Munguva yeNanoscale Precision, Sei Tichiri Kuvimba Nematombo: Kunyatsoongorora Basa Risingaenzaniswi reGranite muUltra-Precision Metrology neMagadzirirwo?

Kutsvaga kururama ndicho chinhu chinonyanya kukosha muindasitiri yemazuva ano yemhando yepamusoro. Kubva pakugadzirwa kwemasemiconductor kusvika pakufamba kwemashini eCNC ane kumhanya kwakanyanya, chinodiwa chikuru kugadzikana kwakakwana uye kururama kwakayerwa muma nanometers. Kudiwa uku kusingaperi kwekutsungirira kwakanaka kwakaita kuti zvinhu zvakawanda zvechinyakare zvisakwane, zvichitungamira mainjiniya nenyanzvi dzemetro kudzokera kumhinduro inoita seyekare: granite. Dombo iri rakasimba, rakaumbwa zvakasikwa, kana rakasarudzwa uye richigadziriswa nemapoka akasarudzika seZHONGHUI (ZHHIMG®), rinoumba hwaro hwakakosha, hwakanyarara hunoshanda pahuri chizvarwa chinotevera chemidziyo yeindasitiri.

Nyika yemetrology, maererano netsanangudzo, inofanira kuumba gwara rekutarisa rakagadzikana risina matambudziko. Kana michina ichida kuwana nzvimbo ine hunyoro hwe sub-micron, nharaunda nezvinhu zvepasi zvinonyanya kukosha. Chero kutsauka kudiki kunokonzerwa nekushanduka-shanduka kwekupisa, kushushikana kwemukati, kana kudedera kwemhepo kunogona kuparadzira zvikanganiso zvinokanganisa kugadzirwa kunodhura. Apa ndipo apo sainzi yezvinhu zve granite nhema inokunda simbi kana simbi yakakandwa.

Zvinodiwa paKushandisa Zvinhu: Nei Granite Ichiita Zvisina Kunaka neSimbi

Zvigadziko zvematurusi emuchina zvemazuva ano zvaiwanzogadzirwa nesimbi kana simbi yakakandwa. Kunyange hazvo simbi idzi dzichipa kuomarara kwakanyanya, dzine matambudziko maviri makuru mukushandiswa kwakanyatsojeka: kugona kwakaderera kwekunyorova uye ma coefficients akakwira ekuwedzera kwekupisa (CTE). Zvigadziko zvesimbi zvinorira sebhero kana zvichikurudzirwa nemasimba ekunze, zvichichengetedza kutenderera kunokanganisa maitiro ekuyera kana ekugadzira. Uyezve, kunyangwe shanduko diki dzekushisa dzinokonzera kuwedzera kukuru kana kudzikira, zvichikanganisa chigadziko uye zvichibvisa muchina wese pakugadzirisa.

Granite, kunyanya mhando dzakasiyana-siyana dzinoshandiswa nevatungamiriri veindasitiri, inoshandura equation iyi. Muumbirwo wayo unongofanana, zvichireva kuti hunhu hwayo hwakafanana kumativi ese, uye CTE yayo yakaderera zvakanyanya pane yesimbi. Chinokosha ndechekuti granite ine simba guru rekunyungudutsa zvinhu—inotora uye inobvisa kudedera kwemuchina nekukurumidza. Kugadzikana uku kwekupisa uye kuzununguka kunoita kuti ive yega substrate yakavimbika yekushandiswa kwakanyanya, senge Coordinate Measuring Machines (CMMs) uye michina yepamusoro yekuongorora wafer.

Semuenzaniso, granite nhema yeZHHIMG ine huwandu hunosvika 3100 kg/m³. Hunhu uhwu hwekuwanda kwepamusoro haugone kutaurirana; hunoenderana zvakananga nekudzikira kweporisiti uye kuwedzera kwekudzivirira kunyudzwa kwehunyoro, zvichiwedzera kugadzikana kwechikamu ichi kubva pakuchinja kwezvakatipoteredza. Kushanda uku kwepamusoro-soro kwemuviri—uko nyanzvi dzakawanda dzinoona kupfuura kunyange granite nhema dzakajairika dzekuEurope neAmerica—ndiyo yekutanga chivakwa chekuvimbana chakavakirwa muchikamu chimwe nechimwe. Chero kutsauka kubva pachiyero ichi, senge kushandisa zvinhu zvemhando yepasi kana dzimwe nzira dzemarble dzakachipa, kunounza miganhu yemuviri inokurumidza iyo inokanganisa kururama kwe nanometer kunodiwa nemutengi. Kuzvipira kushandisa zvinhu zvakanakisa chete chiyero chetsika uye chehunyanzvi muindasitiri iyi.

