Dhonza iyo "dombo simba" kuseri kwekugadzira semiconductor - Sei granite chaiyo zvikamu zvingagadzirisa zvakare muganho chaiwo wekugadzira chip

Iyo Precision Revolution mukugadzira semiconductor: Kana granite inosangana ne micron tekinoroji
1.1 Zvakawanikwa zvisingatarisirwi mune zvesainzi
Sekureva kwe2023 SEMI International Semiconductor Association mushumo, makumi matanhatu nenhatu muzana emachira epamusoro epasi atanga kushandisa mabhesi egranite pachinzvimbo chechinyakare simbi mapuratifomu. Iri dombo rechisikigo, rinobva kune magma condensation yakadzika muPasi, riri kunyora zvakare nhoroondo yekugadzira semiconductor nekuda kweiyo yakasarudzika yemuviri zvimiro:

Thermal inertia advantage: thermal yekuwedzera coefficient yegranite 4.5×10⁻⁶/℃ ingori 1/5 yesimbi isina tsvina, uye dimensional kugadzikana kwe ± 0.001mm inochengetwa mubasa rinoramba riripo remuchina welithography.

Vibration damping maitiro: iyo yemukati friction coefficient yakakwira kagumi neshanu pane iyo yesimbi yakakandwa, inonyatso tora michina micro-vibration.

Zero magnetization chimiro: bvisa zvachose kukanganisa kwemagineti mukuyera kwelaser

1.2 Iyo metamorphosis rwendo kubva kune yangu kuenda kune fab
Kutora hwaro hwekugadzira hwakangwara hweZHHIMG muShandong semuenzaniso, chidimbu chegranite mbishi chinoda kuitika:

Ultra-chaiyo machining: mashanu-axis linkage machining centre kwemaawa mazana maviri ekuramba achikuya, kushata kwepamusoro kusvika kuRa0.008μm

Artificial kuchembera kurapwa: maawa makumi mana nemasere ekusunungurwa kwekushushikana kwechisikigo mumhepo inogara tembiricha uye humidity workshop, iyo inovandudza kugadzikana kwechigadzirwa ne40%
Chechipiri, pwanya matambudziko matanhatu chaiwo ekugadzira semiconductor "rock solution"
2.1 Wafer fragmentation rate yekudzikisa chirongwa

Case kuratidzira: Mushure meiyo chip yakawanikwa muGermany inotora yedu gasi inoyangarara granite chikuva:

Wafer dhayamita	chip rate kuderedza	flatness kunatsiridza
12 inches	67%	≤0.001mm
18 inches	82%	≤0.0005mm

2.2 Lithographic alignment accuracy breakthrough scheme

Tembiricha yekubhadhara sisitimu: yakamisikidzwa ceramic sensor inotarisisa chimiro chinoshanduka munguva chaiyo uye inogadzirisa otomatiki chimiro chepuratifomu.
Yakayerwa data: pasi pekuchinja kwe 28 ℃ ± 5 ℃, iko iko kunyudza kunochinja isingasviki 0.12μm.