Kudzora Kufamba Kwakarurama: Kuenzanisa Matanho Ekufema Kwemhepo uye Masisitimu eGranite muOptical Metrology

Kutsvaga kusingaperi kwe nanometer-level accuracy mukugadzira semiconductor uye kuongorora kukuru kwemaziso kwakaita kuti masisitimu ekudzora kufamba anyanye kudiwa. Mainjiniya anowanzo tarisana nesarudzo yakakosha yekugadzira: kunaka kwematanho ekutakura mweya pasina kukweshana kana kuvimbika kwakasimba, kunoderedza kudedera kwematanho emakanika akavakirwa pagranite. KuZHHIMG Group, tinoziva kuti mhinduro yakanakisisa inowanzo kuve pakusangana kwesainzi yezvinhu uye fluid dynamics.

Nhaurirano Yepakati: Matanho Ekutakura Mhepo vs Matanho eGranite

Kuti unzwisise musiyano uyu, munhu anofanira kutarisa mashandiro ekubata. Matanho echinyakare egranite anowanzo shandisa mabheyaringi emakanika akanyatsogadzirwa—akadai secross-roller kana mabhora—akabatanidzwa zvakananga pahwaro hwegranite. Masisitimu aya anokosheswa nekuda kwekukwanisa kwawo kurema zvakanyanya uye kuomarara kwakanyanya. Hunhu hwechisikigo hwegranite hunochengetedza hunyoro hunoita kuti chero kuzununguka kwakasara kubva mumota kana nharaunda kunyangarike nekukurumidza, zvichiita kuti ave chinhu chikuru mu metrology ine basa guru.

Kusiyana neizvi, matanho ekutakura mweya anomiririra kutsetseka kukuru. Nekutsigira ngoro inofamba iri pafirimu rakatetepa remhepo ine kumanikidzwa—kazhinji kacho ine ukobvu hwema microns mashoma chete—matanho aya anobvisa kusangana kwemuviri. Kushaikwa kwekukweshana uku kunoita kuti pave ne zero stiction uye zero kusakara, zvichibvumira kumhanya kwakasimba kunodiwa pakushandisa scanning. Kunyange zvazvo ma air bearing achipa kurongeka kwakanyanya kwe geometrical, anoda mhepo yakachena, yakaoma uye anowanzo nzwa kurema kwakanyanya kana tichienzanisa nema mechanical counterparts awo.

Kuongorora Mhando dzeMatanho Emaziso eSpecialized Applications

Nzvimbo ye optics inoda ma profiles ekufamba akasarudzika, zvichikonzera kukura kwematanho akasiyana-siyana e optical. Kusarudza mhando chaiyo kunoenderana nedanho rerusununguko runodiwa uye nharaunda yekuongorora.

Matanho emagetsi emutsetse anogona kunge ari akanyanya kushandiswa, achishandisa masikuruu emota ane simba guru kana kuti mamota ane simba guru. Kana zvichidikanwa kuti nanometer-level straight ishande zvakanaka pakufamba kwenguva refu, matanho emwenje ane mhepo anowanzobatanidzwa ne laser interferometers kuti vape mhinduro.

Matanho ekuona anotenderera akakosha pakuyera makona zvichienderana nekona, senge goniometry kana kutarisa pakati pezvinhu zve lens. Matanho ekuona anotenderera ane mhepo anobatsira zvikuru pano, sezvo achiratidza kumhanya kwe axial ne radial pedyo ne zero, zvichiita kuti optical axis irambe yakarongeka zvakakwana panguva yekutenderera.

Masisitimu e-multi-axis, akadai seXY kana XYZ stacks, anowanzo shandiswa mukuongorora otomatiki wafer. Mumamiriro aya, kusarudza granite base hakugone kutaurwa. Granite inopa huremu hunodiwa uye thermal inertia kudzivirira kufamba kwe axis imwe kusakanganisa kunyatsoita kweimwe.

Kubatana kweGranite neAir Bearings

Ipfungwa isiriyo yakajairika yekuti matanho ekutakura mweya uyematanho egraniteHazvina kusiyana. Kutaura zvazviri, masisitimu ekufambisa epamusoro-soro akabatana neaya maviri. Matanho ekutakura mweya akakwirira anoshandisa granite chete senzvimbo inotungamira. Chikonzero chiri mukukwanisa kwegranite kunamatira kune sub-micron flatness munzvimbo dzakakura - basa rakaoma kuita nearuminiyamu kana simbi.

Nekuti mabheringi emhepo "anobvisa" kusarongeka kwepamusoro pegwara, kutsetseka kwakanyanya kwedanda regranite rakagadzirwa neZHHIMG kunoita kuti firimu remhepo rirambe rakafanana mukufamba kwese. Kubatana uku kunoguma nehurongwa hwekufamba hunopa zvakanakisa pane zvese zviri zviviri: kufamba kwemhepo kusina kukweshana uye kugadzikana kwegranite kwakasimba sedombo.

Metrology yeMaindasitiri

Kufunga Nezvekuchengetedza uye Zvekuchengetedza Zvakatipoteredza

Kushanda kwemaitiro aya kunoda kudzora nharaunda zvakanyanya. Matanho egranite emakanika akasimba asi anoda kunyoroveswa nguva nenguva uye kucheneswa kwenzira dzemabheyaringi kudzivirira kuungana kwemarara. Masystem emhepo, kunyangwe asina kugadziriswa maererano nekunyoroveswa, zvinoenderana nemhando yemhepo inowanikwa. Chero hunyoro kana mafuta ari mumhepo zvinogona kutungamira ku "kuvharika kweoiri," izvo zvinogona kukanganisa firimu remhepo uye kukonzera kusangana kwakanyanya pamusoro.

Uyezve, kutarisira kupisa kwakakosha. Masisitimu ese ari maviri anobatsirwa nehuremu hwakawanda hwegranite inodziya, iyo inoshanda sechinodziya chekupisa chemota dzakatwasuka. Zvisinei, mukushandiswa kwechikero chenanometer, kunyangwe kuchinja kwedhigirii rimwe chete reCelsius kunogona kukonzera kukura kwakakura. Marabhoritari ehunyanzvi anowanzo shandisa granite enclosures dzakagadzirwa kuti dzichengetedze mamiriro ekunze akagadzikana padanho iri.

Mhedziso: Kusarudza Hwaro Hwakakodzera hweKugadzira Zvinhu Zvitsva Kwako

Kunyangwe application yako ichida simba rakawanda rekugadzira granite stage kana kuti simba rekudzora kumhanya kwemhepo, hwaro hwacho hunoramba huri chinhu chakakosha. KuZHHIMG, hatingope chete matanho; tinopa humbowo hwe geological uye mechanic hunodiwa kumapurojekiti ako ane chinangwa chikuru. Sezvo maindasitiri e semiconductor ne optical achifambira mberi kune kushivirira kwakasimba, kuzvipira kwedu kune kugona kwezvinhu uye mainjiniya chaiwo kunoita kuti system yako yekudzora kufamba isazombove chinhu chinokuganhurira mukutsvagisa kwako kana kugadzira.


Nguva yekutumira: Ndira-22-2026