Ko iyo granite base inokanganisa sei kurongeka kwekusinga paradza kuyedzwa kwewafers? .

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Munyika chaiyo yekugadzira semiconductor, kusiri-kuparadza kuyedzwa kwewafers ndiyo yakakosha link yekuve nechokwadi chemhando yemachipisi. Iyo inoita seisina kukosha yegranite base ichokwadi "isina gamba gamba" rinotaridza kuoneswa kwechokwadi. Panyika zvinokanganisa sei mhinduro dzebvunzo? Ichi chinyorwa chichaita ongororo yakadzama kubva pazviyero senge zvinhu zvenyama uye dhizaini yekugadzira. .
1. Nheyo Yakagadzikana: Zvakanakira zvechisikigo zvegranite zvinoisa hwaro hwakasimba hwekunyatsoita
1. Yakanakisa seismic kuita
Munguva yekushanda kweiyo wafer isinga paradza yekuyedza midziyo, kutenderera kwemota uye kufamba kwezvinhu zvemakanika zvese zvinoburitsa vibrations. Kana aya mavibrations akasadzvanywa zvine mutsindo, anozokanganisa zvakanyanya nekurongeka kwekuyedza. Iko mukati megranite yakanyatsobatanidzwa nemaminerari makristasi akadai sequartz uye feldspar. Chimiro chayo chakasiyana chinoiisa neyakasikwa vibration absorption, inokwanisa kutora pamusoro pe90% yesimba rekuzunguza remidziyo. Iyo chaiyo yekuyera data yeimwe semiconductor inogadzira inoratidza kuti mushure mekushandisa gasi regranite, iyo vibration amplitude yemidziyo yekuona yakaderedzwa kubva 12μm kusvika 2μm, zvinobudirira kudzivirira kutsauka kwechiratidzo chekuona chinokonzerwa nekudengenyeka. .
2. Yakanyanya kuderera coefficient yekuwedzera kwekupisa
Munguva yekuona maitiro, zvinhu zvakaita sekudziya kwemidziyo uye shanduko yekushisa kwezvakatipoteredza zvese zvinokanganisa kugadzikana kwechigadziko chemuchina. Zvinhu zvakajairika zvinowedzera zvakanyanya kana zvichipisa, asi iyo coefficient yekupisa kwekuwedzera kwegranite inongova 1/5 yesimbi. Kunyangwe iyo ambient tembiricha ikachinja ne10 ℃, deformation yayo inogona kufuratirwa. Izvi zvinoita kuti chigadziko chegranite chipe chikuva chakagadzika chereferensi yemidziyo yekuongorora, kuve nechokwadi chekuti nzvimbo yakaenzana pakati pekuongorora probe uye wafer inoramba yakarurama nguva dzese uye kudzivirira kukanganisa kwekuongorora kunokonzerwa nekupisa kwekupisa. .
Chechipiri, dhizaini chaiyo: Kugadziriswa kwemaitiro kunowedzera kuwedzera kuvimbika kwekuonekwa
High-precision processing uye flatness garandi
Iyo yepamusoro-yemhando yepamusoro granite base inogadziriswa neakakwira mashanu-axis yekubatanidza CNC tekinoroji, ine flatness ye ± 0.5μm/m, ichipa iyo yekupedzisira-yakafuratira yekumisikidza referensi yekuongorora michina. Mukuongorora kwewafer, kusimuka uye kukwirira kweiyo yekuongorora probe kwakakosha kune mhedzisiro yekuongorora. Iyo yakakwirira-chaiyo yegranite base inogona kuve nechokwadi chekumisikidzwa kweiyo probe, zvichiita kuti data yekuongorora ive yakarurama uye yakavimbika. .
2. Customized structural adaptation
Granite mabhesi emuchina anogona kugadziridzwa kune akasiyana wafer isinga paradza yekuyedza michina uye maitiro ekuita. Semuenzaniso, kusangana nezvinodiwa zve optical inspection midziyo yekuvhenekesa kwechiedza, pamusoro pechigadziko chemuchina chinogona kunyatsorapwa; Kuti usangane nezvinodiwa zvekugadzika zvemidziyo yekuongorora ye ultrasonic, chigadziko chinogona kuve chakagadzirwa nemakomba chaiwo ekuisa uye tambo matireyi, zvichiita kuti nekukurumidza uye kwakaringana kuisirwa kwemidziyo uye kuderedza kutsauka kwekuona kunokonzerwa nekukanganisa kwekuisa. .
Iii. Kugara kwenguva refu: Deredza kurasikirwa chaiko kunokonzerwa nekugadziriswa kwemidziyo
Granite ine kuomarara kwakanyanya uye yakasimba kupfeka kuramba, ine kuomarara kweMohs kwe6 kusvika ku7, inova katatu kupikisa kupfeka kwesimbi yakajairika. Munguva yenguva refu yekuongorora mashandiro, pamusoro pechigadziko chemuchina hachiwanzo kupfeka uye inogona kugara ichichengetedza yakanaka chaiyo mamiriro. Kusiyana neizvi, mabhesi akagadzirwa nezvimwe zvinhu anogona kukonzera shanduko mukumisikidzwa kwemidziyo nekuda kwekupfeka uye kubvaruka, nekudaro zvichikanganisa kurongeka kwekuona uye kuda kugaro gadzirisa uye kugadzirisa. Upenyu hurefu hwebasa uye kugadzikana kwepamusoro kwegireniti inobudirira kuderedza kuwanda kwekugadzirisa michina uye kuderedza dambudziko rekurasikirwa kwechokwadi kunogona kuitika panguva yekugadzirisa. .
Kubva pakukatyamadza kuramba, kupisa kupisa kune chaiyo dhizaini, ese maficha echigadziko chegranite ari kuchengetedza iko kusinga paradza kuyedzwa kwewafers. Munguva yanhasi yekugadzira semiconductor iyo inoteedzera kunyatsojeka, kusarudza yemhando yepamusoro yegranite base kwakafanana nekuwedzera yakasimba layer yeinishuwarenzi kune chokwadi uye kuvimbika kwemhedzisiro yebvunzo. .