Mune semiconductor zvishandiso, ndeapi epakati subsystems anonyanya kushandiswa granite?

Granite ndechimwe chezvinhu zvakakurumbira zvinoshandiswa mumidziyo yesemiconductor.Imhando yedombo rakaoma, rinopisa rinouya nemhando dzakasiyana dzegrey, pink, uye chena.Granite inozivikanwa nekusimba kwayo, yakaderera kupisa kwekuwedzera coefficient, uye yakanakisa yekupisa conductivity, zvichiita kuti ive chinhu chakanakira kushandiswa mune semiconductor mudziyo subsystems.

Imwe yeakanyanya subsystems anoshandisa granite mune semiconductor zvishandiso ndeye wafer inobata uye kugadzirisa subsystem.Iyi subsystem inoita basa rakakosha mukugadzira maitiro emidziyo semiconductor.Iyo wafer ndiyo yekutanga substrate yechishandiso, uye iyo yekubata nekugadzirisa subsystem ine basa rekufambisa wafer pakati pemakamuri akasiyana uye michina yekugadzirisa.Granite inoshandiswa kugadzira yakanyatsojeka uye yakafuratira wafer inobata nzvimbo uye inopa yakagadzikana chikuva chekugadzira wafer.

Imwe yakakosha subsystem inoshandisa granite ndiyo vacuum subsystem.Mune semiconductor zvishandiso, vacuum makamuri anoshandiswa kudzivirira kusvibiswa panguva yekugadzira.Kuti hurongwa uhu hushande nemazvo, kamuri yacho inofanira kunge yakavharwa zvachose, ndipo panopinda granite. Granite chinhu chakanakira vacuum chambers nekuti ine yakaderera mareti ekubuda uye inogona kuchengetedza yakagadzikana vacuum nharaunda.Pamusoro pezvo, granite yakakwira machining chaiyo inobvumira kugadzirwa kwechisimbiso chakakwana, ichipa yakavimbika vacuum nharaunda yekugadziriswa kwewafer.

Iyo alignment subsystem imwe yakakosha sisitimu inoshandisa granite yakasarudzika zvivakwa.Iyi subsystem ine basa rekubatanidza zvikamu zvakasiyana zve semiconductor zvishandiso zvine humbowo uye nemazvo.Granite inoshandiswa mukugadzira uye kuvaka kwematanho ekurongeka kuti ive nechokwadi chekuomarara uye kugadzikana.Kuoma kwepamusoro kwegranite kunobatsira mukuwana kurongeka kwepamusoro, zvichiita kuti pave nekugadzirwa kwezvakanyanya uye zvakavimbika semiconductor zvishandiso.

Chekupedzisira, iyo metrology subsystem imwe sisitimu yesemiconductor zvishandiso zvinoshandisa granite.Metrology inoita basa rakakosha mukugadzirisa wafer, uye iko kurongeka kweiyi subsystem kwakakosha mukuona kunaka kwemudziyo.Granite inopa yakagadzikana uye yakaoma chikuva inobatsira mukudzikisa kuzunguzika uye kuderedza mhedzisiro yekushanduka kwekushisa.Izvi, zvakare, zvinobatsira mukuwana zviyero zvakanyatsorongeka mune metrology subsystem, zvichitungamira mukugadzirwa kwemhando yepamusoro semiconductor zvishandiso.

Mukupedzisa, granite chinhu chakakosha mukugadzira semiconductor zvishandiso.Iyo yakasarudzika zvivakwa zvakaita seyakanyanya kusimba, kuderera kwekuwedzera kwemafuta, uye yakanakisa kupisa kwemafuta inoita kuti ive chinhu chakanakisa kune akati wandei masisitimu mune semiconductor zvishandiso, zvinosanganisira wafer kubata uye kugadzirisa, vacuum subsystem, alignment subsystem, uye metrology subsystem.Uyezve, kushandiswa kwegranite mumidziyo yesemiconductor kwakabatsira mukugadzirwa kwemidziyo yakanyatsojeka, yakavimbika uye inoshanda yakashandura maindasitiri mazhinji.