Iko kugadzikana uye kurongeka kwechero muchina wekupedzisira-chaiyo-kubva kuhombe Coordinate Measuring Machines (CMMs) kuenda kumberi semiconductor lithography midziyo-yakanyanya kutsamira pahwaro hwayo hwegraniti. Paunenge uchibata nemonolithic mabhesi ehukuru hwakakura, kana yakaoma yakawanda-chikamu Granite Flat Panels, kuungana uye kuisirwa maitiro kwakakosha sekugadzira kwayo chaiko. Kungoisa pani rakapedzwa hakuna kukwana; chaiyo yezvakatipoteredza uye zvimiro zvinodikanwa zvinofanirwa kusangana kuchengetedza uye kushandisa iyo inopupurirwa sub-micron flatness.
1. Nheyo: Yakagadzikana, Yenhanho Substrate
Mafungiro akajairika ndeekuti iyo chaiyo granite pani, senge iyo yakagadzirwa kubva kune yedu yepamusoro-density ZHHIMG® Black Granite (3100 kg/m³), inogona kugadzirisa pasi isina kugadzikana. Nepo granite ichipa kuomarara kwakasiyana, inofanirwa kutsigirwa nechimiro chakagadzirirwa kushomeka kwenguva refu.
Nzvimbo yegungano inofanirwa kunge iine kongiri yepasi iyo isiri nhanho chete asi yakapora nemazvo, kazhinji kusvika kumagiredhi egiredhi remauto pakukora uye kuwanda-kufananidzira $1000mm$ dzakakora, pasi-yakaoma kongiri pasi mudzimba dzegungano dzeZHHIMG pachayo. Nehurombo, iyi substrate inofanirwa kuve yakaparadzaniswa kubva kune ekunze vibration zvinyorwa. Mukugadzirwa kwemabhesi edu makuru emuchina, isu tinobatanidza pfungwa senge anti-vibration moat yakatenderedza makamuri edu emetrology kuona kuti hwaro pachahwo hwakamira uye hwakaparadzaniswa.
2. Iyo Isolation Layer: Grouting uye Leveling
Kutarisana kwakananga pakati pegranite panel uye nheyo yekrete inodziviswa zvakasimba. Iyo granite base inofanirwa kutsigirwa pane chaiyo, masvomhu akaverengerwa mapoinzi kuti aregere kushushikana kwemukati uye kuchengetedza yayo yakasimbiswa geometry. Izvi zvinoda nyanzvi yekuyera system uye grouting layer.
Kana iyo pani yakanyatso kugadzwa uchishandisa inogadziriswa majaki kana wedges, yakakwirira-simba, isiri-kudonha, chaiyo grout inopombwa mugomba pakati pegranite uye substrate. Iyi yakasarudzika grout inorapa kuti iite yakakwira-density, yunifomu interface iyo inogovera zvachose huremu hwepaneru zvakaenzana, kudzivirira sag kana kukanganisa izvo zvinogona kuunza kushushikana kwemukati uye kukanganisa flatness nekufamba kwenguva. Iyi nhanho inonyatso shandura iyo granite pani uye hwaro kuita imwechete, yakabatana, uye yakaoma misa.
3. Thermal uye Temporal Equilibrium
Sezvinoita nezvese basa repamusoro-soro remetrology, kushivirira kwakakosha. Iyo granite pani, iyo grouting, uye kongiri substrate inofanirwa kusvika pakudziya kwese kuenzana nenzvimbo yakatenderedza yekushanda isati yaitwa macheki ekupedzisira. Iyi nzira inogona kutora mazuva kune mapaneru makuru kwazvo.
Uyezve, gadziriso yekuenzanisa-inoitwa uchishandisa zviridzwa senge laser interferometers uye mazinga emagetsi-inofanirwa kuitwa zvishoma nezvishoma, maminiti ekuwedzera, zvichibvumira nguva yekuti zvinhu zvigadzike. Nyanzvi dzedu nyanzvi, dzinoomerera kune dzakasimba dzepasi rose metrology zviyero (DIN, ASME), nzwisisa kuti kumhanyisa danho rekupedzisira rinogona kuunza kushushikana kwakadzikama, uko kunozoonekwa gare gare sekudonha chaiko.
4. Kubatanidzwa kweZvikamu uye Tsika Gungano
Kune ZHHIMG tsika yeGranite Zvikamu kana Granite Flat Panels inobatanidza mutsara mota, mabhengi emhepo, kana CMM njanji, musangano wekupedzisira unoda hutsanana hwakakwana. Dzimba dzedu dzakatsaurirwa dzakachena dzekusanganira, dzinotevedzera semiconductor midziyo nharaunda, dzinodikanwa nekuti diki diki guruva zvidimbu zvakavharirwa pakati pegranite uye chikamu chesimbi chinogona kukonzera micro-deflection. Yese interface inofanirwa kucheneswa zvine hungwaru uye kutariswa isati yasungirirwa kwekupedzisira, kuve nechokwadi chekuti chikamu chechikamu chakadzikama chinopinzwa mumuchina system pachayo.
Nekuremekedza izvi zvakaomesesa zvinodiwa, vatengi vanova nechokwadi chekuti havasi kungoisa chinhu, asi vari kubudirira kutsanangura iyo yekupedzisira Datum yemidziyo yavo yemhando yepamusoro-hwaro hwakavimbiswa neZHHIMG's material science uye hunyanzvi hwekugadzira.
Nguva yekutumira: Oct-29-2025