8 Maitiro Akajairika eZvikamu zveGranite Zvakanyanya muMidziyo yeSemiconductor

Muindasitiri ye semiconductor, uko "nanometer" iriyo chiyero chakajairwa chekuyera, kusimba kwechimiro chemidziyo hakugone kutaurirana. Sezvo ma chip nodes achidzikira kusvika pa5nm zvichikwira, kudiwa kwe vibration damping uye kugadzikana kwekupisa kunosvika padanho rakakwirira. Zvikamu zve granite zvakanyatsonaka zvakachinja kubva pakuva sarudzo yepamusoro kuenda ku "DNA" yakakosha yemidziyo yekugadzira semiconductor.

Semupi wezvishandiso zvinogara kwenguva refu, ZHHIMG® inoongorora mashandisirwo masere akakosha apo granite ndiyo gamba risingataure remhando yepamusoro.

1. Nzvimbo dzeMichina dzeLithography

Muchina we lithography ndiwo muchina wakaoma kunzwisisa mu semiconductor chain. Hwaro hunofanira kutsigira masisitimu makuru e optical uku huchiramba hwakadzikama zvakakwana. Kuwanda kweGranite uye damping yemukati zvinoita kuti ikwanise kunwisa micro-vibrations kubva munzvimbo yakapoteredza, zvichiita kuti chiedza chirambe chakabatana paatomu.

2. Matanho Ekufamba Kwemhepo Anobereka

Kutakurwa kwewafer inomhanyisa kunoda kufamba kusingakanganisike. Nekuti granite inogona kusungirirwa kune sub-micron flatness, inoshanda semubatsiri akakodzera wetekinoroji yekutakura mhepo. "Mhepo inotsvedza" inotsvedza pamusoro pegranite isingashande, zvichiita kuti ifambe zvakanaka pakuongorora nekumisa.

3. Mapuratifomu ekuongorora maWafer & Metrology

Mushure mekuchekwa, mawafer anofanira kuongororwa kuti aone kana paine zvikanganiso. Kuwedzerwa kwekupisa mufuremu yemuchina kunogona kukonzera "kunyepa" kana kuti zvikanganiso zvisina kujeka.Zvikamu zvegranite zvakanyatsonakakupa nzvimbo isina kupisa zvakanyanya, zvichiita kuti ruzivo rwekuongorora ruratidze chokwadi pamusoro pewafer, kwete kukanganiswa kwemuchina.

4. Masisitimu Ekufamba Kwemagantry (Zvivako zveBridge)

Mukubatanidza netambo nekumhanya kukuru, "bhiriji" kana kuti gantry rinofanira kufamba nekukurumidza pasina kuzununguka. Gantry yegranite inopa chiyero chekuoma-kusvika-kurema kwepamusoro kana tichienzanisa nesimbi yakakandwa, zvichideredza zvakanyanya "nguva yekugadzikana" - nguva iyo muchina unofanirwa kumirira kuti kudedera kumire usati waita basa rawo rinotevera.

5. Mafuremu Emidziyo Yekugadzirisa Neraser

Kana paine dambudziko pamasiki kana wafer, ma laser anoshandiswa kugadzirisa nemazvo. Izvi zvinoda hwaro hwechivakwa husina magineti zvachose uye husingafambise zvinhu. Granite inochengetedza ngura, ichidzivirira kukanganiswa kwemagetsi kubva pakukanganisa nzira ye laser ine hunyanzvi.

6. CMM (Michina yekuyera zvinhu) yeMakamuri Ekushambidza

Kudzora mhando mukati mechikamu che semiconductor kunoda maCMM anokwanisa kumira zvakasimba mumakamuri ekuchenesa. Kusiyana nesimbi, iyo inogona kubvisa zvidimbu kana oxidize, granite inodzivirira acid uye haipindi ngura, ichichengetedza chimiro chemidziyo yakasimba isina kusvibisa nharaunda.

7. Zvigadziko zveKupukuta kweMichina yeMakemikari (CMP)

Maitiro eCMP anosanganisira slurry uye makemikari anokonzera ngura zvakanyanya kusimbi. Kusasimba kwemakemikari echisikigo eGranite kunoita kuti ive chinhu chakakodzera chehwaro hwemayuniti ekupolisha, zvichiita kuti igare kwenguva refu kunyangwe munzvimbo dzine makemikari akaomarara.

8. Masisitimu Ekuisa Ion

Nzvimbo dzine simba guru mumidziyo yekuisa maion dzinoda zvinhu zvisingakanganisi matanda emaion kana kugadzira arcing yemagetsi. Hunhu hweGranite hwe dielectric hunoita kuti ive sarudzo yakachengeteka uye yakagadzikana yekuisa zvikamu zvemagetsi uye zve vacuum zvinonzwa zviri nyore.

Sei ZHHIMG® ichishandisa Semiconductor Infrastructure?

KuZHHIMG®, tinonzwisisa kuti base yemidziyo ye semiconductor haisi dombo chete—ichiridzwa chakagadziriswa. Granite yedu nhema yakasarudzika, pamwe chete nehunyanzvi hwedu hwemakore anopfuura makumi matatu ekugadzira nemaoko, inotibvumira kuwana mamakisi e flatness uye parallelism anosangana nezvinodiwa zvenguva ye sub-micron.

• Zvinhu: Granite nhema yeZHHIMG® ine huremu hwakawanda, ine zvidimbu zvakapfava zvikuru.

• Kunyatsorongeka: Magiredhi ekururama zvichienderana neDIN 876 Giredhi 00 kana zvakatemwa zveJIS/ASME.

• Kugadzirisa: Zvinhu zvakabatanidzwa, maT-slots, uye nzira dzinotakura mhepo zvakaiswa kare mumaworkshop edu e10,000m² anodziya tembiricha nguva dzose.