Muminda yekugadzira yepamusoro-soro uye tsvakurudzo yesainzi yemazuva ano, chikuva chekufamba chinotenderera chemhepo inoyerera nemhepo chaiyo ndicho chinhu chakakosha kuti chishande nemazvo. Chigadziko che granite chakarurama ndicho chikamu chikuru chepuratifomu, uye mashandiro aro akabatana zvakanyanya nenzvimbo yekushanda. Kunzwisisa uye kusangana nezvinodiwa nezvakatipoteredza hakungogone kuvimbisa kushanda kwemazvo kwepuratifomu chete, asiwo chikamu chakakosha chebhizinesi kuti riwedzere kukwikwidzana kwaro muminda ine chekuita nazvo, izvo zvinotsanangurwa zvakadzama pazasi.
1. Tembiricha: kutonga kwakaringana kuti ive nechokwadi chekugadzikana kwakaenzana
Kunyangwe granite ichizivikanwa nekugadzikana kwayo, kuwedzera kwayo kwekupisa hakusi zero, uye shanduko diki dzekupisa dzinogona kukanganisa kunyatsojeka kwayo. Kazhinji, kuwedzera kwekupisa kwegranite i5-7 × 10⁻⁶/℃. Mukushandiswa kwepuratifomu yekufambisa yemhepo inoyerera, shanduko iyi diki inowedzerwa nepuratifomu, izvo zvinogona kutungamira pakutsauka kwekururama kwekufamba. Semuenzaniso, mukugadzira machipisi e semiconductor, maitiro ekuisa kurongeka kwezvinodiwa zvedannami level, kuchinja kwekushisa kwe1 ° C, kureba kweparutivi kwe1 mita granite base kunogona kugadzira 5-7 microns yekuwedzera kana kugadzikana kwemutsara, izvo zvakakwana kuita kuti chip lithography pattern deviation iderere, kuderedza goho. Naizvozvo, puratifomu yemhepo inoyerera ye static pressure yakashongedzerwa negranite precision base, tembiricha yakanaka yekushanda inofanira kudzorwa zvakanyanya pa20 ° C ±1 ° C, mabhizinesi anogona kuisa high-precision constant temperature air conditioning system, kugara achitarisa uye achigadzirisa zvakarurama tembiricha ye ambient, kuchengetedza saizi ye granite base kugadzikana, kuve nechokwadi chekuti puratifomu inoshanda zvakanaka.
2.humidity: kudzora zvine musoro, chengetedza mashandiro echigadziko
Hunyoro hunewo simba guru pazvigadziko zvegranite zvine hunyoro. Munzvimbo ine hunyoro hwakawanda, granite inonyudza utsi hwemvura zviri nyore, uye panogona kunge paine kunyungudika pamusoro, izvo zvisingangokanganisi mashandiro enguva dzose ehurongwa hwemhepo inoyerera, asiwo zvinotungamira mukuora kwenguva refu kwenzvimbo yegranite, zvichideredza kururama kwayo uye hupenyu hwebasa. Tichitora nzvimbo yekukuya ye optical lens semuenzaniso, kana hunyoro hwacho hwakakwira kupfuura 60%RH kwenguva yakareba, unyoro hwemvura hunonamirwa pamusoro pechigadziko chegranite huchaparadza kufanana kwefirimu remhepo inoyerera, zvichikonzera kudzikira kwekunyatsorongeka kwekugaya lens uye kukanganisa pamusoro. Nokudaro, hunyoro hwenzvimbo yekushanda hunofanira kudzorwa pakati pe40%-60%RH. Makambani anogona kushandisa dehumidifiers, hunyoro sensors nezvimwe zvishandiso kuti vatarise nekudzora hunyoro munguva chaiyo, vagadzire nzvimbo yakakodzera yekunyorova yechigadziko chegranite chine hunyoro, uye vave nechokwadi chekuti kushanda kwakasimba kwepuratifomu yekufamba kwemhepo inoyerera inotenderera.
