Muminda yekunyatsoongorora optical uye kugadzirwa kwepamusoro, kugadzikana kweangular padanho re 0.01μrad chiratidzo chakakosha. Granite optical mapuratifomu, ane zvimiro zvawo uye tekinoroji synergy, ave musimboti mutakuri wekuwana yakanyanya-yakanyanya kurongeka.
Zvakanakira zvinhu zvinoisa hwaro hwakasimba. Granite, sedombo rinopisa rakagadzirwa ne geology pamusoro pemazana emamiriyoni emakore, inozivikanwa nekuderera kwayo zvakanyanya coefficient yekuwedzera kwekupisa, iyo inongori hafu yesimbi uye chikamu chimwe muzvina icho chealuminium. Kana tembiricha yachinja ne1 ℃, chikamu chegiraniti chemita 1-mita chinowedzera ne6 micrometer chete, nepo chikamu chealuminium chichiwedzera ne23 micrometer. Izvi zvinonyatsodzivirira kutsauka kweangular kunokonzerwa nekupisa kwekushisa. Zvichakadaro, kuita kwayo kwakanakisa kunyorovesa kunogona kukurumidza kudzikamisa kudengenyeka kwekunze, kuchengetedza chikuva chiri muchimiro chakamira uye kuderedza kukanganiswa nezvinhu zvemaziso.
Iyo chaiyo dhizaini yedhizaini inowedzera kuomarara. Iyo granite optical chikuva, mushure meyakagadziridzwa dhizaini dhizaini, yakawedzera zvakanyanya kuoma uye inogona kunyatso ramba deformation. Kurongeka kwayo kwepamusoro kunosvika padanho repamusoro muindasitiri. Kutora iyo 00-nhanho kurongeka inosangana neiyo GB4987-85 yakajairwa semuenzaniso, iyo flatness kushivirira ingori 2 × (1 + d/1000) μm (d ndiyo diagonal kureba), ichipa yakanyanyisa kumisa yekumisikidza referensi yemidziyo yemaziso.
Dynamic calibration inowanikwa kuburikidza nekubatana kwetekinoroji. Kana yakashongedzerwa neyakakwirisa vibration yekuzviparadzanisa masisitimu senge zvitubu zvemhepo kana magineti levitation, iyo granite chikuva inogona kupatsanura yakaderera-frequency uye yakakwirira-frequency vibrations. Inowedzerwa nepamusoro-chaiyo yekuyera michina yakadai se laser interferometers, iyo Angle shanduko inotariswa munguva chaiyo. Kamwe kutsauka kwapfuura chikumbaridzo che 0.01μrad, iyo mhinduro yekudzora sisitimu inokurumidza kutyaira yakanaka-tuning meshini yekururamisa kuti ive nechokwadi chekuti chikuva chinogara chiri chepamusoro-chaiyo uye yakagadzikana mamiriro.
Kubva pachinhu chezvinyorwa kusvika pakusimbaradza tekinoroji, iyo granite optical chikuva, ine kugadzikana kwekupisa, kuzunguzika kuramba uye nemazvo kugadzirisa mabhenefiti semusimboti wayo, zvakasanganiswa nehungwaru kutonga tekinoroji, yakabudirira kutyora 0.01μrad chaiyo pachikumbaridzo uye inoshandiswa zvakanyanya mukucheka-kumucheto minda senge photolithmicalment, ongororo yekugadzira uye tsvagiridzo yelaser yakakwirira-chaiyo optics kusvika paurefu hutsva.
Nguva yekutumira: May-23-2025