Mundima yekugadzira semiconductor, semudziyo mukuru unosarudza kunyatsojeka kwemaitiro ekugadzira chip, kugadzikana kwenzvimbo yemukati memuchina wephotolithography kwakakosha zvikuru. Kubva pakufadza kwechiedza cheultraviolet chakanyanya kusvika pakushanda kwepuratifomu yekufamba kwenanoscale, hapana kutsauka kudiki pane zvese zvinongedzo. Magadziko egranite, ane hunhu hwakasiyana, anoratidza zvakanakira zvisingaenzaniswi mukuona kushanda kwakasimba kwemuchina wephotolithography uye kuwedzera kunyatsojeka kwephotolithography.
Kushanda kwakanaka kwekudzivirira magineti
Mukati memuchina we photolithography mune nzvimbo yakaoma ye electromagnetic. Electromagnetic interference (EMI) inogadzirwa nezvinhu zvakaita se ultraviolet light sources, drive motors, uye high-frequency power supplies, kana zvikasadzorwa zvakanaka, zvichakanganisa zvakanyanya mashandiro e electronic components nema optical systems mukati memuchina. Semuenzaniso, interference inogona kukonzera kutsauka kudiki muma photolithography patterns. Mumaitiro ekugadzira epamberi, izvi zvakakwana kutungamira kune transistor connections dzisina kunaka pa chip, zvichideredza zvakanyanya goho re chip.
Granite chinhu chisiri chesimbi uye hachifambise magetsi chega. Hapana chinhu chinokonzerwa nemagetsi chinokonzerwa nekufamba kwemaerekitironi akasununguka mukati sezviri muzvinhu zvesimbi. Hunhu uhwu hunoiita kuti ive chinhu chechisikigo chinodzivirira magetsi, chinogona kudzivirira nzira yekutumira yemukati memagetsi. Kana simba remagineti rinoshanduka rinogadzirwa nemagetsi ekunze richienda kuchigadziko chegranite, sezvo granite isiri yemagnetic uye isingakwanise kugadzikiswa, simba remagineti rinoshanduka rinonetsa kupinda, nokudaro richidzivirira zvikamu zvepakati zvemuchina wephotolithography wakaiswa pachigadziko, zvakaita semasensa ekunyatsoongorora uye zvishandiso zvekugadzirisa lenzi dzemaziso, kubva pakukanganiswa nemagetsi uye kuona kuti kutamiswa kwemapatani kwakarurama panguva yekutora mifananidzo.
Kuenderana kwakanaka kwevacuum
Nekuti chiedza cheultraviolet chakanyanya (EUV) chinonyungudika nyore nyore nezvinhu zvese, kusanganisira mhepo, michina yeEUV lithography inofanira kushanda munzvimbo isina vacuum. Panguva ino, kuenderana kwezvikamu zvemidziyo nenzvimbo isina vacuum kunonyanya kukosha. Munzvimbo isina vacuum, zvinhu zvinogona kunyunguduka, kubvisa sorbent uye kuburitsa gasi. Gasi rinoburitswa haringonyungudi chiedza cheEUV chete, richideredza simba uye kushanda zvakanaka kwechiedza, asiwo rinogona kusvibisa magirazi emaziso. Semuenzaniso, utsi hwemvura hunogona kuoxidize magirazi, uye mahydrocarbon anogona kuisa carbon layers pamagirazi, zvichikanganisa zvakanyanya kunaka kwe lithography.
Granite ine makemikari akasimba uye haigone kuburitsa gasi munzvimbo isina chinhu. Sekureva kwekuyedza kwehunyanzvi, munzvimbo inoyedzwa yemuchina we photolithography (yakadai senzvimbo isina chinhu yakachena zvakanyanya umo sisitimu yechiedza uye sisitimu yemifananidzo mukamuri huru, inoda H₂O < 10⁻⁵ Pa, CₓHᵧ < 10⁻⁷ Pa), mwero wekubuda kwegasi regranite wakaderera zvikuru, wakaderera zvikuru pane wezvimwe zvinhu zvakaita sesimbi. Izvi zvinogonesa mukati memuchina we photolithography kuchengetedza mwero we vacuum wakakwira uye kuchena kwenguva yakareba, zvichivimbisa kutapurirana kwakanyanya kwechiedza cheEUV panguva yekutapurirana uye nzvimbo yekushandiswa yakachena kwazvo yema lenses e optical, zvichiwedzera hupenyu hwebasa remuchina we optical, uye zvichiwedzera kushanda kwese kwemuchina we photolithography.
Kuramba kwakasimba kwekudzungudza uye kugadzikana kwekupisa
Munguva ye photolithography, kunyatsojeka padanho re nanometer kunoda kuti muchina we photolithography usave ne vibration kana thermal deformation. Kudengenyeka kwezvakatipoteredza kunokonzerwa nekushanda kwezvimwe zvishandiso nekufamba kwevashandi muworkshop, pamwe nekupisa kunoburitswa nemuchina we photolithography pachawo panguva yekushanda, zvese zvinogona kukanganisa kurongeka kwe photolithography. Granite ine density yakakura uye texture yakaoma, uye ine vibration resistance yakanaka. Maumbirwo ayo emukati me mineral crystal akamanikana, anogona kuderedza simba re vibration uye nekukurumidza kudzvinyirira vibration propagation. Data rekuyedza rinoratidza kuti pasi pe vibration source imwe chete, granite base inogona kuderedza vibration amplitude neinopfuura 90% mukati memasekonzi 0.5. Kana ichienzaniswa nesimbi base, inogona kudzorera michina kugadzikana nekukurumidza, ichivimbisa nzvimbo chaiyo pakati pe photolithography lens newafer, uye kudzivirira kusviba kwema pattern kana kusarongeka kunokonzerwa ne vibration.
Panguva iyi, chiyero chekuwedzera kwemafuta egranite chakaderera zvikuru, chingangoita (4-8) ×10⁻⁶/℃, icho chiri pasi zvakanyanya pane chesimbi. Munguva yekushanda kwemuchina wephotolithography, kunyangwe tembiricha yemukati ichichinja-chinja nekuda kwezvinhu zvakaita sekupiswa kwechiedza uye kukweshana kubva kuzvinhu zvemakanika, chigadziko chegranite chinogona kuchengetedza kugadzikana kwemativi uye hachizokanganiswi zvakanyanya nekuda kwekuwedzera kwemafuta uye kukweshana. Chinopa rutsigiro rwakasimba uye rwakavimbika kune optical system uye puratifomu yekufamba kwechokwadi, ichichengetedza kuenderana kwekururama kwephotolithography.
Nguva yekutumira: Chivabvu-20-2025