Nei Precision Granite Inoshandiswa muSemiconductor Equipment, CMM uye Laser Systems

Mafuremu nemagantry egranite akagadzirwa nemazvo akagadzirwa kuti ashandiswe mumidziyo ye semiconductor ne laser

Famba nepakati peindasitiri yemichina yekunyatsogadzira zvinhu uye unoramba uchisangana nedombo rimwe chete regrey. Hwaro hwesystem yekuongorora wafer, zambuko remuchina wekuyera coordinate, XY stage ye femtosecond laser cutter - zvese zvakagadzirwa ne granite yekunyatsogadzira zvinhu. Izvi hazvisi tsika kana mafashoni; iinjiniya yezvinhu. Peji rino re hub rinoratidza mashandisirwo matatu anonyanya kudiwa pachimiro chiri nyore -Kushandiswa → Zvinodiwa zveUinjiniya → Chikamu cheGranite → Nei Granite— saka mainjiniya eOEM vanogona kuwana nekukurumidza chikonzero (nechikamu) chine chekuita nemuchina wavo.

Midziyo yeSemiconductor

Zvikamu zvakajairika:hwaro hwegranite, gantry yegranite, koramu yegranite, chikuva chegranite.

Zvinodiwa zveinjiniya:kugadzikana kwekupisa + kudedera kwekudengenyeka + kugadzikana kwejometri.

Chikuva che semiconductor metrology kana chekuongorora chinogona kuchengetedza sub-micron alignment mukati memita imwe chete yekufamba ukuwo mota dzakatwasuka, zvidzoreso zvezvakatipoteredza nevashandisi vese vachiisa kupisa nekudedera.hwaro hwegranite hwe semiconductorndiyo chivakwa chisingaiti chinoita kuti active compensation ikwanise kugadziriswa: ine thermal expansion coefficient inosvika 5–6 × 10⁻⁶/°C uye intrinsic damping yakapetwa kagumi pane yesimbi, granite inochengetedza datum geometry yemuchina ichigara yakafanana nepo electronics ichibata zvikanganiso zvidiki nekukurumidza.magantriesbatanidza njanji mbiri nedanda rakachinjika muchimiro chimwe chakatenderedzwa, saka orthogonality inogadzirwa mu granite kwete kugadziriswa;makoramuinotakura Z-stacks dzakasimba kusvika pahukuru uye dzisina simba remagineti rekuvhiringidza mota kana masensa; granitematanhoinopa mapuraneti akaomarara, asingakanganisi mabheyaringi emhepo uye ma wedge mounts. Kuenderana kwenzvimbo yakachena ibhenefiti yakanyarara: dombo harina ngura, haridi mafuta, uye haripfuuri magasi akawanda kupfuura simbi yakaputirwa.

Michina yekuyera yakabatana (CMM)

Zvikamu zvakajairika:tafura yegranite, zambuko regranite, nzira dzegiranite.

Zvinodiwa zveinjiniya:chiyero chekuyera + kugadzikana kwemativi.

CMM, chaizvoizvo, isystem yekuronga zvinhu yakagadzirwa.Hwaro hwegranite hweCMM isdatum: nzvimbo yayo yakamonera inotsanangura Z, uye kutsetseka kwayo (kazhinji ≤ 3–5 µm pamusoro pemamita maviri, uye munzvimbo iri pasi pe micron yemichina yerabhoritari) inopinda zvakananga mumhedzisiro yega yega yekuyerwa.zambuko regraniteinofanira kufamba kakawanda isina kumonyoroka, izvo zvinogona kuita nekuti kureba kwayo hakufambi nekupisa kwekunze sezvakaita simbi — kugona kudzokorora kwakayerwa mangwanani ano kuchiri kushanda masikati ano.nzira dzekufambisa nematandaGamuchirai mabhodhi ane mhepo inoyerera kana mapedhi anotsvedza panzvimbo dzakati sandara, dzakaoma (Mohs ~6–7) dzinoramba kupera simba nekukwenya kwemakumi emakore ebasa. Nekuti granite haina simba rekushandisa, CMM inogadziriswa mushure mekuiswa inoramba yakagadziriswa - kugadzikana kwenguva refu ndiko chaizvo kunodiwa ne "reference yekuyera". Kune vagadziri vanosarudza puratifomu, gwara redu rekusarudzahwaro hwegranite hwemidziyo chaiyoinofukidza hukuru uye kusarudzwa kwemagiredhi zvakadzama.

