Munyaya yekuona ma optics nema metrology, kuwana nzvimbo yakagadzikana uye isina kudedera ndiyo hwaro hwekuyera kwakavimbika. Pakati pemasisitimu ese ekutsigira anoshandiswa mumarabhoritari nenzvimbo dzemaindasitiri, chikuva chinoyangarara chemhepo—chinozivikanwawo setafura yekudzikisa kudengenyeka—chinoita basa rakakosha pakuona kuti zvishandiso zvakaita se interferometers, laser systems, uye coordinate measuring machines (CMMs) zvakanyatsonaka.
Kuumbwa kweUinjiniya kweOptical Platform
Puratifomu yemaziso yepamusoro-soro ine chimiro chehuchi chesimbi chakavharwa zvizere, chakagadzirirwa kusimba kwakanyanya uye kugadzikana kwekupisa. Maplate epamusoro neapasi, anowanzova 5 mm ukobvu, anobatanidzwa nepakati pehuchi yakagadzirwa nemazvo yakagadzirwa nemapepa esimbi e0.25 mm, ichigadzira chimiro chakaenzana uye chinoshanduka. Dhizaini iyi inoderedza kuwedzera kwekupisa uye kudzikira, ichiva nechokwadi chekuti puratifomu iyi inogara yakati sandara kunyangwe paine kuchinja kwekupisa.
Kusiyana nesimbi yealuminium kana kuti simbi dzakasanganiswa, chimiro chesimbi yezinga reuchi chinopa kuomarara kwakasimba mukati mehudzamu hwayo, pasina kukonzera kushanduka kusingadiwe. Madziro emativi akagadzirwawo nesimbi, zvichibvisa kusagadzikana kunokonzerwa nehunyoro—dambudziko rinowanzoonekwa mumapuratifomu akagadzirwa nezvinhu zvakasanganiswa. Mushure mekupedzwa kwechinhu chakasanganiswa otomatiki, tafura yepamusoro inoita kuti ive yakatsetseka, ichipa nzvimbo yakakodzera yekubatanidza magirazi nemidziyo chaiyo.
Kuyera Kwakarurama uye Kuedza Kutevedzera
Vasati vabuda mufekitori, puratifomu yega yega yemhepo inoyangarara inoongororwa zviyedzo zvekudedera uye kutevedzera mitemo. Nyundo yekurova kwemoyo inoshandisa simba rinodzorwa pamusoro pepuratifomu ukuwo masensa achinyora mhinduro yekudedera inobuda. Masaini anoongororwa kuti abudise frequency response spectrum, iyo inobatsira kuona resonance yepuratifomu uye kushanda kwayo kwekuzviparadzanisa.
Zviyero zvakakosha zvikuru zvinotorwa kubva kumakona mana epuratifomu, sezvo aya mapoinzi achimiririra mamiriro ezvinhu akaipisisa ekutevedzera mitemo. Chigadzirwa chega chega chinopihwa gwara rakatsaurirwa rekutevedzera mitemo uye mushumo wekushanda, zvichiita kuti zvive pachena zvizere nezvehunhu hwepuratifomu hunoshanduka. Iyi nhanho yekuyedza inodarika tsika dzechinyakare dzeindasitiri, zvichipa vashandisi kunzwisisa kwakadzama kwemaitiro epuratifomu mumamiriro chaiwo ekushanda.
Basa reKuzviparadzanisa neKudengenyeka
Kuzviparadzanisa kwekudengenyeka ndiko kuri pakati pekugadzirwa kwepuratifomu ye optical. Kuzviparadzanisa kunobva kuzvinhu zviviri zvikuru—kunze nemukati. Kuzviparadzanisa kwekunze kunobva pasi, zvakaita setsoka, michina iri pedyo, kana kuti structural resonance, nepo kuzununguka kwemukati kuchibuda kubva mukuyerera kwemhepo, masisitimu ekutonhodza, uye mashandiro echishandiso chacho.
Chikuva chemhepo chinoyangarara chinoparadzanisa marudzi ese ari maviri. Makumbo acho anoturika mweya anotora uye anoderedza kudedera kwekunze kunopfuudzwa nepasi, ukuwo damping layer yemhepo iri pasi petafura ichisefa ruzha rwemukati rwemuchina. Pamwe chete, vanogadzira hwaro hwakanyarara, hwakagadzikana hunovimbisa kururama kwekuyera kwakanyatsojeka uye kuyedza.
Kunzwisisa Kuwanda Kwezvinhu Zvisikwa
Sisitimu yega yega yemakanika ine frequency yechisikigo—frequency yainodedera nayo kana yakanganiswa. Iyi parameter yakabatana zvakanyanya nehuremu hwesisitimu uye kuoma kwayo. Mumasisitimu ekuparadzanisa magirazi, kuchengetedza frequency yakaderera yechisikigo (kazhinji iri pasi pe2–3 Hz) kwakakosha, sezvo ichibvumira tafura kuti iparadzanise kutenderera kwezvakatipoteredza zvinobudirira pane kuiwedzera. Kuenzana pakati pehukuru, kuomarara, uye damping kunosarudza zvakananga kushanda zvakanaka kwesisitimu uye kugadzikana kwayo.
Tekinoroji yePuratifomu Inoyangarara Mhepo
Mapuratifomu emazuva ano emhepo anoyangarara anogona kuiswa muzvikamu zveXYZ linear air bearing stages uye rotary air bearing platforms. Chinhu chikuru chemasisitimu aya imhepo inoyangarara, iyo inopa kufamba kusingapindiki kunotsigirwa nefirimu rakatetepa remhepo yakamanikidzwa. Zvichienderana nekushandiswa, mabheringi emhepo anogona kunge akatsetseka, akatsetseka, kana kuti espindle.
Zvichienzaniswa nevatungamiriri vemichina, mabheyaringi emhepo anopa kunyatsofamba kwe micron-level, kugona kudzokorora zvakanyanya, uye kusashanda zvakanaka kwe mechanical. Anoshandiswa zvakanyanya mukuongorora semiconductor, photonics, uye nanotechnology, uko kunyatsoita sub-micron uye kugadzikana kwenguva refu kwakakosha.
Kugadzirisa uye Kugara kwenguva refu
Kuchengetedza nzvimbo inoyangarara yemhepo inoyerera zviri nyore asi zvakakosha. Chengeta nzvimbo yakachena uye isina marara, tarisa nguva nenguva kuti mhepo iri mumhepo here kana kuti haina kusvibiswa, uye dzivisa kukanganiswa zvakanyanya patafura. Kana yakachengetedzwa zvakanaka, tafura inoyerera inogona kushanda zvakanaka kwemakumi emakore pasina kuora kwekushanda kwayo.
Nguva yekutumira: Mbudzi-11-2025
