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Mumunda wekugadzira semiconductor, semichina yepakati inosarudza kurongeka kweiyo chip kugadzira maitiro, kugadzikana kwemukati nharaunda yemuchina wefotolithography yakakosha. Kubva pakunakidzwa kweyakanyanya ultraviolet mwenje sosi kusvika pakushanda kwe nanoscale precision motion chikuva, hapagone kuve nekutsauka kudiki mune yese link. Mabhesi egranite, ane nhevedzano yezvivakwa zvakasiyana, anoratidza zvakanakira zvisingaenzaniswi mukuvimbisa kushanda kwakadzikama kwemashini ephotolithography uye kuwedzera photolithography kurongeka. .
Yakanakisa electromagnetic kudzivirira kuita
Iyo yemukati yemuchina wephotolithography yakazadzwa neyakaomesesa electromagnetic nharaunda. Electromagnetic interference (EMI) inogadzirwa nezvinhu zvakaita seyakanyanya ultraviolet mwenje masosi, mota dzekutyaira, uye akakwira-frequency magetsi emagetsi, kana akasanyatsodzorwa zvakanaka, anokanganisa zvakanyanya mashandiro eiyo chaiyo emagetsi zvikamu uye optical masisitimu mukati memidziyo. Semuyenzaniso, kupindira kunogona kukonzera kutsauka kudiki mumifananidzo yephotolithography. Mumagadzirirwo ekugadzira epamberi, izvi zvinokwana kutungamira kune zvisirizvo transistor kubatana pane chip, zvakanyanya kuderedza goho rechip. .
Granite isimbi isiri-simbi uye haifambisi magetsi pachayo. Iko hakuna electromagnetic induction phenomenon inokonzerwa nekufamba kwemaerekitironi emahara mukati sezviri musimbi. Hunhu uhwu hunoita kuti ive yechisikigo yemagetsi inodzivirira muviri, iyo inogona kunyatso kuvharira nzira yekufambisa yemukati memagetsi kukanganiswa. Kana iyo inotsinhanisa magineti inogadzirwa neyekunze yemagetsi kupindira sosi inopararira kune iyo granite base, sezvo granite isiri-magineti uye isingagone kupihwa magineti, iyo inochinjika magineti inonetsa kupinda, nekudaro ichidzivirira iyo yakakosha zvikamu zvemuchina wephotolithography wakaiswa pachigadziko, senge chaiyo sensors uye optical lens pesvedzero yemagetsi ekugadzirisa magineti. kuchinjisa maitiro panguva yephotolithography process. .
Yakanakisa vacuum kuenderana
Nekuti yakanyanyisa ultraviolet mwenje (EUV) inonyudzwa zviri nyore nezvinhu zvese, kusanganisira mhepo, EUV lithography michina inofanirwa kushanda munzvimbo yevacuum. Panguva ino, kuenderana kwemidziyo yemidziyo ine vacuum nharaunda inova yakakosha. Mune vacuum, zvinhu zvinogona kunyungudika, desorb uye kuburitsa gasi. Iyo gasi yakaburitswa haingotore mwenje weEUV chete, ichidzikisa kusimba uye kutapurirana kwechiedza, asi zvakare inogona kusvibisa lenzi dzemaziso. Semuyenzaniso, mhute yemvura inogona kuita oxidize malenzi, uye mahydrocarbon anogona kuisa kabhoni layer pamalenzi, zvichikanganisa zvakanyanya kunaka kwelithography. .
Granite ine yakagadzikana makemikari zvimiro uye haatombobudise gasi munzvimbo yevacuum. Zvinoenderana nekuyedzwa kwehunyanzvi, mune yakatemerwa photolithography muchina vacuum nharaunda (yakadai seyakanyanya-yakachena vacuum nharaunda umo yekuvhenekesa optical system uye imaging optical system mukamuri huru iri, inoda H₂O <10⁻⁵ Pa, CₓHᵧ <10⁻ yakaderera zvakanyanya, iyo yakanyanya kuderera Pazasi, iyo yakadzikira pazasi Pazasi). kupfuura yezvimwe zvinhu zvakaita sesimbi. Izvi zvinogonesa mukati memuchina wephotolithography kuchengetedza yakakwira vacuum dhigirii uye kuchena kwenguva yakareba, kuve nechokwadi chekufambisa kwakanyanya kweEUV mwenje panguva yekutapurirana uye yakanyanya-yakachena nharaunda yekushandiswa kwema lens optical, kuwedzera hupenyu hwesevhisi yeoptical system, uye kusimudzira kushanda kwese kwemuchina wephotolithography. .
Kuramba kwakasimba kwekudengenyeka uye kugadzikana kwekupisa
Munguva yephotolithography process, iko kurongeka padanho re nanometer inoda kuti muchina wephotolithography haufanirwe kunge uine kuzunguzika kudiki kana deformation yekupisa. Kuzununguka kwezvakatipoteredza kunokonzerwa nekushanda kweimwe midziyo uye kufamba kwevashandi mumusangano, pamwe chete nekupisa kunobudiswa nephotolithography machine pachayo panguva yekushanda, zvose zvinogona kupindira nekururama kwe photolithography. Granite ine density yakakwira uye yakaomarara magadzirirwo, uye ine yakanakisa vibration kuramba. Yayo yemukati yemaminerari ekristaro chimiro compact, iyo inogona kunyatso kudzikamisa simba rekudengenyeka uye nekukasira kudzvanya vibration kupararira. Data rekuyedza rinoratidza kuti pasi peiyo sosi yevibration, iyo granite base inogona kuderedza vibration amplitude neinopfuura 90% mukati memasekondi 0.5. Kuenzaniswa nesimbi base, inogona kudzoreredza midziyo kuti igadzikane nekukurumidza, kuve nechokwadi chakanyatsoenderana chinzvimbo pakati pefotolithography lens newafer, uye kudzivirira pateni kudzima kana kusarongeka kunokonzerwa nekudengenyeka. .
Zvichakadaro, coefficient of thermal kuwedzera kwegranite yakaderera zvakanyanya, inenge (4-8) × 10⁻⁶/℃, iyo yakaderera zvikuru kupfuura yezvigadzirwa zvesimbi. Munguva yekushanda kwemuchina wephotolithography, kunyangwe tembiricha yemukati ichichinja nekuda kwezvinhu zvakaita sekugadzira kupisa kubva kune mwenje sosi uye kukweshera kubva kune mechaniki zvikamu, iyo granite base inogona kuchengetedza dimensional kugadzikana uye haizoitike yakakosha deformation nekuda kwekuwedzera kwekupisa uye kuputika. Inopa tsigiro yakagadzikana uye yakavimbika kune optical system uye yakanyatso kufambisa chikuva, kuchengetedza kuwirirana kweiyo photolithography kurongeka.
Nguva yekutumira: May-20-2025