Mubasa rekugadzira maindasitiri nemazvo uye kutsvaga tsvakurudzo yesainzi yemazuva ano, granite platform ine mashandiro ayo akanaka ekudengenyeka kwenyika yave chishandiso chakakosha chekuona kuti mabasa akasiyana-siyana akagadzirwa nemazvo anobudirira. Mwero wayo wakasimba wekuongorora kudengenyeka unopa vimbiso yakavimbika kune akawanda mabasa anonyanya kukanganiswa nekudengenyeka.
Kutanga, hwaro hwechikuva chegranite chinodzivirira kudengenyeka kwenyika
Hunhu hwezvinhu: Puratifomu yegranite yakagadzirwa negranite yechisikigo, mushure memamiriyoni emakore ekuita kwegeological, chimiro chekristaro chemukati chakanyatsorongeka uye chakafanana zvikuru. Chimiro ichi chakasiyana chinopa granite mwero wakaderera kwazvo wekuchinja kwe elastic modulus, kana ikarohwa ne shock, zvichienzaniswa nezvimwe zvinhu zvakajairika zvakaita sesimbi, inogona kudzora elastic deformation yayo munzvimbo diki kwazvo. Zvichienderana nesarudzo yemasangano ekuyedza ane mvumo, elastic deformation yegranite munzvimbo yakajairwa yekuyedza vibration inongova 1/10-1/20 chete yezvinhu zvesimbi zvakajairika, izvo zvinoisa hwaro hwakasimba hwekuita kwepamusoro-soro kwepasi pepuratifomu.
Dhizaini yechivakwa: Kubva pamaonero echivakwa chikuru, chikuva chegranite chakagadzirwa nechimiro chejometri chakagadziriswa uye marongerwo ekutsigira. Chiyero chehurefu-upamhi-hurefu hwechikuva chinoverengerwa nokungwarira kuti chive nechokwadi chekuti pakati pegiravhiti panogara pakadzikama uye kuderedza njodzi yekuzununguka kunokonzerwa nekudengenyeka. Panguva imwe chete, kugoverwa kwenzvimbo dzekutsigira kwakarongwa nesainzi zvichienderana nemisimboti yemakanika, iyo inogona kuparadzira zvakaenzana huremu hwezvinhu zvakaiswa pachikuva uye simba rekubata rinogadzirwa nekudengenyeka kwekunze. Semuenzaniso, pachikuva chikuru chegranite, chikuva chekutsigira chine mapoinzi akawanda chinoshandiswa, uye kukanganisa kwedaro pakati penzvimbo dzekutsigira dziri pedyo kunodzorwa mukati me ±0.05mm, izvo zvinodzivirira kusangana kwezvinetso zvemunharaunda uye zvinowedzera kuvandudza kugona kwepasi pechikuva.
2. Zviratidzo zvakadzama uye mamiriro ekushandiswa kwedanho rega rega rinodzivirira kuvhunduka
Mwero weLevel I unodzivirira kuvhunduka (mamiriro ezvinhu anodiwa nemazvo zvakanyanya)
Kuyerera kweVibration Displacement Index: Mukati mehuwandu hwema "seismic wave vibration frequency" (0.1Hz-100Hz), kukosha kwepamusoro kwe "vibration displacement" chero kupi zvako pamusoro pepuratifomu hakupfuuri 0.001mm. Kana "low-frequency vibration" inogadzirwa nekushanda kwemichina mikuru yakakomberedza (yakadai sekuyerera kwe "heavy machine tool" pa "frequency" inosvika 1Hz-10Hz) ikakanganiswa, zvishandiso zvekuyera zvine hungwaru zvakaiswa papuratifomu, zvakaita se "atomic force microscopy", kuchinja kwe "relative displacement" pakati pe "measuring probe" ne "measured sample" hakukoshi, zvichiita kuti kunyatsoyera pa "nanoscale" kusakanganiswa.
Mamiriro ekushandisa: Inonyanya kushandiswa mukuita lithography yekugadzira semiconductor chips. Kugadzira machip kunoda kunyatsorongeka kwe lithographic, uye upamhi hwemutsetse hwasvika padanho re nanometer. Mukuita lithography, granite platform inofanirwa kupa rutsigiro rwakagadzikana kumuchina we lithography, kuparadzanisa vibration inokonzereswa nekushanda kwezvimwe zvishandiso muworkshop, uye kuve nechokwadi chekuti lithography pattern iri kutamiswa nemazvo, nokudaro zvichivandudza zvikuru goho rekugadzira machip. Zvichienderana nehuwandu hweindasitiri, kushandiswa kwetambo yekugadzira machip inosangana negranite platform yemazinga ekutanga isingadhuri kwakawedzera goho ne15%-20% zvichienzaniswa nekushandiswa kwemapuratifomu akajairwa.
