Granite chikuva chakatsaurirwa kumakamuri akachena: Zero simbi ion kuburitswa, yakanakira sarudzo yewafer yekuongorora michina.

Mumunda we semiconductor wafer yekuongorora, kuchena kwenzvimbo yekuchenesa kwakanangana negoho rechigadzirwa. Sezvo kurongeka kwemaitiro ekugadzira chip kuri kuramba kuchivandudza, zvinodiwa zvekutakura mapuratifomu emidziyo yekuona zviri kuwedzera kuomarara. Mapuratifomu eGranite, ane hunhu hwawo hwe zero simbi ion kuburitswa uye yakaderera particle kusvibiswa, yakapfuura echinyakare simbi isina tsvina uye inove mhinduro yakasarudzika yewafer yekuongorora michina.

Granite ibwe rechisikigo rinopisa rinonyanya kuumbwa neasiri-metallic zvicherwa senge quartz, feldspar uye mica. Ichi chimiro chinopa iyo mukana we zero simbi ion kuburitswa. Kusiyana neizvi, simbi isina tsvina, sealloy yesimbi yakaita sesimbi, chromium uye nickel, inotadza kuita ngura ye electrochemical pamusoro payo nekuda kwekukukurwa kwemhute yemvura nemagasi ane acidic kana alkaline munzvimbo yakachena, zvichikonzera kunaya kwemaoni esimbi seFe²⁺ neCr³⁺. Kamwe aya maion madiki akabatana pamusoro peiyo wafer, anozoshandura magetsi eiyo semiconductor zvinhu mune inotevera maitiro senge photolithography uye etching, kukonzera chikumbaridzo voltage kudonha kwe transistor, uye kutotungamira kune mapfupi maseketi mudunhu. Professional institution test data inoratidza kuti mushure mepuratifomu yegranite yakaramba ichiratidzwa kune yakateedzerwa yakachena kamuri tembiricha uye hunyoro nharaunda (23±0.5 ℃, 45% ± 5% RH) kwemaawa zana, kuburitswa kwesimbi maion kwaive kwakadzikira pane yekuona muganho (<0.1ppb). Hurema hwemawafers hunokonzerwa nekusvibiswa kwesimbi ion kana uchishandisa mapuratifomu esimbi isina tsvina inogona kusvika pa15% kusvika 20%.

Panyaya yekudzora kusvibiswa kwechikamu, mapuratifomu egranite anoitawo zvakanaka. Dzimba dzekuchenesa dzine zvakanyanyisa zvinodikanwa zvekusangana kwezvimedu zvakamiswa mumhepo. Semuenzaniso, mu ISO Class 1 cleanrooms, nhamba ye 0.1μm particles inobvumirwa pa cubic mita haipfuure 10. Kunyange kana simbi isina tsvina yakagadziriswa yakagadziriswa, inogona kuramba ichibudisa tsvina yesimbi kana oxide scale inoputika nekuda kwemasimba ekunze akadai sekudengenyeka kwemidziyo uye kushanda kwevashandi, izvo zvinogona kuvhiringidza nzira yekuona optical nzira kana nzvimbo. Mapuratifomu eGranite, ane dense mineral structure (density ≥2.7g/cm³) uye kuoma kwakanyanya (6-7 pachiyero cheMohs), haawanzopfeka kana kuputsika panguva yekushandiswa kwenguva refu. Zviyero zvakayerwa zvinoratidza kuti zvinogona kuderedza kuwanda kwezvimedu zvakamiswa mumhepo yenzvimbo yekuona michina inopfuura 40% zvichienzaniswa nemapuratifomu esimbi isina tsvina, vachinyatso kuchengetedza zviyero zvegiredhi rekuchenesa.

Pamusoro pehunhu hwayo hwakachena, kushanda kwakazara kwemapuratifomu egranite kunodarikawo kure kwesimbi isina tsvina. Panyaya yekugadzikana kwekupisa, iyo coefficient yekuwedzera kwekushisa inongova (4-8) × 10⁻⁶/℃, isingasviki hafu yesimbi isina tsvina (inenge 17 × 10⁻⁶/℃), iyo inogona kuchengetedza zvirinani kurongeka kweiyo michina yekuona kana tembiricha iri mukamuri yakachena ichichinja. Iyo yakakwira yekunyorovesa hunhu (kunyorovesa ratio> 0.05) inogona kukurumidza kudzoreredza kuzunguzika kwemidziyo uye kudzivirira iyo yekuona probe kubva pakuzununguka. Kupokana kwayo kwechisikigo kunogonesa kuti irambe yakagadzikana kunyangwe painenge ichiiswa kune photoresist zvinonyungudutsa, etching magasi uye mamwe makemikari pasina kudiwa kwekuwedzera kudzivirirwa kwekuvhara.

Parizvino, mapuratifomu egranite anoshandiswa zvakanyanya mune yepamusoro wafer kugadzira zvidyarwa. Dhata rinoratidza kuti mushure mekutora puratifomu yegranite, mwero wekusafungira wewafer surface particle yekuona wadzikira ne60%, kutenderera kwemidziyo yakawedzera nekatatu, uye mutengo wekugadzira wakadzikira ne25%. Sezvo iyo semiconductor indasitiri inofamba ichienda kune yakakwira chaiyo, mapuratifomu egranite, ane mabhenefiti awo akakosha senge zero simbi ion kuburitswa uye yakaderera particle kusvibiswa, icharamba ichipa yakagadzikana uye yakavimbika rutsigiro rwekuongorora wafer, ichiva simba rakakosha kufambisa kufambira mberi kweindasitiri.