunyangwe hwaro hwegranite hwakarurama hune kugona kwekuderedza kudedera, kudedera kwakasimba kunogona kuramba kuchidarika muganho wayo webuffer. Kudengenyeka kunokonzerwa nekufamba kwemotokari kwakatenderedza fekitori uye mashandiro emidziyo mikuru yemakanika kunoendeswa kuhwaro hwegranite kuburikidza nepasi, izvo zvinokanganisa kururama kwekufamba kwemodule yekufamba kwemhepo inoyerera zvakanyanya. MuCMM yepamusoro, kudedera kunogona kukonzera kuti kusangana pakati peprobe yekuyera nechinhu chebasa kuyerwe kusagadzikana, zvichikonzera kutsauka kwedata rekuyera. Kuti dambudziko iri rigadziriswe, zvakakosha kushandisa matanho anoshanda ekuparadzanisa kudedera, akadai sekuisa mapedhi ekuparadzanisa vibration munzvimbo yekuisa michina, kuvaka hwaro hwekuparadzanisa vibration, kana kushandisa active vibration isolation system kugadzirisa vibration yekunze, uye kugadzira nzvimbo yakanyarara uye yakagadzikana yehwaro hwekugadzira granite uye module yekufamba kwemhepo inoyerera zvakanyanya.
Nekuzadzisa zvizere zvinodiwa zvakatipoteredza zvekupisa, hunyoro, kuchena uye kudzora kudedera, granite chaiyo base ye ultra-precision motion module ye air float inogona kupa mukana wakazara wekushanda kwayo, kupa vimbiso yakavimbika yekushanda kwakanyatsojeka muminda yakasiyana-siyana, uye kubatsira indasitiri iyi kufambira mberi padanho repamusoro rekugadzira nekutsvagisa kwesainzi.
Nguva yekutumira: Kubvumbi-08-2025