Yakayera kugadzikana kwekupisa kwemapuratifomu egranite mune semiconductor metering michina.

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Mumunda wekugadzira semiconductor, kunyatsoita ndiyo nzira yehupenyu yemhando yechigadzirwa uye kuita. Semiconductor metering midziyo, sechinhu chakakosha chinongedzo kuti ive nechokwadi chekugadzirwa, inoisa zvinenge zvakaomarara zvinodiwa pakugadzikana kwezvikamu zvayo zvakakosha. Pakati pavo, iyo granite chikuva, ine yakanakisa kugadzikana kwekupisa, inoita basa rinokosha mu semiconductor metering michina. Ichi chinyorwa chichaita ongororo yakadzama yekushanda kwekudziya kwekugadzikana kwemapuratifomu egranite mune semiconductor metering michina kuburikidza neiyo data yekuyedza. .
Izvo zvakanyanya zvinodikanwa zvekugadzikana kwekupisa kwekuyeresa michina mukugadzira semiconductor
Iyo semiconductor yekugadzira maitiro yakanyanya kuomarara uye yakanyatsojeka, uye hupamhi hwemitsara yedunhu pane chip yakapinda nanometer level. Mukuita kwakadai kwepamusoro-chaizvo kugadzira, kunyangwe kudiki kudiki kushanduka kwetembiricha kunogona kukonzera kuwedzera kwekupisa uye kuderera kwemidziyo yemidziyo, zvichikonzera kukanganisa kuyerwa. Semuyenzaniso, muchirongwa chephotolithography, kana kuyerwa kwechiyereso chemichina kuchitsauka ne 1 nanometer, zvinogona kukonzera matambudziko akakura senge mapfupi maseketi kana maseketi akavhurika mumaseketi ari pachip, zvichiita kuti chip chikwekwe. Zvinoenderana neindasitiri data statistics, kune yega yega 1 ℃ kushanduka kwekushisa, iyo yechinyakare simbi zvinhu metering midziyo chikuva inogona kuita shanduko dzema nanometer akati wandei. Nekudaro, kugadzira semiconductor kunoda kuyerwa kwechiyero kudzorwa mukati me ± 0.1 nanometers, izvo zvinoita kuti kugadzikana kwekupisa kuve chinhu chakakosha pakuona kana michina yemamita inogona kusangana nezvinodiwa zvekugadzira semiconductor. .

Theoretical zvakanakira kugadzikana kwekudziya kwegranite mapuratifomu
Granite, semhando yedombo rechisikigo, ine compact yemukati mineral crystallization, dense uye yunifomu chimiro, uye ine yakasarudzika mukana wekudzikama kwekupisa. Nezve coefficient yekuwedzera kwekupisa, iyo coefficient yekupisa kwekuwedzera kwegranite yakaderera zvakanyanya, kazhinji kubva pa4.5 kusvika 6.5×10⁻⁶/K. Kusiyana neizvi, iyo coefficient yekuwedzera kwekupisa kwezvinhu zvakajairwa esimbi senge aruminiyamu alloys yakakwira se23.8×10⁻⁶/K, iyo yakawanda kanoverengeka iyo yegranite. Izvi zvinoreva kuti pasi pemamiriro akafanana ekusiyana kwekushisa, shanduko yedimensional yepuratifomu yegranite idiki zvakanyanya pane iyo yeplatform yesimbi, iyo inogona kupa yakagadzika kuyerwa kwereferensi kune semiconductor metering michina. .
Uye zvakare, chimiro chekristaro chegranite chinochiisa nekufanana kwakaringana kwekupisa conduction. Kana iko kushanda kwemidziyo kuchigadzira kupisa kana kushanduka kwekushisa kwemukati, chikuva chegranite chinogona kukurumidza uye zvakaenzana kubvisa kupisa, kudzivirira kupisa kwenzvimbo kana kuwandisa kwezviitiko, nekudaro kuchengetedza kuenderana kwekushisa kwepuratifomu uye kuwedzera kugadzikana kwekuyera kwechokwadi. .
Nzira uye nzira yekuyera kugadzikana kwekupisa
Kuti tinyatsoongorora kugadzikana kwekupisa kwepuratifomu yegranite mune semiconductor metering michina, takagadzira chirongwa chekuyera chakaomarara. Sarudza yakakwira-chaiyo semiconductor wafer yekuyeresa chiridzwa, icho chine super-chaiyo yakagadziriswa granite chikuva. Munzvimbo yekuyedza, tembiricha yakajairwa kusiyanisa mumusangano wekugadzira semiconductor yakateedzerwa, kureva, zvishoma nezvishoma kupisa kubva pa20 ℃ kusvika 35 ℃ uyezve kutonhora kudzokera ku20 ℃. Zvose izvi zvakatora maawa masere. .
