Muchikamu chakanyatsogadzirwa che semiconductor, sisitimu yekufambisa mawafer yakafanana ne "nzira yehupenyu yemutsara wekugadzira machipisi", uye kugadzikana kwayo uye kururama kwayo zvinosarudza zvakananga mwero wegoho remachipisi. Chizvarwa chitsva chemasisitimu ekufambisa mawafer chinosanganisa mota dzakatwasuka nematombo egranite, uye zvakanakira zvinhu zvegranite ndizvo chaizvo kodhi huru yekuvhura transmission inoshanda zvakanyanya.
Nheyo yegranite: Kuvaka "nheyo yakasimba sedombo" yekutumira zvinhu zvakagadzikana
Granite, yakapedza mazana emamiriyoni emakore ichigadziriswa geology, ine crystallization yemukati yakakora uye yakafanana. Hunhu uhwu hwechisikigo hunoiita kuti ive chinhu chakakodzera chepasi pemasisitimu ekutamisa wafer. Munzvimbo yakaoma yemakamuri ekushambidzira e semiconductor, granite, ine coefficient yayo yakaderera yekuwedzera kwekupisa (5-7 × 10⁻⁶/℃ chete), inogona kuramba kupisa kunobva panguva yekushanda kwemidziyo uye pesvedzero yekuchinja kwekushisa kwezvakatipoteredza, ichivimbisa kugadzikana kwehukuru hwepasi uye kudzivirira kutsauka kwenzira yekutumira kunokonzerwa nekushanduka kwekupisa. Kushanda kwayo kwakanaka kwe vibration damping kunogona kukurumidza kupinza vibration yemakanika inogadzirwa panguva yekutanga, kudzima uye kukurumidza kwemamota emutsara, pamwe nekukanganiswa kwekunze kunounzwa nekushanda kwezvimwe zvishandiso muworkshop, zvichipa puratifomu yakagadzikana ine "zero shake" yekutumira wafer.
Zvichakadaro, kugadzikana kwemakemikari egranite kunoita kuti isaparare kana kuita ngura mumaworkshop e semiconductor uko ma reagents e acid ne alkali anoshanduka-shanduka uye kuchena kwakanyanya kunodiwa, nokudaro kudzivirira kukanganisa kururama kwekufambiswa kwezvinhu nekuda kwekukwegura kwezvinhu kana kusvibiswa kwemhepo. Hunhu hwakatsetseka uye hwakakora hwepamusoro hunogona kuderedza kunamira kweguruva, zvichisangana nezvinodiwa zvakasimba zvemakamuri akachena uye kubvisa njodzi yekusvibiswa kwewafer kubva mumidzi.
Mhedzisiro ye "golden partnership" yemota dzakatwasuka negranite
Mota dzemagetsi dzakatsetseka, dzine hunhu hwadzo hwekusava nemagetsi ekufambisa, kumhanya kwakanyanya uye kumhanya kwakanyanya, endow wafer transmission ine mabhenefiti ekuti "inokurumidza, yakarurama uye yakagadzikana". Gwaro regranite rinopa rutsigiro rwakasimba uye rwakavimbika. Dzose dzinoshanda pamwe chete kuti dziite shanduko huru. Kana mota yemagetsi yakatsetseka ichifambisa wafer carrier kuti imhanye pagwara regranite base, kuomarara kwakasimba uye kugadzikana kwechigadziko kunovimbisa kufambiswa kwakanaka kwesimba rekufambisa mota, kudzivirira kurasikirwa nesimba kana kunonoka kwekutumira kunokonzerwa nekushanduka kwechigadziko.
Zvichitungamirirwa nekuda kwe nanoscale chaiyo, linear motors dzinogona kuwana sub-micron-level displacement control. Hunhu hwepamusoro-soro hwekugadzirisa ma granite bases (ane zvikanganiso zvekupfava zvinodzorwa mukati me ±1μm) hunoenderana zvakakwana nekudzora kwakarurama kwema linear motors, pamwe chete zvichiita kuti kukanganisa kwekuisa panguva ye wafer transmission kushoma pane ±5μm. Ingave shuttling inokurumidza pakati pemichina yakasiyana-siyana yekugadzira kana yokupaka chaiyo yekupa wafer, kusanganiswa kwema linear motors nema granite bases kunogona kuve nechokwadi chekuti "zero deviation uye zero jitter" mu wafer transmission.
Kuongororwa kwemaitiro eindasitiri: Kuvandudzwa kaviri mukushanda zvakanaka uye mwero wegoho
Mushure mekuvandudza sisitimu yayo yekutumira wafer, kambani inotungamira yepasi rose yesemiconductor yakashandisa linear motor + granite base solution, iyo yakawedzera kushanda zvakanaka kwewafer transfer ne40%, yakaderedza mwero wekuitika kwezvikanganiso zvakaita sekunge kugongana uye kukanganiswa panguva yekutumira ne85%, uye yakavandudza mwero wegoho remachipisi ne6%. Kuseri kwedata ndiko kune vimbiso yekugadzikana kwekutumira kunopihwa negranite base uye kushanda nekukurumidza uye kwakaringana kwemota yelinear, izvo zvinoderedza zvakanyanya kurasikirwa nekukanganisa mukuita kwekutumira wafer.
Kubva pahunhu hwezvinhu kusvika pakugadzirwa kwakanyatsojeka, kubva pakubatsira kwekushanda kusvika pakusimbisa mashandiro, kusanganiswa kwemamota ane ma linear nema granite bases kwakachinja mwero wemasisitimu ekutamisa ma wafer. Mune ramangwana kana tekinoroji ye semiconductor ikafambira mberi ku3nm ne2nm, zvinhu zve granite zvicharamba zvichikurudzira kukura kweindasitiri nezvakanaka zvadzo zvisingatsivike.
Nguva yekutumira: Chivabvu-14-2025