Muminda yakaita sekugadzira semiconductor uye zvishandiso zvekuyera nemazvo, kururama kwemapuratifomu ekugadzira granite nemazvo kunosarudza zvakananga kunaka kwekushanda kwemidziyo. Kuti ive nechokwadi chekuti kururama kwepuratifomu kunosangana nezvinodiwa, kuedza kunofanirwa kuitwa kubva pazvinhu zviviri: kuona zviratidzo zvakakosha uye kutevedzera mitemo yakajairwa.
Kuonekwa kwechiratidzo chikuru: Kudzora kururama kwezvikamu zvakawanda
Kuona kuti nzvimbo yacho yakatsetseka: Kuziva kuti nzvimbo yacho yakatsetseka sei
Kutsetseka ndicho chiratidzo chikuru chemapuratifomu e granite akarurama, uye kazhinji kunoyerwa ne laser interferometers kana electronic levels. Laser interferometer inogona kuyera maminiti undulations ari pamusoro pepuratifomu nekuburitsa laser beam uye kushandisa musimboti wekupindira kwechiedza, nekunyatsosvika padanho re sub-micron. Electronic level inoyera nekufamba kakawanda uye inodhirowa mepu ye contour ye three-dimensional yepuratifomu kuti ione kana paine maburi emunharaunda kana maburi. Semuenzaniso, mapuratifomu e granite anoshandiswa mumichina ye semiconductor photolithography anofanirwa kuve ne flatness ye ±0.5μm/m, zvichireva kuti musiyano wekukwirira mukati mehurefu hwe 1-meter haufanirwe kudarika hafu ye micrometer. Kuburikidza nemichina yekuona yakanyatsonaka chete ndipo panogona kuve nechokwadi chekuti chiyero ichi chakasimba.
2. Kuona kutwasuka: Iva nechokwadi chekuti kufamba kwakatwasuka kwacho kwakarurama
Kune mapuratifomu ane zvikamu zvinofamba zvakanyatsonaka, kutwasuka kwakakosha zvikuru. Nzira dzakajairika dzekuona inyaya yewaya kana kuti laser collimator. Nzira yewaya inosanganisira kusungirira waya dzesimbi dzakanyatsonaka uye kuenzanisa mukaha uri pakati pepuratifomu newaya dzesimbi kuti uone kutwasuka. Laser collimator inoshandisa hunhu hwe linear propagation hwelaser kuti ione kukanganisa kwe linear pamusoro pekuisa puratifomu guide rail. Kana kutwasuka kukasasvika padanho, zvichaita kuti michina ichinje panguva yekufamba, zvichikanganisa kugadziriswa kana kuyera kwakarurama.
3. Kuona kuomarara pamusoro: Iva nechokwadi chekuti "kunaka" kwekubata
Kuomarara kwepamusoro pepuratifomu kunokanganisa kukodzera kwechikamu chakaiswa. Kazhinji, stylus roughness meter kana optical microscope inoshandiswa kuona. Chishandiso chemhando yestylus chinorekodha kuchinja kwekukwirira kwe microscopic profile nekubata pamusoro pepuratifomu ne fine probe. Optical microscopes inogona kuona zvakananga magadzirirwo epamusoro. Mukushandiswa kwakanyatsojeka, kuomarara kwepamusoro pepuratifomu dzegranite kunofanirwa kudzorwa paRa≤0.05μm, izvo zvakaenzana nemhedzisiro yakaita segirazi, kuve nechokwadi chekuti zvikamu zvakanyatsonaka zvinokwana zvakanaka panguva yekuiswa uye kudzivirira kudedera kana kusuduruka kunokonzerwa nemaburi.
Mitemo yekunyatsorongeka inotevera: mitemo yepasi rose uye kutonga kwemukati mebhizinesi
Parizvino, pasi rose, zviyero zveISO 25178 neGB/T 24632 zvinowanzo shandiswa sehwaro hwekuona kururama kwemapuratifomu egranite, uye kune kupatsanurwa kwakajeka kwezviratidzo zvakaita sekutsetseka uye kutwasuka. Pamusoro pezvo, makambani ekugadzira epamusoro anowanzo gadzira zviyero zvakasimba zvekudzora mukati. Semuenzaniso, chinodiwa chekutsetseka kwepuratifomu yegranite yemuchina wephotolithography chakakwira ne30% kupfuura chiyero chepasi rose. Pakuita bvunzo, data rakayerwa rinofanira kuenzaniswa nezvinodiwa. Mapuratifomu anotevedzera zvizere zviyero chete ndiwo anogona kuve nechokwadi chekushanda kwakasimba mumidziyo chaiyo.
Kuongorora kururama kwemapuratifomu ekugadzira granite ipurojekiti yakarongeka. Kungoyedza zviratidzo zvepakati zvakaita sekutsetseka, kutwasuka, uye kuomarara kwenzvimbo, uye kutevedzera mitemo yepasi rose neyemabhizinesi, ndiko kunogona kuvimbisa kunyatsojeka uye kuvimbika kwepuratifomu, zvichiisa hwaro hwakasimba hweminda yekugadzira yepamusoro senge semiconductors nemidziyo yekugadzira.
Nguva yekutumira: Chivabvu-21-2025