Papuratifomu yegranite yechiridzwa chekuyeresa, yakakwira-chaiyo yakajairwa silicon wafers inoiswa, uye ma sensors ekutamisa ane nanoscale accuracy anoshandiswa kutarisa shanduko yechinzvimbo pakati pesilicon wafers nepuratifomu munguva chaiyo. Zvichakadaro, akawanda epamusoro-chaiyo tembiricha sensors akarongwa munzvimbo dzakasiyana pachikuva kuti atarise kugoverwa kwetembiricha pachikuva. Munguva yekuyedza, iyo data yekutamisa uye tembiricha data yakanyorwa yega maminetsi gumi nemashanu kuti ive nechokwadi chekuzara uye chokwadi che data. .
Yakayerwa data uye kuongororwa kwemhedzisiro
Ukama huri pakati pekuchinja kwekushisa uye saizi yepuratifomu inoshanduka
Data yekuedza inoratidza kuti kana tembiricha yakwira kubva pa20 ℃ kusvika 35 ℃, shanduko yemutsara wesaizi yepuratifomu yegranite idiki zvakanyanya. Mushure mekuverenga, mukati mese kupisa maitiro, iyo yakanyanya mutsara yekuwedzera yepuratifomu inongori 0.3 nanometers, iyo yakadzikira zvakanyanya kupfuura kukanganisa kushivirira renji yekuyera kurongeka mune semiconductor kugadzira maitiro. Munguva yekutonhora nhanho, saizi yepuratifomu inogona kunge yakanyatso dzokera kune yekutanga mamiriro, uye iyo lag chiitiko chekuchinja saizi inogona kufuratirwa. Hunhu uhu hwekuchengetedza shanduko yakaderera zvakanyanya kunyangwe pasi pekushanduka kwetembiricha yakakosha inosimbisa zvizere kugadzikana kwekupisa kwepuratifomu yegranite. .
Kuongororwa kwekufanana kwekushisa pachikuva
Iyo data yakaunganidzwa ne sensor tembiricha inoratidza kuti panguva yekushanda kwemidziyo uye maitiro ekuchinja kwekushisa, kugovera tembiricha pamusoro pepuratifomu yegranite yakanyanya kufanana. Kunyangwe panguva yechikuva kana tembiricha ichichinja zvakanyanya, mutsauko wekushisa pakati peyero imwe neimwe yekuyera papuratifomu unogara uchidzorwa mukati me ± 0.1 ℃. Uniform tembiricha kugovera zvinobudirira kudzivirira papuratifomu deformation inokonzerwa nekusaenzana kwekupisa kwekushushikana, kuve nechokwadi kuti flatness uye kugadzikana kweyero yekuyera nzvimbo, uye nekupa yakavimbika yekuyera nharaunda yesemiconductor metrology michina. .
Kuenzaniswa nemapuratifomu echinyakare
Iyo data yakayerwa yepuratifomu yegranite yakaenzaniswa neyeiyo semiconductor metering michina yemhando imwechete uchishandisa aruminiyamu alloy chikuva, uye misiyano yaive yakakosha. Pasi pemamiriro akafanana ekuchinja kwetembiricha, mutsara wekuwedzera wearuminiyamu alloy chikuva chakakwira kusvika 2.5 nanometers, inodarika kasere yepuratifomu yegraniti. Zvichakadaro, kugovera tembiricha pamusoro pearuminiyamu alloy papuratifomu haina kuenzana, neyakasiyana tembiricha musiyano inosvika 0.8 ℃, zvichikonzera kushanduka kuri pachena kwepuratifomu uye kukanganisa zvakanyanya kuyerwa kwechiyero. .
Munyika chaiyo yemidziyo yesemiconductor metrology, mapuratifomu egranite, ane kugadzikana kwawo kwemafuta, ave musimboti mukuona kuyerwa kwechokwadi. Iyo data yakayerwa inonyatso ratidza kushanda kwakaringana kwepuratifomu yegranite mukupindura shanduko yetembiricha, ichipa yakavimbika tekinoroji rutsigiro kune semiconductor yekugadzira indasitiri. Sezvo maitiro ekugadzira semiconductor achifambira mberi akananga kumusoro chaiko, iyo yekudziya kugadzikana mukana wemapuratifomu egranite inozowedzera kuve yakakurumbira, ichienderera mberi ichityaira hunyanzvi hwekuvandudza tekinoroji uye kusimudzira muindasitiri.