Kurwisa Ruzha Rwezvakatipoteredza: Chikuva chinodzivirira kudzungunyika kwegranite

Munzvimbo yakanyatsogadzirwa, muvengi mukuru haasi muchina wacho pachawo, asi ruzha rwekumashure rwakavhiringidzika: tsoka dzemushandisi, ruzha rwerori riri kure, kana kushanda kweHVAC system dziri pedyo. Kudengenyeka uku kunoratidzika kunge kusingakoshi kwezvakatipoteredza kwakakwana kudzima mufananidzo pasi pemaikorosikopu yakakura kana kuunza ruzha mukushanda kwakanaka kwemuchina. Ndokusaka puratifomu inodzivirirwa negranite vibration ichikosha—inoshanda senhare yekupedzisira yekugadzikana pakati penyika yekunze isina kugadzikana uye sisitimu yekuyera inonzwisisika.

Mapuratifomu aya haasi magranite slabs chete; asi masisitimu akagadzirwa zvakanaka. Anoshandisa hunhu hwegranite hwekunyorovesa pamwe chete nemasisitimu epamusoro epneumatic kana elastomeric isolation. Kusasimba kukuru kunopiwa negranite ine density yakakura kunosefa zvinobudirira vibrations ine frequency yakakwira, nepo sisitimu yeisolation inoshanda ichigadzirisa kusagadzikana kwefrequency yakaderera. Huremu hwakanyanya uye kuomarara kwechikamu chegranite—chinogadzirwa nezvivakwa zvinokwanisa kubata zvivakwa zve monolithic zvinosvika matani zana—zvinoita kuti frequency yechisikigo yegungano rese ipfuure zvakanyanya pane frequency yakajairika yekushanda kwemidziyo yakakomberedza, zvichikonzera nzvimbo 'yakanyarara' uko kuyerwa kunogona kuitika pasina kukanganiswa.

Kuvakwa kwenzvimbo yekugadzira zvinhu pachazvo kunoratidza kukosha kwepuratifomu iyi. Nzvimbo dzekugadzira dzakagadzirwa, dzakadai sedzinochengetwa neZHHIMG, dzine makamuri akachena anodzorwa nekupisa, uye ane hunyoro nguva dzose, anowanzo svika 10,000 m². Nzvimbo idzi dzinoshandisa pasi rekongiri rakakora, rinodzivirira kudedera, dzimwe nguva rinodarika 1000 mm kudzika, uye dzakakomberedzwa nemakomba akadzika anodzivirira kudedera. Kunyangwe macrane ari pamusoro penzvimbo idzi dzekuunganidza akasarudzwa kuti ashande 'akanyarara'. Kudyara uku munzvimbo yakagadzikana kwakakosha, kunyanya kune zvikamu zvakagadzirirwa kushandiswa kwakaoma senge semiconductor assembly, uko mashandiro epuratifomu anotungamira zvakananga goho. Pfungwa dzeinjiniya dziri nyore asi hadzina kukanganiswa: kana usingakwanise kuyera nharaunda nemazvo, haugone kugadzira puratifomu yakavimbika.

Kutsanangura Kururama: Basa reVatongi veGranite Vakagadziriswa

Kugadzikana kunopiwa nepuratifomu yechigadziko kunofanirwa kuendeswa kuzvikamu zvinofamba zvemuchina uye, pakupedzisira, kusimbiswa nezvishandiso zvemetrology. Kusimbiswa uku kunoenderana nematanho ekunyatsoongorora ayo pachawo asingakanganisike. Apa ndipo panoshandiswa Granite square ruler Grade AA chaiyo uye Granite Straight Ruler chaiyo ine nzvimbo ina dzakarurama.

Muyero weGiredhi AA

IyoMutongi wechikwere chegraniteGiredhi AA ndiyo chiyero chepamusoro chekururama kwemakona uye kwenzvimbo muCMMs uye musanganiswa wezvishandiso zvemuchina wepamusoro. Zita rekuti 'Giredhi AA' pacharo imhando inozivikanwa pasi rose (inowanzoenderana nezvinodiwa seDIN 875 kana ASME B89.3.7) zvinoratidza mwero wepamusoro wekutsungirira kwejometri. Kusvika pagiredhi iri kunoda parallelism, perpendicularity, uye straightness tolerances inoyerwa muzvikamu zve micron—mazinga anongowanikwa chete kuburikidza nekugadzikana kwezvinhu uye maitiro ekupedzisa anonyanya kushanda. Kana muvaki wemuchina achida kuona kuti vertical axis (Z-axis) yakanyatsoenderana ne horizontal plane (XY plane), Grade AA square ruler inopa reference isingachinjiki, yakaganhurirwa iyo geometry yemuchina yakakiyiwa. Pasina chishandiso ichi, kururamisa kwejometri kwakasimbiswa hakugoneki.

