Mundima yekugadzirwa kwepamusoro-soro uye yekucheka-kumucheto kwekutsvaga kwesainzi, iyo yekupedzisira-chaiyo motion module yemhepo inoyangarara yave yakakosha midziyo yekushanda kwakanaka uye kuyerwa nekuita kwayo kwakanakisa. Iyo granite precision base, senheyo yerutsigiro, ine zvakaomesesa zvinodiwa zvenzvimbo yekushanda, uye akakodzera mamiriro ezvakatipoteredza ndiwo hwaro hwekuvimbisa kushanda kwayo kwakadzikama uye yakanakisa mhedzisiro.
Kutanga, kudzora tembiricha: zvakarurama "stabilizer"
Kunyange zvazvo granite ichizivikanwa nekugadzikana kwayo, haina kudzivirirwa zvachose nekushanduka kwekushisa. Kunyangwe iyo coefficient yekuwedzera kwemafuta yakadzikira, kazhinji 5-7 × 10⁻⁶/℃, mune yekupedzisira-chaiyo yekufamba inodzora mamiriro, kudzikama tembiricha kuchinjika kunogona kuramba kuchikonzera shanduko yedimensional uye kukanganisa mamodule. Mumusangano wekugadzira semiconductor chip, iyo lithography inoda kurongeka kwe danami-level, uye ambient tembiricha inochinjika ne1 ° C, uye gasi regranite rine kureba kwemamita 1 rinogona kuburitsa mutsara wekuwedzera kana kuderera kwe5-7 microns. Shanduko diki iyi inofambiswa neiyo ultra-precision motion module yemhepo inoyangarara, inokwana kuita chip lithography pateni kutsauka uye kuderedza zvakanyanya goho. Naizvozvo, yakashongedzerwa negranite chaiyo chigadziko chemhepo inoyangarara yekupedzisira-chaiyo inofamba module, iyo yakakodzera yekushanda nharaunda tembiricha inofanirwa kudzorwa pa20 ° C ± 1 ° C, nerubatsiro rweyakanyanya-chaiyo inogaro tembiricha yemidziyo, senge tembiricha isingaperi uye humidity air conditioning system, kuenderera mberi kwekutarisa uye kugadziridzwa kweambient tembiricha, kuve nechokwadi kuti mune tembiricha idiki, kuchengetedza saizi diki, chengetedza saizi diki, chengetedza saizi diki. kushanda kwepamusoro-soro.
Chechipiri, humidity manejimendi: kiyi yekudzivirira-uchapupu kudzivirira "dombo"
Humidity chimwe chinhu chakakosha chinokanganisa kushanda kweiyo chaiyo granite base. Munzvimbo ine hunyoro hwepamusoro, granite iri nyore kutora mhute yemvura, iyo inogona kutungamirira kune condensation pamusoro pepamusoro, iyo isingangogadziri kugadzikana kwekubatanidza kwegranite uye ultra-precision motion module yemhepo inotenderera, asi inogona kukonzera kunyura kwepasi uye kuderedza kupenya uye kunyatsoita munguva refu. Mune optical lens grinding workshop, kana humidity yakakwirira kudarika 60% RH kwenguva yakareba, mhute yemvura yakashambadzirwa pamusoro pechigadziko chegranite ichavhiringidza kufamba kwegasi float slider, kuitira kuti lens yekukuya yakarurama ideredzwe, uye pamusoro payo pane kukanganisa. Naizvozvo, hunyoro hwenzvimbo yekushanda hunofanira kunyatsodzorwa pakati pe40% -60% RH, iyo inogona kutariswa uye kugadziridzwa munguva chaiyo nekuisa dehumidifiers, humidity sensors uye zvimwe midziyo kudzivirira kukuvadzwa kwegireti base nekuda kwekunyorova kwakanyanya, uye kuve nechokwadi chekushanda kwakanaka kweiyo Ultra-chaiyo motion module yemhepo inoyangarara.
Chechitatu, vimbiso yehutsanana: "muchengeti" wekururama
Kukuvadza kwezvikamu zveguruva kune chaiyo granite base ye-ultra-precision motion module yemhepo inoyerera haigone kurerutswa. Kamwe zvidimbu zvidiki zvapinda mugero refirimu regasi pakati pegasi rinoyangarara uye chigadziko chegranite, zvinogona kuparadza kufanana kwefirimu regesi, kuwedzera kukweshera, uye kunyange kukwenya pamusoro pechigadziko, zvichikonzera kuderedzwa kwekufamba. Mu-ultra-precision machining workshop yezvikamu zvemuchadenga, kana guruva remhepo richiwira pachigadziko chegranite, mafambiro echishandiso chemuchina anogona kutsauka, zvichikanganisa iko kurongeka kwezvikamu. Nokudaro, nzvimbo yebasa inofanira kuchengetwa yakachena kwazvo, inosvika 10,000 kana kunyange yakakwirira mazinga ehutsanana, kuburikidza nekuiswa kwemidziyo yekuchenesa mhepo, yakadai sepamusoro-soro mafirita emhepo (HEPA), kusefa guruva remhepo mumhepo, panguva imwe chete, vashandi vanofanira kupfeka zvipfeko zvisina guruva, zvivharo zveshangu, nezvimwewo, kuderedza guruva rinounzwa nevanhu. Chengetedza yakakwirira chaiyo inoshanda nharaunda yegranite base uye mhepo inoyangarara Ultra-chaiyo inofamba module.
Chechina, vibration kuparadzaniswa: kushanda zvakanaka kwe "shock pad"
Kudengenyeka kwekunze muvengi wekurongeka kweiyo ultra-precision motion module yemhepo inoyangarara. Kunyangwe iyo chaiyo granite base ine imwe vibration attenuation kugona, iyo yakakwirira-simba vibration inogona kuramba ichityora muganho wayo webuffer. Kudengenyeka kunokonzerwa nemotokari yakapoteredza fekitari uye kushanda kwemidziyo mikuru yemagetsi inoendeswa kune chigadziko chegranite kuburikidza nevhu, izvo zvichakanganisa kufamba kwechokwadi kwe-ultra-precision motion module yemhepo inotenderera. Mune yepamusoro-yekupedzisira CMM, vibration inogona kukonzera kusangana pakati pekuyera probe uye workpiece kuyerwa kuve isina kugadzikana, zvichikonzera kutsauka kweyero data. Kuti ugadzirise dambudziko iri, zvinodikanwa kutora matanho anobudirira ekuzviparadzanisa nevamwe, sekuisa mapedhi ekuvibration ega munzvimbo yekumisikidza michina, kuvaka vibration yekuzviparadzanisa nenheyo, kana kushandisa inoshanda vibration yekuzviparadzanisa nevamwe system kuti inyatso kumisa kuzunguzika kwekunze, uye kugadzira yakanyarara uye yakagadzikana nharaunda yekushanda yegranite chaiyo base uye iyo air float yekupedzisira-chaiyo motion module.
Chete nekuzadzisa zvizere zvinodiwa zvezvakatipoteredza zvekupisa, humidity, kuchena uye vibration control, iyo granite chaiyo base yeiyo Ultra-chaiyo motion module yemhepo inoyangarara inogona kupa kutamba kwakazara kune yayo mabhenefiti mabhenefiti, inopa yakavimbika vimbiso ye-ultra-chaizvo mashandiro munzvimbo dzakasiyana siyana, uye kubatsira indasitiri kuenda kune yakakwira chaiyo kugadzira uye nesainzi nhanho yekutsvagisa.
Nguva yekutumira: Kubvumbi-08-2025