Ongororo yezvakanakira uye zvakaipira kushandisa granite base yekunyatsoita static pressure air floating movement platform.

Kutanga, zvakanakira zvegranite base
High rigidity uye yakaderera thermal deformation
Density yegranite yakakwira (inenge 2.6-2.8 g/cm³), uye iyo Young's modulus inogona kusvika 50-100 GPa, inopfuura nekure iyo yezvinhu zvakajairika zvesimbi. Uku kuomarara kwepamusoro kunogona kunyatso kuvharidzira kuzunguzika kwekunze uye kuomeswa kwemutoro, uye kuve nechokwadi kutsetseka kwegwara remhepo. Panguva imwecheteyo, iyo mutsara yekuwedzera coefficient yegranite yakadzikira kwazvo (inenge 5 × 10⁻⁶/℃), chete 1/3 yealuminium alloy, inenge isina deformation yekupisa mumhepo yekushanduka kwekushisa, kunyanya yakakodzera kugara kwekushisa kwema laboratori kana maindasitiri maficha ane tembiricha yakakura kusiyana pakati pemasikati neusiku.

Excellent damping performance
Iyo polycrystalline chimiro chegranite chinoita kuti ive neyakasikwa damping maitiro, uye vibration attenuation nguva inokurumidza 3-5 times kupfuura iyo yesimbi. Mukuita kweiyo chaiyo machining, inogona kunyatso tora yakakwira-frequency vibration senge mota kutanga uye kumira, kucheka kwezvishandiso, uye kudzivirira pesvedzero yeresonance pane yekumisikidza kwepuratifomu inofamba (yakajairika kukosha kusvika ± 0.1μm).

Kugara kwenguva refu dimensional kugadzikana
Mushure memazana emamiriyoni emakore eiyo geological process yakagadzira granite, kushushikana kwayo kwemukati kwakaburitswa zvachose, kwete senge simbi zvinhu nekuda kwekunetseka kwakasara kunokonzerwa nekunonoka deformation. Iyo data yekuyedza inoratidza kuti saizi shanduko yegireni gasi isingasviki 1μm/m mukati memakore gumi, iyo iri nani zvakanyanya kupfuura iyo yesimbi yakakandwa kana welded simbi zvimiro.

Corrosion-resistant uye kugadzirisa-isina
Granite kune asidhi uye alkali, mafuta, mwando uye zvimwe zvakatipoteredza zvinhu zvine kushivirira kwakasimba, hapana chikonzero chekupfekedza iyo anti-ngura layer senguva dzose sesimbi base. Mushure mekugaya uye kupukuta, kushata kwepamusoro kunogona kusvika kuRa 0.2μm kana kushoma, iyo inogona kushandiswa zvakananga seyakatakura pamusoro peiyo air float guide rail kuderedza zvikanganiso zvegungano.

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Chechipiri, miganhu yegranite base
Kugadzirisa kuoma uye dambudziko remutengo
Granite ine kuomarara kweMohs ye6-7, inoda kushandiswa kwemidziyo yedhaimondi yekugaya chaiko, kugadzirisa kushanda zvakanaka inongova 1/5 yezvinhu zvesimbi. Chimiro chakaomesesa cheiyo dovetail groove, maburi ane threaded uye mamwe maficha emutengo wekugadzirisa akakwira, uye kutenderera kutenderera kwakareba (semuenzaniso, kugadzirwa kwe2m×1m papuratifomu kunotora anopfuura maawa mazana maviri), zvichikonzera mutengo wakazara 30% -50% yakakwira kupfuura iyo aluminium alloy platform.

Brittle fracture ngozi
Kunyangwe iyo yekumanikidza simba inogona kusvika 200-300MPa, simba rekusimba regranite ingori 1/10 yayo. Brittle fracture iri nyore kuitika pasi pekunyanya kukanganisa mutoro, uye kukuvara kwakaoma kugadzirisa. Izvo zvinodikanwa kudzivirira kusungirirwa kwekushushikana kuburikidza nedhizaini yedhizaini, sekushandisa yakatenderedzwa makona shanduko, kuwedzera huwandu hwemapoinzi ekutsigira, nezvimwe.

Huremu hunounza miganhu yehurongwa
Density yegranite ndeye 2.5 times iyo yealuminium alloy, zvichikonzera kuwedzera kukuru kwehuremu hwese hwepuratifomu. Izvi zvinoisa chidikanwi chepamusoro pamusoro pekukwanisa kwekutakura kwechimiro chekutsigira, uye kushanda kwesimba kunogona kukanganiswa nezvinetso zve inertia mumamiriro ezvinhu anoda kufamba kwepamusoro-soro (senge lithography wafer table).

Material anisotropy
Iyo mineral particle kugoverwa kwegiraniti yechisikigo inotungamira, uye kuoma uye kupisa kwekuwedzera kwemafuta enzvimbo dzakasiyana kwakasiyana zvishoma (anenge ± 5%). Izvi zvinogona kuunza zvikanganiso zvisingatarisirwi zvemapuratifomu ekupedzisira (akadai senanoscale positioning), izvo zvinoda kuvandudzwa nekunyatsosarudzwa kwezvinhu uye kurapa homogenization (sekukwira-tembiricha calcination).
Sechikamu chepakati chepamusoro-chaiyo maindasitiri emidziyo, chaiyo static kumanikidza mweya inoyangarara chikuva inoshandiswa zvakanyanya mukugadzira semiconductor, optical processing, kunyatsoyera kuyerwa uye mamwe minda. Kusarudzwa kwezvinhu zvepasi kunobata zvakananga kugadzikana, kurongeka uye hupenyu hwebasa hwepuratifomu. Granite (yakasikwa granite), ine yakasarudzika maitiro emuviri, yave yakakurumbira zvinhu zvemabhesi epuratifomu akadaro mumakore achangopfuura.

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Nguva yekutumira: Kubvumbi-09-2025