Munyika ye nanometer ye semiconductor lithography, kudedera kudiki kwechimiro kana kuwedzera kwekupisa kudiki kunogona kuita kuti silicon wafer yemamiriyoni akawanda isashande. Sezvo indasitiri iri kufambira mberi kuenda kuma nodes e2nm uye kupfuura, zvinhu zvinoshandiswa pakugadzira machine bases hazvisisiri "zvinotsigira" chete - ivo vari vatori vechikamu vanoshingaira mukutsvaga kunyatsojeka.
KuZHHIMG, tiri kubvunzwa zvakanyanya nemakambani epasi rose ekugadzira zvinhu: Tinofanira kuramba tichitevedzera kugadzikana kwakaratidzwa kwegranite chaiyo, kana kuti yave nguva yekuti tichinje kuita zveceramics zvemhando yepamusoro? Mhinduro iri mufizikisi chaiyo yekushandiswa kwenyu.
Fizikisi Yekugadzikana: Granite vs. Ceramic
Pakuenzanisazvikamu zvegranite zvakanyatsonakauye nhengo dzeceramic, tinofanira kutarisa "utatu hutsvene" hweinjiniya yekunyatsogadzirisa: Damping, Thermal Stability, uye Stiffness.
1. Kuderedza Kudengenyeka: Kubatsira kweZvivako Zvidiki zveChisikigo
Kudedera ndiko muvengi wemagetsi anobuda. Granite, dombo rechisikigo rinopisa, rine chimiro chakaoma chepolycrystalline chinoshanda sechisikigo chinobvisa kuvhunduka. Kukweshana uku kwemukati kunobvumira granite kubvisa simba remuchina zvinobudirira kupfuura zvinhu zvakawanda zvakagadzirwa.
Kusiyana neizvi, zviumbwa zvesimbi zvakaita seSilicon Carbide (SiC) kana Alumina zvakaoma zvikuru. Kunyange zvazvo kuoma uku kuchibatsira pakupindura kwemhepo yakawanda, zviumbwa zvesimbi hazvinyanyi kuderedza kunyorova kwemukati. Munzvimbo ye lithography, uko matanho anofamba nekukurumidza zvakanyanya, hwaro hwegranite kubva kuZHHIMG hunopa nzvimbo "yakanyarara" inodiwa kuti zviumbwa zvesimbi zvirambe zvakatarisana zvakanaka.
2. Kuchinja Kwekupisa: Kutarisira Micron
Kuwedzerwa kwekupisa kazhinji ndiko kunonyanya kukonzera kurongeka kwenguva refu. Granite yechisikigo ine coefficient yakaderera yekuwedzera kwekupisa (CTE), inowanzoita 5 × 10^{-6}/K kusvika 6 × 10^{-6}/K.
Zvigadzirwa zvesimbi zvemhando yepamusoro zvinogona kusvika padanho reCTE rakaderera, asi kazhinji zvine thermal inertia shoma. Izvi zvinoreva kuti kunyange zvazvo zvichikura zvishoma, zvinokurumidza kuita zvinoenderana nekuchinja-chinja kwekushisa kwemamiriro ekunze. Granite's mass thermal mass inoshanda se "buffer," zvichiita kuti ive sarudzo inosarudzwa kune vanhu vakawanda.zvigadziko zvemuchina we lithographyuko nharaunda inofanira kuramba yakagadzikana kwemaawa akawanda ekushanda nguva dzose.
Zvinhu zveLithography Frontier
Muchina wemazuva ano we lithography pamwe ndiwo mudziyo wakaoma kupfuura mimwe yose yati yambogadzirwa. Pamafuremu makuru ekuvaka, indasitiri iyi yagara ichivimba nawo kare.Zvikamu zveGranite Zvakaruramanekuda kwehunhu hwavo husina simba remagineti uye kuramba ngura.
Zvisinei, kune zvikamu zvinofamba zvinomhanya zvakanyanya mukati me lithography stack—senge wafer chucks kana short-stroke stages—ceramics dziri kuwedzera simba nekuda kwehukuru hwadzo hwekuomarara nehuremu. PaZHHIMG, tinoona ramangwana kwete semakwikwi pakati pezvinhu izvi, asi sekubatanidzwa kwestrategic hybrid. Nekushandisa granite base yefaundesheni uye ceramic yezvikamu zvine simba, mainjiniya vanogona kuwana chiyero chepamusoro chekudzikamisa nekumhanya.
Nei ZHHIMG iri Mutengesi Anodiwa Pasirose
Semutungamirimutengesi wezvikamu zvegranite zvakaruramaZHHIMG inonzwisisa kuti kunyatsoita zvinhu nemazvo hakusi kungoshandisa zvinhu zvakagadzirwa chete; asi kunoshandisa metrology. Nzvimbo yedu inoshandisa vacuum-degassing pakugadzira zvinhu zvakasiyana-siyana uye nzira dzekugadzira machira dzinopfuura DIN 876 Grade 00 standards.
Isu tinonyanya kuita:
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Magadziko eGranite Akagadzirwa Nemaoko eOEM: Mageometri akagadzirirwa nemidziyo yakasanganiswa yekuisa tambo dzekutungamira dzakatwasuka.
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Zvikamu zveLithography Zvakaoma: Kugadzira nheyo dzakakura dzinochengetedza kutsetseka mukati me 1 micron pamusoro pemamita akati wandei.
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Advanced Metrology: Kupa zviyero zvekutarisa zvemidziyo yekuongorora inonyanya kubatwa-batwa pasi rose.
Mhedziso: Nzira Yekutungamira Yehurongwa
Kusarudza pakati pegranite neceramic kunoda kunzwisisa kwakadzama kwechimiro chemuchina wako chinoshanduka. Kunyange zvazvo ceramics dzichipa kuomarara kwakanyanya, damping yechisikigo uye kupisa kwegranite hazvigone kuenzaniswa kuti zvigadzikane zvakanyanya.
Sezvatiri kutarisa mugore ra2026, ZHHIMG iri kuramba ichiita zvinhu zvitsva panosangana matombo echisikigo nezvinhu zvakagadzirwa neunyanzvi. Hatingopi hwaro chete; tinopa chokwadi chekuti michina yenyu ichaita zvinoenderana nepfungwa dzayo.
Bata timu yeinjiniya yeZHHIMG nhasi kuti uwane pepa reruzivo rwekuenzanisa kana kuti kurukurai nezvezvinodiwa neprojekiti yenyu.
Nguva yekutumira: Ndira-26-2026