Granite chimwe chezvinhu zvakakurumbira zvinoshandiswa muSemiconductor zvishandiso. Ndiwo mhando yedombo rakaoma, igneous dombo rinouya mumumvuri wakasiyana wegrey, pink, uye chena. Granite anozivikanwa nekukura kwayo, kuwedzera kwekuwedzera kuwanda, uye akanakisa anodzora maitiro, achizviita zvinhu zvakanaka zvekushandisa muMicononductor mudziyo springystems.
Imwe yeiyo yekutanga subsystems iyo inoshandisa granite mumakiromita eSecomonderductor ndiyo iyo wafer yekubata uye kugadzirisa subsystem. Iyi subsystem inoita basa rakakosha mukugadzira maitiro eMicumonductor zvishandiso. Iyo wafer ndeye yekutanga substrate yechishandiso, uye kubata uye kugadzirisa uye kugadzirisa subsystem zvine mutoro wekutamanikidza kuchinjisa wafters pakati pemakamuri akasiyana uye ekugadzirisa michina. Granite inoshandiswa kugadzira yakanyanya kujeka uye flat wafer yekubata nzvimbo yekubata uye inopa chikuva chakagadzikana chekugadzirisa kwaWerfer.
Chimwezve chinoshorwa subsystem inoshandisa granite ndiyo vacuum subsystem. Mumidziyo yeMicononductor, makamuri ecuum anoshandiswa kudzivirira kusvibiswa panguva yekugadzira. Kune ino system yekushanda zvinobudirira, iyo imba inofanirwa kusimudzwa zvachose, iyo inouya granite inopinda. Granite chinhu chakanakira chimakamuri nekuti chine mitengo yakaderera uye inogona kuchengetedza nzvimbo yakagadzikana. Pamusoro pezvo, yakakwira nzvimbo yekumanikidza inobvumidza kusikwa kwechisimbiso chakakwana, kupa yakavimbika puum mamiriro ekugadzirisa kwaWerfer.
Iyo yekubatira subsystem ndeyemimwe system yakaoma iyo inoshandisa kushandiswa kwegranite zvakasarudzika zvivakwa. Iyi subsystem ine mutoro wekubatanidza zvikamu zvakasiyana zve semicononductor zvishandiso zvine humbakisi uye chokwadi. Granite anoshandiswa mukugadzirwa uye kuvaka kwehurongwa hwekuwirirana kuve nechokwadi chekuomesesa zvakanyanya uye kugadzikana. Kusindimara kwakanyanya kweGranite kunobatsira mukuzadzisa kurongeka kwakakura, zvichitungamira kugadzirwa kwezvinhu zvakanyatsonaka uye zvakavimbika semiconductor zvishandiso.
Chekupedzisira, iyo metrology subrology imwe imwe system yeMicononductor zvishandiso zvinoshandisa Granite. Metrology anotora chinzvimbo chakakosha muWerfor kugadzirisa, uye chokwadi cheiyi subsystem chakashora mukuona kunaka kwechishandiso. Granite inopa chigadziko chakagadzikana uye chakaomarara chinobatsira mukuderedza vibrations uye kuderedza mhedzisiro yekudziya tembiricha. Izvi, zvinobatsira pakuwana zviyero zvakanyatsonaka muMetrology Sublogystem, zvichitungamira mukugadzirwa kwemidziyo yepamusoro yemhando yepamusoro.
Mukupedzisa, Granite zvinhu zvakakosha mukugadzirwa kweMicononductor zvishandiso. Izvo zvakasarudzika zvimiro zvakakura zvakajeka, kuwedzera kwakaderera kwekuwedzera, uye kufambidzana kwakanaka kunoita kuti ive yakanakisa sarudzo. Uyezve, kushandiswa kweGranite mumidziyo yeMicononductor kwakabatsira mukugadzirwa kweakanyanya kujeka, kwakavimbika uye kushanda zvishandiso zvakachinja maindasitiri akawanda.
Kutumira Nguva: Mar-19-2024