Mukugadzira semiconductor, muchina wephotolithography chinhu chakakosha chinotaridza iko kurongeka kwemachipisi, uye gasi regranite, rine maitiro akawanda, rave chinhu chakakosha chemuchina wephotolithography.
Thermal kugadzikana: Iyo "Shield" inopesana neTemperature Shanduko
Kana muchina wephotolithography uri kushanda, unoburitsa huwandu hukuru hwekupisa. Kunyangwe kushanduka kwekushisa kwe 0.1 ℃ chete kunogona kukonzera deformation yemidziyo yemidziyo uye kukanganisa kurongeka kwefotolithography. Iyo coefficient yekuwedzera kwekupisa kwegranite yakaderera zvakanyanya, chete 4-8 × 10⁻⁶/℃, iyo inenge 1/3 yeiyo yesimbi uye 1/5 yeiyo yealuminium alloy. Izvi zvinoita kuti chigadziko chegranite chichengetedze kugadzikana kana muchina wephotolithography ukashanda kwenguva yakareba kana tembiricha yezvakatipoteredza painochinja, kuve nechokwadi chekumisikidzwa kwezvikamu zvemaziso uye zvimiro zvemuchina.
Super anti-vibration performance: Iyo "sponge" inobata vibration
Mufekitori semiconductor, kushanda kwemidziyo yakatenderedza uye kufamba kwevanhu kunogona kuburitsa mavibrations. Granite ine density yakakura uye yakaomarara magadzirirwo, uye ine yakanakisa yekunyorovesa zvivakwa, ine daping reshiyo 2 kusvika 5 zvakapetwa pane zvesimbi. Kana kudengenyeka kwekunze kuchiendeswa kune chigadziko chegranite, kupesana pakati pemaminerari emaminerari emukati anoshandura simba rekudengenyeka kuva simba rekupisa kuti riparare, izvo zvinogona kuderedza zvakanyanya kuzununguka munguva pfupi, zvichiita kuti photolithography machine kukurumidza kudzorera kugadzikana uye kudzivisa kusvibiswa kana kusaruramisa kwemufananidzo we photolithography nekuda kwekudengenyeka.
Kugadzikana Kwemakemikari: Iyo "Guardian" Yenzvimbo Yakachena
Iyo yemukati yemuchina wephotolithography inosangana neakasiyana makemikari media, uye zvakajairwa simbi zvinhu zvinokonzeresa kana kuburitswa kwezvimedu. Granite inoumbwa nemaminerari akadai sequartz uye feldspar. Iine chimiro chemakemikari yakagadzikana uye yakasimba corrosion resistance. Mushure mekunyudzwa muasidhi uye alkali mhinduro, iyo corrosion yepamusoro idiki zvakanyanya. Zvichakadaro, chimiro chayo chakaomarara chinoburitsa anenge asina marara kana guruva, achisangana nezvinodiwa zveyepamusoro-soro yekuchenesa zviyero uye kuderedza njodzi yekusvibiswa kwewafer.
Kugadzirisa kuchinjika: Iyo "yakanaka zvinhu" yekugadzira chaiyo mabhenji
Izvo zvakakosha zvemuchina wephotolithography zvinoda kuiswa pane yakakwirira-chaiyo referensi repamusoro. Chimiro chemukati chegranite chakafanana uye chiri nyore kuti chigadzirwe kusvika pakakwirira zvakanyanya kuburikidza nekukuya, kupukuta uye mamwe maitiro. Iyo flatness yayo inogona kusvika ≤0.5μm/m, uye roughness Ra iri ≤0.05μm, ichipa chaiyo yekuisa hwaro hwezvikamu zvakaita sema lens optical.
Hupenyu hurefu uye husina kugadzirisa: Iwo "akapinza maturusi" ekudzikisa mutengo
Kuenzaniswa nezvinhu zvesimbi zvinowanzoita kuneta uye kuputika pamusoro pekushandiswa kwenguva refu, giraniti haigoni kuita deformation yepurasitiki kana kuputsika pasi pemitoro yakajairwa, uye haidi kurapwa kwepamusoro, nokudaro kudzivirira njodzi yekuputira kusvuura uye kusvibiswa. Mumashandisirwo anoshanda, mushure mekushandiswa kwemakore mazhinji, zviratidziro zvakakosha zvechigadziko chegranite zvinogona kuramba zvakagadzikana, kuderedza kushanda uye kugadzirisa mari yemidziyo.
Kubva pakugadzikana kwekupisa, kudengenyeka kunopesana nemakemikari inertness, maitiro akawanda echigadziko chegranite anonyatsosangana nezvinodiwa zvemuchina we photolithography. Sezvo maitiro ekugadzira chip achiramba achikura akananga kumusoro chaiko, mabhesi egranite acharamba achiita basa risingadzokerike mumunda wekugadzira semiconductor.
Nguva yekutumira: May-20-2025