Bvisa "simba rematombo" riri shure kwekugadzirwa kwema semiconductor - Zvikamu zve granite zvine hungwaru zvinogona sei kuumbazve muganhu wekugadzirwa kwema chip

Kuchinja Kwakanaka Mukugadzira Midziyo Yemagetsi: Kana granite Yasangana Netekinoroji yeMicron
1.1 Kuwanikwa kusingatarisirwi mune zvesainzi yezvinhu
Sekureva kwemushumo weSEMI International Semiconductor Association wegore ra2023, 63% yezvigadzirwa zvepamusoro zvepasi rose zvakatanga kushandisa magranite bases pachinzvimbo chemapuratifomu esimbi echinyakare. Dombo iri rechisikigo, rinobva mukunyoroveswa kwesimbi mupasi rose, riri kunyora patsva nhoroondo yekugadzira magma nekuda kwehunhu hwaro hwakasiyana:

Kubatsira kwekusapisa kwemafuta: chiyero chekuwedzera kwemafuta chegranite 4.5×10⁻⁶/℃ chikamu chimwe chete kubva muzvishanu zvesimbi isingatsvi, uye kugadzikana kwehukuru hwe ±0.001mm kunochengetwa mukushanda kuri kuitwa nemuchina we lithography.

Hunhu hwekudzikisa vibration: iyo yemukati yekukweshana coefficient yakakwira ka15 kupfuura iyo yesimbi yakakandwa, ichinyatso tora michina micro-vibration

Zero magnetization hunhu: kubvisa zvachose kukanganisa kwemagineti mukuyera kwelaser

1.2 Rwendo rwekushanduka kubva pane rwangu kuenda kune runako
Tichitora semuenzaniso wekugadzirwa kweZHHIMG muShandong, chidimbu chegranite chisina kubikwa chinofanira kupfuudzwa:

Kugadzira michina nemazvo: nzvimbo yekugadzira michina yekubatanidza ine mativi mashanu kwemaawa mazana maviri ekugaya nguva dzose, kuomarara kwenzvimbo kusvika kuRa0.008μm

Kurapa kwekukwegura kwekugadzira: Maawa makumi mana nemasere ekusunungurwa kwekushushikana kwechisikigo muworkshop yekupisa neunyoro nguva dzose, izvo zvinovandudza kugadzikana kwechigadzirwa ne40%
Chechipiri, bvisa matambudziko matanhatu ekugadzira semiconductor "rock solution"
2.1 Chirongwa chekuderedza kupatsanurwa kwehuwandu hwewafer

Kuratidzwa kwenyaya iyi: Mushure mekunge kambani yekugadzira machipisi muGermany yatanga kushandisa chikuva chedu chegranite chinoyangarara negesi:

Dhayamita yewafer	kudzikiswa kwehuwandu hwechip	kuvandudzwa kwekutsetseka
12 inches	67%	≤0.001mm
18 inches	82%	≤0.0005mm

2.2 Chirongwa chekubudirira kweLithographic alignment

Sisitimu yekuripa tembiricha: sensor yeceramic yakamisikidzwa inoongorora chimiro chinoshanduka panguva chaiyo uye inogadzirisa otomatiki kutenderera kwepuratifomu
Data rakayerwa: pasi pekuchinja kwe28℃±5℃, kururama kwekuisa kunochinja zvishoma pane 0.12μm