Mashoko

♦ Alumina (Al2O3)

Iyo chaiyo zvedongo zvikamu zvakagadzirwa neZhongHui Intelligent Kugadzira Boka (ZHHIMG) zvinogona kuitwa zvepamusoro-kuchena zvedongo mbishi zvigadzirwa, 92 ~ 97% alumina, 99.5% alumina,> 99.9% alumina, uye CIP inotonhora isostatic kudzvanya. Yakakwira tembiricha sintering uye yakaringana machining, yehunyanzvi kurongeka kwe ± 0.001mm, kutsetseka kusvika kuna Ra0.1, shandisa tembiricha inosvika 1600 madhigirii. Mavara akasiyana eicheramiki anogona kuitwa zvinoenderana nezvinodiwa nevatengi, senge: nhema, chena, beige, rima dzvuku, nezvimwewo. Izvo zvikamu zveceramic zvakagadzirwa nekambani yedu zvinopesana nekupisa kwakanyanya, ngura, kupfeka uye kuputira, uye zvinogona kuva yakashandiswa kwenguva yakareba mukukwirira kwepamusoro, vacuum uye inoparadza gasi nharaunda.

Inoshandiswa zvakanyanya mune dzakasiyana semiconductor yekugadzira michina: Mafuremu (ceramic bracket), Substrate (base), Arm / Bridge (manipulator), Mechanical Zvikamu uye Ceramic Mhepo Kubereka.

AL2O3

Kushanda kwakachena kwakanyanya alumina ceramics:
1. Inoshandiswa kune semiconductor michina: ceramic vacuum chuck, kucheka disc, kuchenesa disc, zvedongo CHUCK.
2. Zvitete zvekuchinjisa: wafer inobata chucks, wafer yekucheka discs, wafer yekuchenesa discs, wafer Optical kuongorora suction makapu.
3. LED / LCD sandara pani inoratidzira indasitiri: zvedongo kamwene, zvedongo kukuya disc, KUSIMBISA PIN, PIN njanji.
4. Optical kutaurirana, solar indasitiri: zvedongo machubhu, zvedongo tsvimbo, wedunhu bhodhi screen kudhinda zvedongo scrapers.
5. Zvidziviriro zvinopisa kupisa uye zvemagetsi: zvikamu zvedongo.
Parizvino, aluminium oxide ceramics inogona kukamurwa kuve yakachena uye yakajairika maceramics. Iyo yakachena kuchena aluminium oxide ceramics nhevedzano inoreva kune ceramic zvinhu zvine zvinopfuura 99.9% Al₂O₃. Nekuda kweye sintering tembiricha inosvika kusvika 1650 - 1990 ° C uye yayo yekupararira wavelength ye1 ~ 6μm, inowanzo gadziridzwa mugirazi rakavhenganiswa pachinzvimbo cheplatinum crucible: iyo inogona kushandiswa sesodium chubhu nekuda kwechiedza chayo chekutumira uye ngura kuramba. alkali simbi. Mune indasitiri yemagetsi, inogona kushandiswa senge yepamusoro-frequency insulating zvinhu zveIC substrates. Zvinoenderana nezvakasiyana zvirimo zvealuminium oxide, zvakajairika aruminiyamu oxide zvedongo dzakateedzana zvinogona kukamurwa kuita 99 ceramics, 95 ceramics, 90 ceramics uye 85 ceramics. Dzimwe nguva, iyo ceramics ine 80% kana 75% yealuminium oxide inoiswawo seyakajairika aluminium oxide ceramic akateedzana. Pakati pavo, 99 aluminium oxide zvedongo zvinhu zvinoshandiswa kuburitsa yakanyanya-tembiricha kukuchira, kupisa moto kwevira chubhu uye yakakosha yekupfeka-isingagadzirise zvinhu, senge zvedongo mabheyari, zvedongo zvisimbiso uye mavhavha evhavha. 95 aluminium ceramics inonyanyo shandiswa sechikamu-chinodzivirira kusapfeka-kuramba chikamu. 85 ceramics inowanzo sanganiswa mune zvimwe zvivakwa, nokudaro ichivandudza mashandiro emagetsi uye simba remuchina. Inogona kushandisa molybdenum, niobium, tantalum nezvimwe zvisimbiso zvesimbi, uye mamwe anoshandiswa semagetsi emagetsi emagetsi.