3. kuchena: kudzora zvakasimba, kubvisa kupindira kwezvikamu
Dust particles ndiwo "muvengi" we "precision static pressure air floating platform", uye anokuvadza zvikuru granite precision base. Kana tunhu tudiki twapinda mugap regas film pakati pegas float slider negranite base, tunogona kuparadza kufanana kwegas film, kuwedzera kukweshana, uye kutokwenya pamusoro pebase, zvichikanganisa zvakanyanya kurongeka kwekufamba kweplatform. Muworkshop yekugadzira zvinhu zvemuchadenga zvine hungwaru, kana dust particles dziri mumhepo dzikawira pagranite base, nzira yekufamba kwechishandiso chekugadzira inogona kutsauka, zvichikanganisa kurongeka kwezvikamu. Saka, nzvimbo yekushandira inofanira kucheneswa zvakanyanya uye kusvika pachiyero chekuchena che10,000 kana kupfuura. Makambani anogona kusefa dust particles dziri mumhepo nekuisa high efficiency air filters (HEPA), uye anoda kuti vashandi vapfeke mbatya dzisina guruva, shangu dzinofukidza, nezvimwewo, kuderedza guruva rinounzwa nevanhu, uye kuchengetedza nzvimbo yekushanda yakanyatsonaka yegranite base ne "precision static pressure air floating platform".
4. Kudedera: Kuzviparadzanisa zvinobudirira kugadzira nzvimbo yakatsetseka
Kudengenyeka kwekunze kuchakanganisa zvakanyanya kurongeka kwepuratifomu inoyangarara yemhepo inoyerera nechisimba, kunyangwe hwaro hwegranite hwakarurama hune simba rekuderedza kudengenyeka, asi kudengenyeka kwesimba guru kunogona kuramba kuchikanganisa muganho waro webuffer. Kudengenyeka kunokonzerwa nekufamba kwenzvimbo dzakatenderedza fekitori uye mashandiro emidziyo mikuru yemakanika kunoendeswa kuhwaro hwegranite kuburikidza nepasi, izvo zvinokanganisa kurongeka kwekufamba kwepuratifomu. MuCMM yepamusoro, kudengenyeka kunogona kukonzera kuti kusangana pakati peprobe yekuyera nechinhu chebasa kuyerwe kusagadzikana, zvichikonzera kutsauka kwedata rekuyera. Kuti dambudziko iri rigadziriswe, zvakakosha kushandisa matanho anoshanda ekuparadzanisa kudengenyeka, akadai sekuisa mapedhi ekuparadzanisa kudhenzeka munzvimbo yekuisa michina, kuvaka hwaro hwekuparadzanisa kudhenzeka, kana kushandisa sisitimu yekuparadzanisa kudhenzeka kudhenzeka kudhenzeka kwekunze, uye kugadzira nzvimbo yakanyarara uye yakagadzikana yehwaro hwepamusoro hwegranite uye hwaro hwekufamba kunofamba kudhenzeka.
Sangana nezvinodiwa pamusoro apa zvezvakatipoteredza, kuitira kuti zvibatsire zvizere mabhenefiti egranite precision base mupuratifomu yekufamba inoyerera nemhepo inomanikidza, kuve nechokwadi chekuti puratifomu iyi inopa masevhisi ekudzora kufamba kwakanyatsojeka uye kwakasimba kune maindasitiri akasiyana-siyana. Kana mabhizinesi akakwanisa kutarisisa ruzivo urwu munzvimbo yekugadzira, achashandisa mukana uyu mukugadzira kwakanyatsojeka, kutsvagisa kwesainzi nedzimwe nzvimbo, kuwedzera kukwikwidzana kwavo, uye kuwana budiriro inoenderera mberi.
Nguva yekutumira: Kubvumbi-10-2025