Muyero weLevel 2 wekudzivirira kuvhunduka (mamiriro ezvinhu akanyatsojeka)
Kuyerera kweVibration Displacement Index: pasi pehuwandu hwekutenderera kwe0.1Hz-100Hz, kutenderera kwepamusoro kwenzvimbo yepuratifomu kunodzorwa mukati me0.005mm. Kune kuyedza kwekuona zvimedu zve microscopic kunoitwa mumarabhoritari ekutsvagisa kwesainzi mumayunivhesiti, senge kuyedza kwe scanning tunneling microscope (STM), nhanho iyi yekushanda kwe shockproof inogona kuve nechokwadi chekuti nzvimbo iri pakati pemuromo weSTM nemuenzaniso yakagadzikana kunyangwe paine mamwe masosi ekare ekutenderera akadai sevashandi vanofamba-famba murabhoritari nemidziyo inofamba-famba murabhoritari. Saka, ruzivo rwe quantum state rwezvimedu zve microscopic runotorwa nemazvo, izvo zvinopa vimbiso kune vaongorori kuti vawane data rekuyedza rakarurama.
Mamiriro ekushandisa: Inoshandiswa zvakanyanya mukugadzira zvishandiso zvine hungwaru hwepamusoro, senge maitiro ekugadzirisa ekugadzirisa emagetsi ane hungwaru hwepamusoro. Mabharansi emagetsi anonyanya kukanganiswa nekudengenyeka, uye kunyangwe kutenderera kudiki kunogona kukonzera kutsauka mumhedzisiro yekuyera. Puratifomu yegranite, inosangana nedanho rechipiri rinodzivirira kuvhunduka, inogona kupa nharaunda yakagadzikana yekuyera uye kushanda kwebharansi yemagetsi, kuve nechokwadi chekuti kuyera kwakarurama kwebharansi kunosvika padanho re microgram, uye kusangana nezvinodiwa neindasitiri zvekururama kwekuyera huremu hwakanyanya senge kuzivikanwa kwemishonga nezvishongo.
Chiyero chekudzivirira kuvhunduka chine nhanho nhatu (mamiriro ezvinhu akanyatsojeka)
Chiratidzo chekubuda kwekudengenyeka: muhuwandu hwemafrequency ekudzungaira hwe0.1Hz-100Hz, kudzungaira kwepamusoro pepamusoro pepuratifomu hakupfuuri 0.01mm. Kana wakatarisana nekudzungaira kunokonzerwa nekushanda kwemidziyo yepakati nepakati inowanikwa mufekitori (huwandu hwemafrequency ekudzungaira hunowanzova 10Hz-50Hz), michina yekuyera yakajairika yakaiswa papuratifomu yegranite, senge chimbo chekuyera chinokodzera, inogona kuchengetedza kururama kwekuyera kwakasimba, uye kutsauka kwedata rekuyera kunodzorwa mukati mechikamu chidiki kwazvo.
Mamiriro ekushandisa: Akakodzera kuyera nemazvo mukugadzira zvikamu zvemota. Kururama kwekugadzira injini yemotokari, giya rekutumira nezvimwe zvikamu kunokanganisa zvakananga mashandiro uye kuvimbika kwemotokari. Mukuyera zvikamu izvi, chikuva chegranite chekushanda kwezvitatu zvisingadhuri chinogona kuparadzanisa zvinobudirira michina yeworkshop inomhanya ichidedera, kuve nechokwadi chekuti chishandiso chekuyera chinoyera nemazvo saizi yezvikamu, chimiro uye chinzvimbo nezvimwe zviyero, kupa rutsigiro rwakasimba rwekudzora kunaka kwezvikamu zvemota, kuvandudza kugadzirwa kwezvikamu zvemota.
Chechitatu, kuyedzwa kwemhando yepamusoro kwakasimba kuti kuve nechokwadi chekuti huwandu hwekudengenyeka kwenyika hwasvika padanho repamusoro
Kuti tive nechokwadi chekuti chikuva chega chega chegranite chinogona kusangana nezvinodiwa kuti chisapararire kudengenyeka kwenyika, takagadzira sisitimu yekuongorora mhando yakasimba uye yakakwana. Mukugadzira, bvunzo yakazara yezvivakwa zvegranite inoitwa pachinhu chimwe nechimwe chegranite raw material kuti ive nechokwadi chekuti chimiro chayo chemukati chakafanana uye chisina zvikanganiso zviri pachena. Mushure mekunge kugadziriswa kwepuratifomu kwapera, michina yekuyedza vibration simulation yepamusoro inoshandiswa kutevedzera nzvimbo dzakasiyana-siyana dzakaoma dze vibration kuyedza chikuva. Kuburikidza ne sensor ye laser displacement yakanyatsojeka, kutarisa shanduko dzekutama kwenzvimbo yega yega pamusoro pepuratifomu panguva yekutama, uye data rinotumirwa kune system yekugadzira data yehunyanzvi kuti iongororwe. Kana zviratidzo zvekutama zvepuratifomu zvikanyatsoenderana nezvinodiwa kuti zvisapararire shock-proof, zvinobvumidzwa kuiswa mumusika.
Mukupfupisa, chikuva chegranite chine mwero wesainzi unodzivirira kuvhunduka, mashandiro akanaka kwazvo anodzivirira kuvhunduka uye kudzora mhando kwakasimba, chekugadzira maindasitiri nebasa resainzi mumabasa akanyatsojeka kuti chipe rutsigiro rwakasimba, ndiko kutsvaga kururama kwakakwana uye kuvimbika kwesarudzo.
Nguva yekutumira: Kurume-28-2025