Muminda yekugadzira zvinhu nemazvo uye tsvakurudzo yesainzi, kusatsetseka kwemapuratifomu ekugadzira zvinhu nemazvo chiratidzo chikuru chekuona kuti michina yacho yakarurama. Izvi zvinotevera sumo yakadzama yenzira dzakawanda dzekuongorora zvinhu uye mashandisirwo adzo.
I. Nzira yekuona laser interferometer
Iyo laser interferometer ndiyo chishandiso chinodiwa pakuona kutsetseka kwakanyatsojeka. Semuenzaniso, tora ZYGO GPI XP laser interferometer, resolution yayo inogona kusvika 0.1nm. Paunenge uchiongorora, tanga wabatanidza chiedza cheinterferometer nepuratifomu wobva waparadzanisa nzvimbo yepuratifomu kuita nzvimbo dzegrid dze50mm×50mm. Mushure mezvo, data reinterference fringe rakaunganidzwa point by point, uye data racho rakaiswa uye rakaongororwa uchishandisa Zernike polynomial kuti uwane flatness error. Nzira iyi inoshanda kumapuratifomu akanyatsojeka uye inogona kuona flatness errors dze ≤0.5μm/m². Inowanzoshandiswa pakuona ma photolithography machines nemapuratifomu ehigh-end three-coordinate measuring machine.
Ii. Nzira yeElectronic Level Array
Kuona mafambiro emagetsi (electronic level array detection) kuri nyore kushandisa uye kunoshanda zvakanyanya. TESA A2 electronic level (ine resolution ye0.01μm/m) yakasarudzwa ndokurongwa mu9×9 array ichitevedza X/Y axis direction yepuratifomu. Nekuunganidza data rekutsvedza redanho rega rega uye wobva washandisa nzira ye least square yekuverenga, kukosha kwe flatness kunogona kuwanikwa nemazvo. Nzira iyi inogona kuona zvinobudirira mamiriro e concavity uye convexity yepuratifomu. Semuenzaniso, kuchinja kwe 0.2μm mukati me50mm range kunogonawo kuonekwa, izvo zvakakodzera kukurumidza kuonekwa mukugadzirwa kwehuwandu.
Iii. Nzira yeOptical Flat crystal
Nzira ye optical flat crystal yakakodzera kuona mapuratifomu madiki. Batanidza optical flat crystal zvakasimba pamusoro penzvimbo kuti iedzwe papuratifomu uye tarisa miganhu yekupindirana inoumbwa pakati payo pasi pekuvhenekerwa kwechiedza che monochromatic (senge rambi re sodium). Kana mitsetse yacho iri mitsetse yakatwasuka yakafanana, zvinoratidza kuti yakatsetseka zvakanaka. Kana mitsetse yakakombama ikaonekwa, verenga kukanganisa kwe flatness zvichibva padanho rekukombama kwe stripe. Mitsetse yega yega yakakombama inomiririra musiyano wekukwirira we 0.316μm, uye data re flatness rinogona kuwanikwa kuburikidza nekushandura kuri nyore.
Nzira yekuongorora yechina. Muchina wekuyera une zvikamu zvitatu
Muchina wekuyera une ma "three-coordinate" unogona kuyera zvinhu nemazvo munzvimbo ine ma "three-dimensional". Isa chikuva chegranite patafura yekushanda yemuchina wekuyera uye shandisa probe kuunganidza data kubva kunzvimbo dzakawanda dzekuyera pamusoro pechikuva. Sisitimu yemuchina wekuyera inoshandisa uye inoongorora data iri kuti igadzire mushumo we "flatness" wepuratifomu. Nzira iyi haingogone kuona chete "flatness", asiwo kuwana mamwe ma "geometric parameters" epuratifomu panguva imwe chete, uye yakakodzera kuona zvakakwana mapuratifomu makuru egranite.
Kugona nzira idzi dzekuongorora kunogona kukubatsira kunyatsoongorora kuti puratifomu ye granite yakanyatsojeka uye kupa vimbiso yakavimbika yekushanda kwakasimba kwemidziyo yakanyatsojeka.
Nguva yekutumira: Chivabvu-29-2025