Mapuratifomu ekugadzira granite nemazvo, ane kusimba kwakanyanya, kusimba kwakaderera, kugona kwayo kudzikamisa madziro uye hunhu hwechisikigo hwekudzivirira magineti, ane kukosha kusingatsiviwi mukugadzira zvinhu zvepamusoro-soro uye kutsvagisa kwesainzi uko kunyatsojeka uye kugadzikana kunodiwa zvakanyanya. Izvi zvinotevera ndizvo zvinonyanya kukosha pakushandiswa kwayo uye zvakanakira zvehunyanzvi:
I. Munda wezvishandiso zvekugadzirisa zvakanyatsonaka
Midziyo yekugadzira semiconductor
Mamiriro ekushandisa: Tafura yekushanda yemuchina weLithography, hwaro hwemuchina wewafer dicing, chikuva chekuisa michina yekurongedza.
Kukosha kwehunyanzvi:
Chiyero chekuwedzera kwemafuta egranite chete (0.5-1.0) ×10⁻⁶/℃, chinogona kuramba kushanduka-shanduka kwekushisa panguva yekuratidzwa kwemuchina we lithography ne nanoscale (displacement error < 0.1nm munzvimbo ye ±0.1℃).
Chimiro chemukati che micro-pore chinoita kuti damping ive yechisikigo (damping ratio 0.05 kusvika 0.1), ichidzvinyirira vibration (amplitude < 2μm) panguva yekucheka nekukurumidza nemuchina wekucheka uye ichiva nechokwadi chekuti edge roughness Ra yekucheka wafer iri pasi pe1μm.
2. Michina Yekukuya Nekunyatsoshanda uye Michina Yekuyera Yakabatana (CMM)
Nyaya yekushandisa:
Hwaro hwemuchina wekuyera une ma "three-coordinate" hunoshandisa chimiro chegranite chakabatana, chine hurefu hwe ±0.5μm/m. Pamwe chete ne "air-floating guide rail" inoyerera, inoita kuti pave nekufamba kwakarurama (kudzokorora mafambiro e "position accuracy" ±0.1μm).
Tafura yekushanda yemuchina wekukuya we optical inoshandisa chimiro chakabatanidzwa chegranite nesimbi yesirivha. Pakukuya girazi reK9, kusimba kwepamusoro kunenge kuri pasi pe λ/20 (λ=632.8nm), zvichizadzisa zvinodiwa zvema lenzi elaser.
Ii. Munda weOptics nePhotonics
Materesikopu emuchadenga uye masisitimu elaser
Maitiro akajairika:
Nzvimbo inotsigira pamusoro pechiratidzo cheteresikopu hombe yeredhiyo inoshandisa chimiro chegranite honeycomb, icho chakareruka muhuremu hwayo (density 2.7g/cm³) uye ine simba rakasimba rekudzivirira kutenderera kwemhepo (deformation < 50μm pasi pemhepo ine mazinga gumi).
Puratifomu ye optical ye laser interferometer inoshandisa granite ine tumaburi tudiki. Reflector inogadziriswa ne vacuum adsorption, ine flatness error iri pasi pe 5nm, zvichiita kuti kuyedza kwe optical kwakanyatsojeka kwakadai sekuonekwa kwemafungu egravitational.
2. Kugadzirisa zvikamu zvemaziso nemazvo
Zvakanakira zvehunyanzvi:
Kupinda kwemagnetic uye kufambiswa kwemagetsi kwepuratifomu yegranite kuri pedyo ne zero, zvichidzivirira kukanganiswa kweelectromagnetic pamatanho ekuita nemazvo akadai se ion beam polishing (IBF) uye magnetorheological polishing (MRF). PV yekunyatsojeka kwechimiro chepamusoro che lens yeasphical yakagadziriswa inogona kusvika λ/100.
III. Kuongorora Ndege Nekunyatsoongorora
Chikuva chekuongorora zvikamu zvendege
Maitiro ekushandisa: Kuongororwa kwemativi matatu kwemashizha endege, kuyerwa kwechimiro nenzvimbo zvinoshivirira zvikamu zvechimiro chearuminiyamu yendege.
Kushanda kukuru:
Pamusoro pepuratifomu yegranite panogadziriswa ne electrolytic corrosion kuti pave nemapatani matete (ane roughness yeRa 0.4-0.8μm), yakakodzera ma trigger probes akanyatsogadzirwa, uye kukanganisa kwekuona blade profile kushoma pane 5μm.