 

Yakanaka Chinhu (Chinomiririra Kukosha) Chigadzirwa Chigadzirwa AES-12 AES-11 AES-11C AES-11F AES-22S AES-23 AL-31-03
Chemical Kuumbwa Yakadzika-Sodium Nyore Sintering Chigadzirwa H₂O % 0.1 0.1 0.1 0.1 0.1 0.1 0.1
Lol % 0.1 0.2 0.1 0.1 0.1 0.1 0.1
Fe₂0₃ % 0.01 0.01 0.01 0.01 0.01 0.01 0.01
SiO₂ % 0.03 0.03 0.03 0.03 0.02 0.04 0.04
Na₂O % 0.04 0.04 0.04 0.04 0.02 0.04 0.03
MgO * % - 0.11 0.05 0.05 - - -
Al₂0₃ % 99.9 99.9 99.9 99.9 99.9 99.9 99.9
Medium Particle Dhayamita (MT-3300, nzira yekuongorora laser) μm 0.44 0.43 0.39 0.47 1.1 2.2 3
α Crystal saizi μm 0.3 0.3 0.3 0.3 0.3 ~ 1.0 0.3 ~ 4 0.3 ~ 4
Achigadzira Density ** g / cm³ 2.22 2.22 2.2 2.17 2.35 2.57 2.56
Sintering Density ** g / cm³ 3.88 3.93 3.94 3.93 3.88 3.77 3.22
Kuderera Mwero weSintering Line ** % 17 17 18 18 15 12 7

* MgO haina kuverengerwa mukuverenga kwekuchena kweAl₂O₃.
* Hapana upfu hwekuyera 29.4MPa (300kg / cm²), sintering tembiricha iri 1600 ° C.
AES-11 / 11C / 11F: Wedzera 0.05 ~ 0.1% MgO, iyo sinterability yakanaka kwazvo, saka inoshanda kune aluminium oxide ceramics ine kuchena kweanopfuura 99%.
AES-22S: Inozivikanwa nekukwirira kwekuumba uye yakaderera kudzikira kweye sintering tambo, zvinoshanda kutsvedza fomu yekukanda uye zvimwe zvihombe-zvigadzirwa zvine inodiwa chiyero chakaringana.
AES-23 / AES-31-03: Iyo ine yakakwira yekuumba density, thixotropy uye yakaderera viscosity kupfuura AES-22S. iyo yekutanga inoshandiswa kune ceramics iyo yekupedzisira ichishandiswa sekudzora mvura yezvinhu zvekudzivirira moto, kuwana mukurumbira.

♦ Silicon Carbide (SiC) Hunhu

General Hunhu Kuchena kwezvinhu zvikuru (wt%) 97
Ruvara Nhema
Kuwandisa (g / cm³) 3.1
Kuiswa kwemvura (%) 0
Zvokuimba Mechanical Flexural simba (MPa) 400
Mudiki modulus (GPa) 400
Vickers kuomarara (GPa) 20
Thermal Hunhu Kunonyanyisa uchishandisa tembiricha (° C) 1600
Thermal kuwedzera kuwedzera RT ~ 500 ° C 3.9
(1 / ° C x 10-6) RT ~ 800 ° C 4.3
Thermal kuitisa (W / m x K) 130 110
Thermal kuvhunduka kuramba ΔT (° C) 300
Magetsi Magetsi Vhoriyamu kudzivisa 25 ° C 3 x 106
300 ° C -
500 ° C -
800 ° C -
Dielectric nguva dzose 10GHz -
Dhizimusi kurasikirwa (x 10-4) -
Q Chinhu (x 104) -
Dielectric kuputsa voltage (KV / mm) -

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♦ Silicon Nitride Ceramic

Mashoko Chikwata Si₃N₄
Sintering Nzira - Pressure Gasi Sintered
Kuwandisa g / cm³ 3.22
Ruvara - Rima Grey
Chiyero cheMvura Inotora % 0
Mudiki Modulus Gpa 290
Vickers Kuomarara Gpa 18 - 20
Kumanikidza Simba Mpa 2200
Kukotama Simba Mpa 650
Thermal Kuitisa W / mK 25
Thermal Shock Nemishonga ° (° C) 450 - 650
Kunonyanyisa Uchishandisa Tembiricha ° C 1200
Kugara kweVhoriyamu Cm · cm > 10 ^ 14
Dhizimusi Kakawanda - 8.2
Dielectric Simba kV / mm 16