Mukugadzira zvinhu zvakaita semiconductor, muchina we photolithography chinhu chakakosha chinosarudza kunyatsoita machipisi, uye hwaro hwegranite, hune hunhu hwahwo hwakawanda, hwave chinhu chakakosha pamuchina we photolithography.
Kugadzikana kwekupisa: "Chidziviriro" chekudzivirira kuchinja kwekupisa
Kana muchina we photolithography uchishanda, unogadzira kupisa kwakawanda. Kunyangwe kuchinja kwekushisa kwe 0.1℃ chete kunogona kukonzera kuchinja kwezvikamu zvemuchina uye kukanganisa kunyatsoita photolithography. Kuwanda kwekuwedzera kwe thermal granite kwakaderera zvikuru, 4-8 × 10⁻⁶/℃ chete, inova inenge 1/3 yesimbi uye 1/5 yealuminium alloy. Izvi zvinogonesa granite base kuchengetedza kugadzikana kwehukuru kana muchina we photolithography uchishanda kwenguva yakareba kana kana tembiricha yezvakatipoteredza ichichinja, zvichiita kuti zvikamu zve optical uye zvivakwa zve mechanical zvive panzvimbo chaiyo.
Kushanda kwakanyanya kwekudzivirira kudedera: "Chipanji" chinotora kudedera
Mufekitori ye semiconductor, mashandiro emidziyo yakakomberedza uye kufamba kwevanhu zvese zvinogona kugadzira kudedera. Granite ine density yakakura uye yakasimba, uye ine hunhu hwakanaka hwekudambisa, ine damping ratio yakapetwa kaviri kusvika kashanu pane yesimbi. Kana kudedera kwekunze kukaendeswa kugranite base, kukweshana pakati pemakristaro emumaminerari emukati kunoshandura simba rekudedera kuita simba rekupisa kuti riparare, izvo zvinogona kuderedza kudedera zvakanyanya munguva pfupi, zvichibvumira muchina wephotolithography kukurumidza kudzoreredza kugadzikana uye kudzivirira kusviba kana kusarongeka kwemufananidzo wephotolithography nekuda kwekudedera.
Kugadzikana kwemakemikari: "Muchengeti" weNzvimbo Yakachena
Mukati memuchina we photolithography munosangana nemakemikari akasiyana-siyana, uye zvinhu zvesimbi zvakajairika zvinogona kuita ngura kana kuburitsa zvidimbu. Granite inoumbwa nezvicherwa zvakaita se quartz ne feldspar. Ine hunhu hwakasimba hwemakemikari uye inodzivirira ngura zvakanyanya. Mushure mekunyikwa mu acid ne alkali solutions, ngura pamusoro pevhu inenge diki zvikuru. Panguva iyi, chimiro chayo chakakora hachibudisi marara kana guruva, zvichizadzisa zvinodiwa nemazinga epamusoro ekuchenesa uye zvichideredza njodzi yekusvibiswa kwe wafer.
Kugona kugadziriswa kwekugadzirisa: "Chinhu chakanakira" chekugadzira zviyero zvakanyatsonaka
Zvikamu zvepakati zvemuchina we photolithography zvinoda kuiswa panzvimbo ine referensi yakanyatsojeka. Maumbirwo emukati megranite akafanana uye zviri nyore kugadziriswa nemazvo zvakanyanya kuburikidza nekukuya, kupukuta nedzimwe nzira. Kureba kwayo kunogona kusvika ≤0.5μm/m, uye kuomarara kwepamusoro Ra i ≤0.05μm, zvichipa hwaro hwakakodzera hwekuisa zvinhu zvakaita sema optical lenses.
Hupenyu hurefu uye husina kugadziriswa: "Zvishandiso zvakapinza" zvekuderedza mutengo
Kana tichienzanisa nezvinhu zvesimbi zvinogara zvichineta uye zvichitsemuka kana zvikashandiswa kwenguva refu, granite haimbokanganisike kana kutsemuka nepurasitiki kana yakaremerwa, uye haidi kugadziriswa pamusoro, nokudaro ichidzivirira njodzi yekukweshwa nekusvibiswa. Mukushandiswa kwayo, mushure mekushandiswa kwemakore mazhinji, zviratidzo zvikuru zvekushanda kwechigadziko chegranite zvinogona kuramba zvakagadzikana, zvichideredza mari yekushandisa nekugadzirisa michina.
Kubva pakugadzikana kwekupisa, kuramba kutenderera kwemakemikari, hunhu hwakawanda hwechigadziko chegranite hunonyatsoenderana nezvinodiwa nemuchina wephotolithography. Sezvo maitiro ekugadzira machipisi achienderera mberi nekukura kusvika pakunyatsojeka, machigadziko egranite acharamba achiita basa risingatsiviwi mumunda wekugadzira masemiconductor.
Nguva yekutumira: Chivabvu-20-2025