Munyaya yekuongorora mawafer e semiconductor, kuchena kwenzvimbo yekucheneswa kwakabatana zvakananga negoho rechigadzirwa. Sezvo kunyatsogadzirwa kwemachip kuri kuramba kuchivandudzika, zvinodiwa zvemapuratifomu ekutakura emidziyo yekuona zviri kuramba zvichiwedzera kuoma. Mapuratifomu egranite, ane hunhu hwe zero metal ion release uye low particle discharge, apfuura zvinhu zvechinyakare zvesimbi isina ngura uye ave mhinduro inofarirwa yemidziyo yekuongorora mawafer.
Granite idombo rechisikigo rinoumbwa nezvicherwa zvisiri zvesimbi zvakaita se quartz, feldspar uye mica. Hunhu uhwu hunoipa mukana wekuti isaburitse ion yesimbi. Kusiyana neizvi, simbi isingatsvedzeri, sesimbi, chromium uye nickel, inowanzobatwa nengura yemagetsi pamusoro payo nekuda kwekuora kwemvura uye magasi ane acidic kana alkaline munzvimbo yakachena, zvichikonzera kunaya kweion dzesimbi dzakadai seFe²⁺ neCr³⁺. Kana maion madiki aya abatana pamusoro pewafer, anochinja hunhu hwemagetsi hwezvinhu zve semiconductor mumaitiro anotevera akadai se photolithography uye etching, zvichikonzera threshold voltage drift ye transistor, uye zvinototungamira kuma short circuit mudunhu. Data rekuongorora renyanzvi rinoratidza kuti mushure mekunge granite platform yagara ichiratidzwa munzvimbo yakachena yekupisa kwekamuri uye hunyoro (23±0.5℃, 45%±5% RH) kwemaawa 1000, kuburitswa kweion dzesimbi kwakaderera pane muganho wekuona (< 0.1ppb). Kukanganisa kwemawafer kunokonzerwa nekusvibiswa kwemaion esimbi pakushandisa mapuratifomu esimbi isina ngura kunogona kusvika pa15% kusvika 20%.
Panyaya yekudzora kusvibiswa kwezvikamu, mapuratifomu egranite anoshandawo zvakanaka kwazvo. Makamuri ekushambidza ane zvinodiwa zvakanyanya zvekuwanda kwezvikamu zvakasungirirwa mumhepo. Semuenzaniso, mumakamuri ekushambidza eISO Class 1, huwandu hwezvikamu zve 0.1μm zvinobvumirwa pa cubic meter hahupfuuri 10. Kunyangwe kana puratifomu yesimbi isina tsvina yakagadziriswa, inogona kuburitsa marara esimbi kana oxide scale ichibviswa nekuda kwemasimba ekunze akadai sekuzunguzika kwemidziyo uye kushanda kwevashandi, izvo zvinogona kukanganisa nzira yekuona kana kukwenya pamusoro pewafer. Mapuratifomu egranite, ane chimiro chawo chemineral chakasimba (density ≥2.7g/cm³) uye kuomarara kwakanyanya (6-7 pachikero cheMohs), haawanzo pwanyika kana kuputsika panguva yekushandiswa kwenguva refu. Zviyero zvakayerwa zvinoratidza kuti zvinogona kuderedza kuwanda kwezvikamu zvakasungirirwa mumhepo yenzvimbo yemidziyo yekuona neinopfuura 40% zvichienzaniswa nemapuratifomu esimbi isina tsvina, zvichichengetedza zviyero zvegiredhi rekuchenesa.
Kuwedzera pakuchena kwayo, kushanda kwakazara kwemapuratifomu egranite kunodarikawo simbi isingatsvedzeri. Kana tichitaura nezvekugadzikana kwekupisa, chiyero chayo chekuwedzera kupisa chinongori (4-8) × 10⁻⁶/℃, chiri pasi pehafu yesimbi isingatsvedzeri (inenge 17×10⁻⁶/℃), izvo zvinogona kuchengetedza kurongeka kwenzvimbo yemidziyo yekuona kana tembiricha iri mukamuri rakachena ichichinja-chinja. Hunhu hwepamusoro hwekunyorova (damping ratio > 0.05) hunogona kukurumidza kuderedza kudedera kwemidziyo uye kudzivirira detection probe kuti isazununguke. Kusagadzikana kwayo kwengura kunoita kuti irambe yakasimba kunyangwe kana yakasangana nephotoresist solvents, etching gases uye mamwe makemikari pasina chikonzero chekuwedzera dziviriro yekuwedzera.
Parizvino, mapuratifomu egranite anoshandiswa zvakanyanya mufekitori dzekugadzira mawafer epamusoro. Data rinoratidza kuti mushure mekushandisa granite platform, mwero wekusanzwisisa wekuona mawafer pamusoro pezvikamu wakaderera ne60%, kutenderera kwekugadzirisa michina kwakawedzerwa katatu, uye mutengo wekugadzira waderera ne25%. Sezvo indasitiri yesemiconductor ichifambira mberi pakunyatsojeka, mapuratifomu egranite, ane zvakanakira zvikuru zvakaita sekunge hapana simbi inoburitsa maion uye kusvibiswa kwezvikamu zvishoma, acharamba achipa rutsigiro rwakasimba uye rwakavimbika rwekutarisa mawafer, zvichiva simba guru rinofambisa kufambira mberi kweindasitiri.
Nguva yekutumira: Chivabvu-20-2025