Linear mota + granite base: Chakavanzika chikuru chechizvarwa chitsva chewafer kutamisa system.

Mune chaiyo ketani yekugadzira semiconductor, iyo wafer yekufambisa sisitimu yakafanana ne "yehupenyu hweiyo chip mutsara wekugadzira", uye kugadzikana kwayo uye kurongeka kwayo kunotarisisa huwandu hwegoho remachipisi. Chizvarwa chitsva chewafer kutamisa masisitimu anoshandura achibatanidza mutsara mota nemabhesi egranite, uye zvakasarudzika zvakanakira zvegranite zvinhu ndizvo chaizvo kodhi yepakati yekuvhura yakakwirira-inoshanda kutapurirana.

.
Granite base: Kuvaka "rock-solid foundation" yekufambisa yakagadzikana
Granite, yave nemazana emamiriyoni emakore ekunatswa kwe geological, inoratidzira yakaonda uye yakafanana yemukati mamineral crystallization. Uhu humiro hwechisikigo hunoita kuti ive yakanakira base zvinhu zvewafer kutamisa masisitimu. Munzvimbo yakaoma ye semiconductor cleanrooms, granite, ine ultra-low coefficient of thermal expansion (chete 5-7 × 10⁻⁶/℃), inogona kuramba kupisa kunogadzirwa panguva yekushanda kwemidziyo uye pesvedzero yekushanduka kwekushisa kwezvakatipoteredza, kuve nechokwadi kugadzikana kwehukuru hwepasi uye kudzivirira nzira yekufambisa kutsauka kunokonzerwa nekutsauka. Yayo yakanakisa vibration damping performance inogona kukurumidza kutora ma mechanic vibrations anogadzirwa panguva yekutanga-up, kudzima uye kukwidziridza mutsara mota, pamwe nekukanganisa kwekunze kunounzwa nekushanda kweimwe michina mumusangano, ichipa chikuva chakagadzika ne "zero shake" yekufambisa kwewafer. .
Zvichakadaro, kugadzikana kwekemikari yegranite kunovimbisa kuti haiparadze kana kuita ngura mumasemiconductor workshops uko acid uye alkali reagents inoputika uye kuchena kwepamusoro kunodiwa, nekudaro kudzivirira kukanganisa kwekutapurirana kwechokwadi nekuda kwekuchembera kwezvinhu kana kusvibisa adsorption. Iyo yakatsetseka uye yakaomesesa hunhu hunogona kunyatso kudzikisa kunamatira kweguruva, kusangana neyakaomarara isina guruva zviyero zvemakamuri akachena uye kubvisa njodzi yekusvibiswa kwewafer kubva pamudzi. .
Iyo "yegoridhe kudyidzana" mhedzisiro yemutsara motors uye granite
Linear motors, ine hunhu hwayo hwekusina mechanical transmission clearance, kukwidziridza uye nekumhanya kwekupindura, endow wafer kutapurirana nezvakanakira "nekukurumidza, kwakaringana uye kugadzikana". Iyo granite base inopa yakasimba uye yakavimbika rutsigiro chikuva chayo. Vaviri vanoshanda pamwechete kuti vawane kusvetuka mukuita. Kana iyo mutsara mota ichityaira mutakuri wewafer kuti amhanye pane granite base track, kusimba kwakasimba uye kugadzikana kwechigadziko kunovimbisa kufambiswa kwakanaka kweiyo mota yekutyaira simba, kudzivirira kurasikirwa kwesimba kana kutapurirana kunokonzerwa ne base deformation. .
Inotungamirwa nekuda kwe nanoscale chaiyo, mutsara mota dzinogona kuwana sub-micron-level displacement control. Iyo yepamusoro-chaiyo yekugadzirisa maitiro emabhesi egranite (aine zvikanganiso zveflatness inodzorwa mukati me ± 1μm) inonyatsoenderana nekutonga chaiko kwemamota anotenderera, pamwe chete kuona kuti kukanganisa kwekumisikidza panguva yekufambisa kwewaferi isingasviki ± 5μm. Kungave kuri kumhanyisa-kumhanya pakati pezvishandiso zvakasiyana-siyana kana kupaka chaiko kweiyo wafer handover, musanganiswa wemamotor mota uye mabhesi egranite anogona kuve nechokwadi che "zero kutsauka uye zero jitter" mukufambiswa kwewafer. .
Indasitiri tsika yekuongorora: Kaviri kunatsiridza mukubudirira uye chiyero chegoho
Mushure mekusimudzira hurongwa hwayo hwekufambisa, bhizimusi repasi rose resemiconductor rakatora mutsara mota + granite base solution, iyo yakawedzera kufambiswa kwewafesi ne40%, yakaderedza kuitika kwekukanganisa kwakadai sekudhumhana uye kukanganisa panguva yekutamisa ne85%, uye yakavandudza huwandu hwese hwegoho hwemachipisi ne6%. Kuseri kweiyo data kune vimbiso yekutsiga kwekutapurirana inopihwa neiyo granite base uye yakakwirira-kumhanya uye chaiyo synergy maitiro eiyo linear mota, iyo inoderedza zvakanyanya kurasikirwa uye kukanganisa muwafer kutapurirana maitiro. .
Kubva pazvivakwa zvezvinhu kusvika pakugadzira kwakaringana, kubva pamabhenefiti ekuita kusvika kune yechokwadi yechokwadi, musanganiswa wemamota ane mutsara uye mabhesi egranite akatsanangura zvakare zviyero zvewafer kutamisa masisitimu. Mune ramangwana apo semiconductor tekinoroji inofambira mberi yakananga ku3nm uye 2nm maitiro, zvigadzirwa zvegranite zvicharamba zvichipinza simba rakasimba mukusimudzira indasitiri nezvakanakira zvisingadzoreki.