Granite ndeimwe yezvinhu zvinonyanya kushandiswa mumidziyo ye semiconductor. Imhando yedombo rakaoma, rinopisa rinouya mumhando dzakasiyana dzegrey, pink, uye chena. Granite inozivikanwa nekusimba kwayo, low thermal expansion coefficient, uye high thermal conductivity, zvichiita kuti ive chinhu chakanakira kushandiswa mumidziyo ye semiconductor subsystems.
Imwe yenzira huru dzinoshandisa granite mumidziyo ye semiconductor ndiyo nzira yekubata nekugadzira wafer. Iyi nzira inoita basa rakakosha mukugadzirwa kwemidziyo ye semiconductor. Wafer ndiyo nzira yekutanga yekushandisa mudziyo, uye nzira yekubata nekugadzira ndiyo inotarisira kutamisa wafers pakati pemakamuri akasiyana nemidziyo yekugadzirisa. Granite inoshandiswa kugadzira nzvimbo dzekubata wafer dzakanyatsojeka uye dzakati sandara uye inopa nzvimbo yakagadzikana yekugadzirisa wafer.
Imwe nzira yakakosha inoshandisa granite ndiyo vacuum subsystem. Mumidziyo ye semiconductor, vacuum chambers dzinoshandiswa kudzivirira kusvibiswa panguva yekugadzira. Kuti iyi system ishande zvakanaka, chamber inofanira kunge yakavharwa zvakakwana, ndipo panopinda granite. Granite chinhu chakanakira makamuri evacuum nekuti ine mwero wakaderera wekubuda kwegasi uye inogona kuchengetedza nzvimbo yevacuum yakagadzikana. Pamusoro pezvo, kunyatsogadzirwa kwegranite kunobvumira kugadzirwa kwechisimbiso chakakwana, zvichipa nzvimbo yakavimbika yevacuum yekugadzirisa wafer.
Sisitimu yekurongeka ndeimwe sisitimu yakakosha inoshandisa hunhu hwakasiyana hwegranite. Iyi sisitimu ine basa rekubatanidza zvikamu zvakasiyana zvemidziyo yesemiconductor nemazvo uye nemazvo. Granite inoshandiswa mukugadzira nekugadzira matanho ekurongeka kuti ive nechokwadi chekusimba uye kugadzikana kwakanyanya. Kusimba kwakanyanya kwegranite kunobatsira mukuwana kunyatsorongeka kwakanyanya, zvichitungamira mukugadzirwa kwemidziyo yesemiconductor yakanyatsojeka uye yakavimbika.
Chekupedzisira, metrology subsystem imwe sisitimu yemidziyo yesemiconductor inoshandisa granite. Metrology inoita basa rakakosha mukugadzirisa wafer, uye kururama kwesubsystem iyi kwakakosha pakuona kunaka kwemudziyo. Granite inopa puratifomu yakagadzikana uye yakasimba inobatsira mukuderedza kudedera uye kuderedza mhedzisiro yekuchinja-chinja kwetembiricha. Izvi, zvinobatsirawo mukuwana zviyero zvakarurama mumetrology subsystem, zvichitungamira mukugadzirwa kwemidziyo yesemiconductor yemhando yepamusoro.
Mukupedzisa, granite chinhu chakakosha mukugadzira michina ye semiconductor. Hunhu hwayo hwakasiyana hwakadai sekuoma kwakanyanya, kuwedzera kupisa kwakaderera, uye kufambisa kupisa kwakanaka kunoita kuti ive chinhu chakanaka kune akati wandei masisitimu mumidziyo ye semiconductor, kusanganisira kubata nekugadzirisa wafer, vacuum subsystem, alignment subsystem, uye metrology subsystem. Uyezve, kushandiswa kwegranite mumidziyo ye semiconductor kwakabatsira mukugadzirwa kwemidziyo yakanyatsojeka, yakavimbika uye inoshanda zvakanaka iyo yakachinja maindasitiri akawanda.
Nguva yekutumira: Kurume-19-2024