Zvishandiso zvegranite zvinoshandiswa zvakanyanya muindasitiri yesemiconductor nekuda kwehunhu hwavo hwakanaka, hwakadai sekugadzikana kwepamusoro, kuderera kwekuwedzera kwemafuta, uye kushomeka kwepamusoro pakuora.Izvi zvivakwa zvinoita kuti granite ive chinhu chakanakira kuvaka yakakwira-chaiyo zvikamu muwafer kutamisa system.
Mune semiconductor yekugadzira maitiro, iyo wafer yekufambisa sisitimu inoita basa rakakosha mukutakura mawafer mumatanho akasiyana ekugadzira.Kurongeka uye kurongeka ndizvo zvakakosha zvinodiwa kune aya masisitimu sezvo kunyangwe kutsauka kudiki kunogona kukanganisa maitiro ese.Naizvozvo, zvikamu zviri muwafer transfer system zvinofanirwa kugadzirwa kubva kune zvemhando yepamusoro zvinhu, uye granite inosangana neaya maitiro.
Zvimwe zvikamu zvewafer transfer system izvo zvinogadzirwa kubva kune granite zvinhu zvinosanganisira:
1. Vacuum Chuck Tafura
Iyo vacuum chuck tafura inoshandiswa kubata wafer panguva yekuita, uye inofanirwa kunge iine nzvimbo yakagadzikana kuti ive nechokwadi chekuti wafer haina kukuvara.Granite chinhu chakanakira kugadzira tafura iyi nekuti ine nzvimbo yakati sandara, isina porous iyo inopa kugadzikana kwepamusoro uye nemazvo.Pamusoro pezvo, granite ine yakaderera coefficient yekuwedzera kwekupisa, zvichiita kuti irambe ichichinja tembiricha iyo inogona kukonzera shanduko yedimensional muwafer.
2. Air-Bearing Stage
Nhanho yekutakura mhepo inoshandiswa kutakura wafer kuburikidza nematanho akasiyana ekugadzira.Danho racho rakagadzirwa kuti ripe kufamba kusina friction, izvo zvinoda kunyatsojeka uye kugadzikana.Granite inoshandiswa muchishandiso ichi nekuti idombo rakasimba uye rakaomarara, uye rinoramba deformation uye kupfeka nekufamba kwenguva.
3. Linear Motion Guides
Iwo mitsara yekufambisa madhairekitori anoshandiswa kutungamira nhanho inotakura mhepo, uye anofanirwa kuve akamisikidzwa nemazvo kuti aderedze kukanganisa.Granite inoshandiswa kuvaka gwaro iri nekuti ine yakanakisa mechanical kugadzikana uye simba.Izvo zvinhu zvakare zvinodzivirira corrosion, izvo zvinovimbisa hupenyu hurefu hweiyo gwara system.
4. Metrology Equipment
Metrology midziyo inoshandiswa kuyera zviyero uye zvimiro zvewafer panguva yekugadzira maitiro.Granite chinhu chakanakira kuvaka ichi chishandiso nekuti chine kuomarara kwakanyanya, kuderera kwekuwedzera, uye kushoma deformation pasi pemutoro.Zvakare, kugadzikana kwekupisa kwegranite kunovimbisa kuti michina yemetrology inoramba yakagadzikana uye yakarurama nekufamba kwenguva.
Mukupedzisa, iyo semiconductor indasitiri inovimba nemazvo uye nemazvo, uye zvigadzirwa zvegranite zvakaratidza kuve zvakavimbika zvakanyanya uye zvakagadzikana mukugadzira maitiro.Nezvinhu zvakawanda zvakakosha muwafer transfer system inoda kugadzikana kwepamusoro, kunyatsoita, uye kuderera kwekuwedzera kwemafuta, mainjiniya akatendeukira kuzvinhu zvegranite kuti zvizadzise izvi zvakakosha zvinodiwa.
Nguva yekutumira: Mar-19-2024