Mumusangano wekugadzira semiconductor, zvinodikanwa zvekugadzirwa kwechiputi zvemamiriro ekunze uye kurongeka kwemidziyo zvakanyanyisa, uye chero kutsauka kudiki kunogona kukonzera kuderera kukuru kwegoho rechip. Iyo XYZT chaiyo gantry yekufamba chikuva inotsamira pazvikamu zvegranite kuti zvibatane nezvimwe zvikamu zvepuratifomu kuvaka hwaro hwakasimba hwekuwana nanoscale kunyatsoita.
Yakanakisa vibration inovharira zvivakwa
Mumusangano wekugadzira semiconductor, kushanda kwemidziyo yekutenderera uye vashandi vanofamba-famba vanogona kukonzera kudedera. Chimiro chemukati chezvikamu zvegranite chakakora uye yunifomu, ine zvakasikwa yakakwirira yekunyorovesa maitiro, senge inobudirira vibration "barriers". Kana kudengenyeka kwekunze kuchiendeswa kupuratifomu yeXYZT, chikamu chegranite chinogona kudzikamisa zvinodarika 80% yesimba rekuzunguza uye kuderedza kupindira kwekuzunguzika papuratifomu mafambiro echokwadi. Panguva imwecheteyo, chikuva chakashongedzerwa nepamusoro-chaiyo air float guide system, iyo inoshanda pamwe chete nezvikamu zvegranite. Iyo air float guide inoshandisa yakagadzikana gasi firimu rakagadzirwa nehigh pressure gasi kuona kufamba kusingabatike kumiswa kwezvikamu zvinofamba zvepuratifomu uye kuderedza kuzunguzika kudiki kunokonzerwa nekukwesha kwemagetsi. Pamwe chete, vaviri ava vanova nechokwadi chekuti kurongeka kwepuratifomu kunogara kwakachengetedzwa padanho re nanometer mumiitiro yakakosha senge chip lithography uye etching, uye kudzivirira kutsauka kwechip circuit mapatani kunokonzerwa nekuzunguzika.
Excellent thermal kugadzikana
Kuchinja kwekushisa uye hunyoro mumusangano kune simba guru pakurongeka kwechigadzirwa chekugadzira chip. Iyo yekupisa yekuwedzera coefficient yegranite yakadzikira, kazhinji mu5-7 × 10⁻⁶/℃, saizi inenge isina kuchinjika kana tembiricha yachinja. Kunyangwe kana kusiyana kwetembiricha pakati pemasikati nehusiku mumusangano kana kupisa kwekugadzirwa kwemidziyo kuchikonzera kuti tembiricha ye ambient ichinje, zvikamu zvegranite zvinogona kuramba zvakatsiga kudzivirira deformation yepuratifomu nekuda kwekuwedzera kwekupisa uye kuderera. Panguva imwecheteyo, iyo yakangwara tembiricha yekudzora sisitimu yakashongedzerwa nepuratifomu inotarisisa ambient tembiricha munguva chaiyo, inogadzirisa otomatiki mhepo yekupisa uye kupisa midziyo yekupisa, uye inochengetedza tembiricha yewekishopu pa20 ° C ± 1 ° C. Inosanganiswa neyakanakira yegranite kupisa kugadzikana, chengetedza kuti chikuva mukushanda kwenguva refu, kufamba kwechipimo chega chega kunosangana nechiyero chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega chega. chip lithography pateni saizi ndeyechokwadi, etching kudzika kwakafanana.
Ita zvinodiwa nemhoteredzo yakachena
Iyo semiconductor yekugadzira shopu inoda kuchengetedza yakakwira mwero wehutsanana kudzivirira guruva zvidimbu kubva pakusvibisa chip. Granite zvinhu pachazvo hazviburitse guruva, uye pamusoro pacho pakatsetseka, hazvisi nyore kutora guruva. Iyo puratifomu yese inotora yakavharwa yakazara kana semi-yakavharwa chimiro dhizaini kuderedza kupinda kweguruva rekunze. Iyo yemukati yemhepo inotenderera system inosanganiswa neakachena air conditioning system yeworkshop kuti ave nechokwadi chekuti mukati mehutsanana hunosvika padanho rinodiwa nekugadzira chip. Munharaunda iyi yakachena, zvikamu zvegranite hazvizokanganisa kushanda nekuda kwekukukurwa kweguruva, uye zvikamu zvakakosha zvakadai sepamusoro-chaiyo sensors uye injini dzepuratifomu zvinogonawo kushanda zvakasimba, zvichipa kuenderera uye kwakavimbika nanoscale accuracy garandi yekugadzira chip, uye kubatsira semiconductor industry kuti iende kune imwe nzvimbo yepamusoro.
Nguva yekutumira: Kubvumbi-14-2025