Kuchinja-chinja kweZvinyorwa Zvine Nzvimbo Dzakawanda

Mutongi weGranite Straight ane nzvimbo ina dzakarurama ndeimwe nzira yakakosha, kunyanya pakurongeka kwemasisitimu ekufamba kwenguva refu, akadai seaya anowanikwa mumichina yekuboora yePCB kana ma cutters elaser ane fomati hombe. Kusiyana nemaruler ari nyore, maruler mana akarurama anobvumira mutongi kushandiswa kwete kungosimbisa kutwasuka pamwe chete nehurefu hwayo asiwo kuve nechokwadi chekuenzana uye mativi pakati pezvinhu zvemuchina panguva imwe chete. Kugona uku kwenzvimbo dzakawanda kwakakosha pakuita kurongeka kwakazara kwejometri uko kudyidzana pakati pema axes akawanda kunofanirwa kusimbiswa. Kupera kwakarurama panzvimbo idzi, kwakawanikwa kuburikidza nemakumi emakore eruzivo rwakaunganidzwa uye maitiro, kunoita kuti zvishandiso izvi zvishande kwete semichina yekuongorora chete asiwo sezvishandiso zvekubatanidza pachazvo.

zvishandiso zvekuyera calibration

Simba Risingazununguki reUnyanzvi Hwekugadzira Zvinhu uye Maitiro Epasi Rose

Chikamu chekupedzisira, chinowanzo furatirwa, chesimba uye kururama ndicho chinhu chinobatanidzwa nekuomerera zvakasimba kune mitemo yepasi rose. Rwendo kubva pachivako chisina kugadzirwa kuenda kunzvimbo ine nanometer-flat reference runotungamirirwa nemaitiro esainzi uye ehunyanzvi.

Vagadziri vanotungamira vanoziva kuti kutevedzera mitemo yakasimba yepasi rose—kusanganisira German DIN (senge DIN 876, DIN 875), American GGGP-463C-78 neASME, Japanese JIS, neBritish BS817—hazvigoneke kutaurirana. Hunyanzvi uhwu hwepasi rose hunovimbisa kuti chinhu chinogadzirwa muAsia chinogona kubatanidzwa mumuchina wakavakirwa kuEurope kana kuyerwa uchishandisa CMM yakaganhurirwa neAmerica.

Maitiro aya anotsigirwa nehunyanzvi hwevanyanzvi vekupedzisa. Hazvisi zvekuwedzeredza kutaura kuti zvikamu zvegranite zvakanatswa zvakanyanya zvichiri kupedzwa nemaoko. Mumaworkshops emapoka akazvipira kunyatsoita zvinhu nemazvo, vagadziri vekukuya vane ruzivo rwemakore anopfuura makumi matatu. Sezvinowanzo tsanangurwa nevatengi, "vanofamba nemazinga emagetsi." Kuziva kwavo kubata kunovabvumira kuyera kubviswa kwezvinhu kuenda kumazinga e-single-micron kana kunyange e-sub-micron nekufamba kamwe chete, kwakajairwa kweguyo - hunyanzvi husina muchina weCNC unogona kutevedzera. Kuzvipira uku kunovimbisa kuti kunyangwe kana kururama kunodiwa kwechigadzirwa kuri 1 μm, mhizha iri kushanda kuti ikwanise kushivirira kazhinji kusvika pachiyero chenanometer.

Uyezve, hunyanzvi uhwu hwekushandisa nemaoko hunosimbiswa nezvivakwa zvepamusoro-soro zvemetrology pasi rose, zvinosanganisira Mahr (kusvika 0.5 μm), Swiss WYLER electronic levels, uye British Reinshaw Laser Interferometers. Chishandiso chega chega chekuongorora chinofanira kuteverwa nemasangano emetrology enyika nepasi rose, zvichigadzira cheni isina kuputsika yesimba rekugadzirisa. Maitiro aya akazara—zvinhu zvepamusoro-soro, zvivakwa zvepamusoro-soro, kutevedzera mitemo yakasiyana-siyana yepasi rose, uye hunyanzvi hwevanhu hwakasimbiswa—ndizvo zvinopedzisira zvasiyanisa vatungamiriri vechokwadi mu granite chaiyo.

Ramangwana Rakagadzikana

Mashandisirwo enheyo idzi dzakasimba zvakanyanya ari kuramba achikura nekukurumidza, achipfuura maCMM echinyakare achienda kuzvikamu zvinokura zvakanyanya: mabhesi eFemtosecond nePicosecond laser systems, mapuratifomu eLinear Motor Stages, mabhesi emidziyo mitsva yekuongorora mabhatiri esimba, uye mabhenji akakosha ekurongedza michina yeperovskite coating.

Indasitiri iyi inotongwa nechokwadi chiri nyore, chakanyatsofungwa nepfungwa dzevatungamiriri vayo: "Bhizinesi rechokwadi harigone kuva rinoda zvakawanda." Mumakwikwi ekutsungirira kwakanaka, kudyidzana kwakavimbika nemutengesi akazvipira kuOpenness, Innovation, Integrity, and Unity—uye anovimbisa kuti Hapana kubiridzira, Hapana kuvanza, Hapana kutsausa—kunova kwakakosha sezvikamu zvacho pachazvo. Kugara kwenguva refu uye simba rezvikamu zvegranite zvakanongedza zvinoratidza kuti dzimwe nguva, mhinduro dzakaoma kwazvo dzinobva pazvinhu zvepakutanga, dzinogadziriswa uye dzinosimbiswa kusvika pamitemo yepamusoro yetsika nehunyanzvi inodiwa nenyika. Kugadzikana kwedombo kunoramba kuri chokwadi chisingazununguki munyika inochinja-chinja yekururama kwakanyanya.


Nguva yekutumira: Zvita-08-2025