Inogona kutsungirira mutoro wezvinhu zvendege zvinorema kupfuura 200kg, uye kuchinja kwehurefu hwendege mushure mekushandiswa kwenguva refu kunenge kuri pasi pe2μm/m, zvichizadzisa zvinodiwa zvekuchengetedza zvinhu zveGiredhi 10 muindasitiri yendege.
2. Kugadzirisa zvikamu zvekufamba zvisina simba
Zvinodiwa zvehunyanzvi: Kugadziriswa kwesimba kwezvishandiso zvisina simba zvakaita semagyroscopes nema accelerometers kunoda puratifomu yekutarisa yakasimba kwazvo.
Mhinduro: Puratifomu yegranite inosanganiswa nesystem inoshanda yekuparadzanisa vibration (frequency yechisikigo < 1Hz), zvichiita kuti pave nekuongororwa kwakanyatsojeka kwekugadzikana kwezvikamu zvisina kukanganiswa < 0.01°/h munzvimbo ine vibration acceleration < 1×10⁻⁴g.
Iv. Nanotechnology uye Biomedicine
Puratifomu yekuongorora microscope (SPM)
Basa guru: Sehwaro hweatomic force microscopy (AFM) uye scanning tunneling microscopy (STM), inofanira kubviswa kubva mukutenderera kwezvakatipoteredza uye kupisa.
Zviratidzo zvekushanda:
Puratifomu yegranite, pamwe chete nemakumbo ekudzivirira kutenderera kwemhepo, inogona kuderedza mwero wekupararira kwekudengenyeka kwekunze (1-100Hz) kusvika pasi pe5%, zvichiita kuti AFM ionekwe neatomu munzvimbo yemhepo (resolution < 0.1nm).
Kunzwa kwekupisa kuri pasi pe0.05μm/℃, izvo zvinosangana nezvinodiwa zvekutarisa nanoscale yemasampuli ebhayoloji munzvimbo inodziya (37℃±0.1℃).
2. Midziyo yekurongedza yeBiochip
Nyaya yekushandisa: Nzvimbo yekurongedza zvinhu nemazvo yeDNA sequencing chips inoshandisa granite air-floating guide rails, ine positioning accuracy ye±0.5μm, zvichiita kuti sub-micron bonding pakati pe microfluidic channel ne detection electrode.
V. Mamiriro Ekushandisa Ari Kubuda
Nheyo yemidziyo yekombiyuta yeQuantum
Matambudziko ehunyanzvi: Kugadziriswa kweQubit kunoda tembiricha yakaderera zvikuru (mK level) uye nzvimbo yemakanika yakagadzikana zvakanyanya.
Mhinduro: Hunhu hwekuwedzera kwegranite mukupisa kwakaderera zvakanyanya (kuwedzera kwehuwandu < 1ppm kubva -200℃ kusvika patembiricha yemukamuri) hunogona kuenderana nehunhu hwekukotsira kwemagineti esuperconducting ekupisa kwakaderera zvakanyanya, zvichiita kuti kuve nechokwadi chekuti kurongeka kwakarurama panguva yekurongedza machipisi equantum.
2. Sisitimu yeElectron Beam Lithography (EBL)
Mashandiro makuru: Hunhu hwekudziisa hwepuratifomu yegranite (resistivity > 10¹³Ω · m) hunodzivirira kupararira kwemwaranzi yemagetsi. Pamwe chete ne electrostatic spindle drive, inoita kuti patani ye lithography inyoreke zvakanaka ine upamhi hwemutsara we nanoscale (< 10nm).
Pfupiso
Kushandiswa kwemapuratifomu ekugadzira granite kwakabva pamichina yemazuva ano yekugadzirira kusvika kuminda yepamusoro-soro yakadai se nanotechnology, quantum physics, uye biomedicine. Kukwikwidzana kwayo kukuru kuri mukubatana kwakadzika kwehunhu hwezvinhu uye zvinodiwa zveinjiniya. Mune ramangwana, nekubatanidzwa kwematekinoroji ekusimbisa akabatanidzwa (akadai se graphene-granite nanocomposites) uye matekinoroji ekuona akangwara, mapuratifomu egranite achapinda munzira dzeatomu-level accuracy, full-temperature stability, uye multi-functional integration, zvichiva zvinhu zvikuru zvinotsigira chizvarwa chinotevera chekugadzira zvakanyatsonaka.
Nguva yekutumira: Chivabvu-28-2025