Zvikamu zvegranite zvinoshandiswa zvakanyanya mukugadzira nemazvo, kusatsetseka sechiratidzo chakakosha, zvinokanganisa zvakananga mashandiro azvo uye kunaka kwechigadzirwa. Zvinotevera inyaya yakadzama yenzira, michina uye maitiro ekuona kusatsetseka kwezvikamu zvegranite.
I. Nzira dzekuongorora
1. Nzira yekupindirana kwegirazi rakatsetseka: yakakodzera kuona kutsetseka kwezvikamu zvegranite zvakanyatsonaka, zvakaita sechigadziko chemidziyo yemaziso, chikuva chekuyera chakanyatsojeka, nezvimwewo. Kristaro yakatsetseka (chinhu chegirazi chegirazi chine kutsetseka kwakanyanya) yakabatana zvakanyanya nechikamu chegranite kuti chiongororwe mundege, uchishandisa musimboti wekupindirana kwemafungu echiedza, apo chiedza chinopfuura nepakati pekristaro yakatsetseka nepamusoro pechikamu chegranite kuti chigadzire mitsetse yekupindirana. Kana denderedzwa renhengo rakatsetseka zvakakwana, mipendero yekupindirana imitsara yakatwasuka yakafanana ine nzvimbo yakaenzana; Kana denderedzwa rayo rakatetepa uye rakakombama, denderedzwa richakotama uye richashanduka. Zvichienderana nedanho rekukotama uye nzvimbo yemipendero, kukanganisa kwekutsetseka kunoverengerwa nefomura. Kururama kunogona kusvika kuma nanometers, uye kutsauka kwendege diki kunogona kuonekwa nemazvo.
2. Nzira yekuyera mazinga emagetsi: inowanzoshandiswa muzvikamu zvikuru zvegranite, zvakaita semubhedha wemidziyo yemuchina, puratifomu huru yekugadzirisa gantry, nezvimwewo. Chikamu chemagetsi chinoiswa pamusoro pechikamu chegranite kuti chisarudze nzvimbo yekuyera uye kufamba nenzira chaiyo yekuyera. Chikamu chemagetsi chinoyera shanduko yeAngle pakati payo negwara regiravhiti munguva chaiyo kuburikidza ne sensor yemukati uye chinoishandura kuita data rekutsauka kwemazinga. Pakuyera, zvinodikanwa kugadzira grid yekuyera, kusarudza nzvimbo dzekuyera padaro rakati mumirayiridzo yeX neY, uye kunyora data repoindi yega yega. Kuburikidza nekuongorora software yekugadzirisa data, kutsamira kwepamusoro kwezvikamu zvegranite kunogona kuiswa, uye kururama kwekuyera kunogona kusvika padanho re micron, izvo zvinogona kusangana nezvinodiwa zvekuona kutsamira kwezvikamu zvakakura munzvimbo zhinji dzemaindasitiri.
3. Nzira yekuona CMM: Kuona kwakazara kwekutsetseka kunogona kuitwa pazvinhu zvakaoma zvegranite, zvakaita segranite substrate yemamolds ane chimiro chakasarudzika. CMM inofamba munzvimbo ine mativi matatu kuburikidza neprobe uye inobata pamusoro pechikamu chegranite kuti iwane macoordinates enzvimbo dzekuyera. Nzvimbo dzekuyera dzinogoverwa zvakaenzana pachikamu, uye lattice yekuyera inogadzirwa. Mudziyo unounganidza otomatiki data recoordinates renzvimbo yega yega. Kushandiswa kwesoftware yekuyera yehunyanzvi, zvichienderana nedata recoordinates kuverenga kukanganisa kwekutsetseka, hakungogone kuona kutsetseka chete, asiwo kunogona kuwana saizi yechikamu, chimiro uye kushivirira kwenzvimbo uye rumwe ruzivo rwemadimensional akawanda, kururamisa kwekuyera zvichienderana nekururama kwemidziyo kwakasiyana, kazhinji pakati pema microns mashoma kusvika kumakumi ema microns, kuchinjika kwakanyanya, kwakakodzera mhando dzakasiyana dzekuona zvikamu zvegranite.
II. Kugadzirira michina yekuyedza
1. Kristaro yakatsetseka ine kunyatsojeka: Sarudza kristaro yakatsetseka ine kunyatsojeka inoenderana nezvinodiwa zvekuongorora zvakarurama zvezvikamu zvegranite, zvakaita sekuona kuti nanoscale flatness inoda kuti usarudze kristaro yakatsetseka ine kukanganisa kwakatsetseka mukati menanometers mashoma, uye dhayamita yekristaro yakatsetseka inofanira kunge yakakura zvishoma kupfuura saizi shoma yechikamu chegranite chinofanira kuongororwa, kuve nechokwadi chekuti nzvimbo yekuona yakazara.
