Muminda yekugadzira chaiyo uye kutsvagisa kwesainzi, kupfava kwegranite chaiyo mapuratifomu chiratidzo chakakosha chekuona chokwadi chemidziyo. Iyi inotevera sumo yakadzama kune akati wandei nzira dzekuona uye maitiro avo ekushanda kwauri. .
I. Laser interferometer Detection nzira
Iyo laser interferometer ndiyo yakasarudzika chishandiso chepamusoro-chaiyo flatness yekuona. Tora ZYGO GPI XP laser interferometer semuenzaniso, kugadzirisa kwayo kunogona kusvika 0.1nm. Paunenge uchitsvaga, tanga wagadzirisa chiedza che interferometer nepuratifomu uye ugovane nzvimbo yepuratifomu mu 50mm × 50mm grid nzvimbo. Mushure meizvozvo, iyo yekukanganisa fringe data yakaunganidzwa poindi nepoindi, uye iyo data yakaiswa uye yakaongororwa uchishandisa iyo Zernike polynomial kuwana iyo flatness kukanganisa. Iyi nzira inoshanda kune yakakwirira-chaiyo mapuratifomu uye inogona kuona flatness zvikanganiso zve ≤0.5μm/m². Inowanzoshandiswa pakuona michina yephotolithography uye yakakwirira-yekupedzisira matatu-coordinate yekuyera muchina mapuratifomu. .
Ii. Electronic Level Array Method
Iyo yemagetsi level array yekuona iri nyore kushandisa uye inoshanda zvakanyanya. Iyo TESA A2 yemagetsi level (ine resolution ye 0.01μm/m) yakasarudzwa uye yakarongedzwa mu9 × 9 array pamwe neX/Y axis kutungamira kwepuratifomu. Nekuunganidza pamwe chete iyo yekurerekera dhata yedanho rega rega uye wozoshandisa idiki skweya nzira yekuverenga, iyo flatness kukosha inogona kuwanikwa nemazvo. Iyi nzira inogona kunyatso ziva iyo yemunharaunda concavity uye convexity mamiriro epuratifomu. Semuenzaniso, kuchinja kwe 0.2μm mukati me 50mm range inogonawo kuonekwa, iyo yakakodzera kukurumidza kuonekwa mukugadzirwa kwehuwandu. .
Iii. Optical Flat crystal Method
Iyo optical flat crystal nzira inokodzera kutariswa kwenzvimbo diki mapuratifomu. Batanidza iyo optical flat crystal zvakasimba kumusoro kuti iedzwe pachikuva uye tarisa mipendero yakakanganisika yakaumbwa pakati pawo pasi pekuvhenekerwa kwechiedza chemonochromatic (senge sodium rambi). Kana mitsetse yacho ichienderana mitsetse yakatwasuka, inoratidza kunaka kupfava. Kana mitsetse yakakomberedzwa ikaonekwa, verenga kukanganisa kweflatness zvichienderana nedhigirii remitsetse curvature. Imwe neimwe yakakomberedzwa mutsara inomiririra kureba mutsauko we0.316μm, uye iyo data yeflatness inogona kuwanikwa kuburikidza nekutendeuka kuri nyore. .
Four. Matatu-anoronga Measuring muchina Kuongorora nzira
Iwo matatu-anoronga ekuyera muchina anogona kuwana yakakwirira-chaiyo kuyerwa munzvimbo ine mativi matatu. Isa iyo granite chikuva patafura yekushanda yemuchina wekuyeresa uye shandisa probe kuunganidza zvakafanana data kubva kune akawanda kuyerwa nzvimbo pamusoro pepuratifomu. Iyo yekuyera muchina system inoita uye inoongorora iyi data kuti ibudise iyo flatness report yepuratifomu. Iyi nzira haigone kuona chete flatness, asiwo kuwana mamwe geometric parameters yepuratifomu panguva imwe chete, uye inokodzera kuongororwa kwakadzama kwemapuratifomu makuru egranite. .
Kuziva nzira idzi dzekuona dzinogona kukubatsira kunyatso ongorora kupfava kweiyo granite chaiyo chikuva uye nekupa vimbiso yakavimbika yekushanda kwakagadzikana kwemidziyo chaiyo.
Nguva yekutumira: May-29-2025