Midziyo yeLaser

Zvikamu zvakajairika:hwaro hwegranite, girenayiti XY stage, zvikamu zvegranite.

Zvinodiwa zveinjiniya:kudzora kudedera + kugadzikana kwekupisa.

Kugadziriswa neLaser kurwa nevavengi vaviri: kudedera nekupisa. Kunongedza danda, nzvimbo yakatarisana uye mhando yekucheka zvinopindura kutsauka kwenzira dzemu micron, sakahwaro hwegranite hwemuchina welaserinofanira kuparadzanisa nzira yechiedza kubva mukuzununguka kwepasi uye kubva pakufamba kwemuchina wacho. Kudzivira kwakanyanya kwemukati megranite kunoodza kuzununguka kunokonzerwa nedanho nekukurumidza, kuchirodza mipendero mukugadzira michina midiki uye kudzikamisa upamhi hwekerf pakucheka. Kuwedzera kwayo kwekupisa kwakaderera, kwakaenzana kunoita kuti nzira yemwaranzi irambe yakarongeka sezvo sosi yelaser nenzvimbo dzakatenderedza zvichidziya. GraniteDanho reXYinopa substrate yakati sandara, yakaoma, isiri yemagineti iyo mota dzakatwasuka uye mabheringi emhepo zvinotsvedza — hapana kukwezva kwemarara mumagineti mugomba rekuberekera, hapana ngura kubva ku assist-gas condensate. Kune femtosecond uye picosecond systems, uko hwindo rekuita rinoyerwa mu nanometers, zvikamu zvegranite structure zvinobudirira ndiyo tekinoroji inogonesa pane kungofarirwa.

Pfupiso yeKushandiswa Kwakasiyana-siyana

Kushandiswa Zvikamu zvegranite Chinodiwa chikuru Sei granite
Midziyo yeSemiconductor Nheyo, gantry, koramu, nhanho Kupisa + kunyorovesa + geometry Datum yakagadzikana ye nanometer metrology
CMM Tafura, zambuko, gwara rekufambisa Chiyero chekuyerwa Kufara, kudzokorora, kugadzikana kwenguva refu
Masisitimu eLaser Hwaro, XY stage, chimiro Kudedera + kudzora kupisa Kunyorova, CTE yakaderera, kwete magnetic

Chinhu Chimwe Chete, Maindasitiri Matatu - uye Mubvunzo Mumwe Wekugovera

Mazwi akakosha ane muswe murefu ari pamusoro apa —zvikamu zvegranite zve semiconductor, zvikamu zvegranite zveCMM, hwaro hwegranite hwemidziyo chaiyo, chikuva chegranite, gantry yegranite— zvese zvinoshanduka kuita chinhu chimwe chete cheinjiniya: chinhu chisingafambi, chisingapisi, chisingaite magineti uye chisingatendereri, chakagadzirwa muchimiro che datum structures yemuchina. Chinosiyanisa vatengesi haisi dombo asi envelopu yekugadzira uye nzira yekuongorora iri shure kwayo: kusarudza mabhuroko, kugadzira pasina kushushikana, kukuya kwemhando hombe, uye kugadzirisa zvinhu zvisina chokwadi chakanyorwa.

ZHHIMG®inopa mabhesi egranite akanyatsogadzirwa, magantries, makoramu, mabhiriji uye zviteshi zvevagadziri vemidziyo ye semiconductor, CMM uye laser pasi rese — yakagadzirwa sezvikamu chimwe chete kusvika 100 t uye 20 m, yakakuyiwa pamichina yakakura kusvika 6000 mm.Tiudzei nezve chikumbiro chenyuuye tichakupa mazano ekugadzira zvikamu, giredhi uye hurongwa hwekuisa zvinhu kuti zvienderane nebhajeti yako yekukanganisa.


Nguva yekutumira: Gunyana-29-2026