2. Danho remagetsi: Sarudza danho remagetsi rine kuyera kwakarurama kunoenderana nezvinodiwa zvekuongorora, senge danho remagetsi rine kuyera kwakarurama kwe0.001mm/m, iro rakakodzera kuongororwa kwakanyatsojeka. Panguva imwe chete, hwaro hwetafura yemagineti hwakagadzirirwa kuti hubatsire danho remagetsi kunyura zvakasimba pamusoro pechikamu chegranite, pamwe netambo dzekuwana data uye software yekutora data remakombiyuta, kuti uwane kurekodha uye kugadzirisa data rekuyera panguva chaiyo.
3. Chishandiso chekuyera chinoenderana: Zvichienderana nehukuru hwezvikamu zvegranite, kuoma kwechimiro kusarudza saizi yakakodzera yechishandiso chekuyera chinoenderana. Zvikamu zvikuru zvinoda magauge makuru ekuyera, nepo maumbirwo akaomarara achida michina ine maprobe akanyatsojeka uye software yekuyera ine simba. CMM isati yaonekwa, inoongororwa kuti ive nechokwadi chekuti probe yacho yakarurama uye kuti inonyatsoenderana nenzvimbo.
III. Maitiro ekuyedza
1. Maitiro ekuenzanisa pakati pemakristaro akaenzana:
◦ Chenesa pamusoro pezvinhu zvegranite zvinofanirwa kuongororwa uye pamusoro pekristaro yakati sandara, pukuta neanhydrous ethanol kubvisa guruva, mafuta nezvimwe tsvina, kuitira kuti zviviri izvi zvikwane zvakanaka pasina mukaha.
Isa kristaro yakati sandara zvishoma nezvishoma pamusoro pechikamu chegranite, wodzvanya zvishoma kuti zviviri izvi zvibatane zvizere kudzivirira mabubbles kana kurereka.
◦ Munzvimbo ine rima, chiedza che monochromatic (senge rambi re sodium) chinoshandiswa kuvhenekera kristaro yakati sandara yakatwasuka, kuona miganhu iri pamusoro, uye kunyora chimiro, divi uye mwero wekukombama kwemiganhu.
◦ Zvichibva padata re interference fringe, verengai error ye flatness muchishandisa fomura yakakodzera, uye enzanisai nezvinodiwa zve flatness tolerance zvechikamu kuti muone kana zvichikodzera.
2. Maitiro ekuyera nhanho yemagetsi:
◦ Gridhi yekuyera inodhirowa pamusoro pechikamu chegranite kuti ione nzvimbo yekuyera, uye nzvimbo yekuyera iri pedyo inoiswa zvine mwero zvichienderana nehukuru nekururama kwezvinodiwa nechikamu chacho, kazhinji 50-200mm.
◦ Isa electron level pachigadziko chetafura yemagineti woibatanidza panzvimbo yekutanga yegridi yekuyera. Tanga electron level wonyora electron level yekutanga mushure mekunge data ragadzikana.
◦ Fambisa nhanho yemagetsi nepfungwa munzira yekuyera uye nyora data rehupamhi panzvimbo imwe neimwe yekuyera kusvika nzvimbo dzese dzekuyera dzayerwa.
◦ Isa data rakayerwa musoftware yekugadzirisa data, shandisa nzira ye least square uye mamwe maalgorithms kuti akwane flatness, gadzira mushumo wekukanganisa flatness, uye ongorora kana flatness yechikamu ichi iri padanho repamusoro.
3. Maitiro ekuona CMM:
◦ Isa chikamu chegranite patafura yebasa reCMM uye shandisa chinhu chacho kuti chigadzike zvakasimba kuti uve nechokwadi chekuti chikamu chacho hachibvi panzvimbo yacho panguva yekuyera.
◦ Zvichienderana nechimiro nehukuru hwechikamu, nzira yekuyera yakarongwa musoftware yekuyera kuti ione kupararira kwenzvimbo dzekuyera, ichivimbisa kufukidzwa kwakazara kwendege inofanira kuongororwa uye kupararira kwakafanana kwenzvimbo dzekuyera.
◦ Tanga CMM, fambisa probe zvichienderana nenzira yakarongwa, bata nzvimbo dzekuyera pamusoro pechikamu chegranite, uye unganidza otomatiki data rema "coordinate" repoindi yega yega.
◦ Mushure mekunge kuyerwa kwapera, software yekuyera inoongorora uye inogadzirisa data rakaunganidzwa, inoverenga kukanganisa kwekutsetseka, inogadzira mushumo wekuyedza, uye inoona kana kutsetseka kwechikamu ichi kuchizadzisa chiyero.
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Nguva yekutumira: Kurume-28-2025