Mubasa rekugadzira semiconductor, kunyatsojeka ndiyo nzira huru yemhando yezvigadzirwa uye mashandiro azvo. Midziyo yekuyera semiconductor, senzira huru yekuona kuti kugadzirwa kwacho kwakarurama, inoisa zvinodiwa zvakanyanya pakugadzikana kwezvikamu zvayo zvikuru. Pakati pazvo, granite platform, ine kugadzikana kwayo kwakanyanya kwekupisa, inoita basa rinokosha mumidziyo yekuyera semiconductor. Chinyorwa chino chichaongorora zvakadzama mashandiro ekugadzikana kwekupisa kwemapuratifomu egranite mumidziyo yekuyera semiconductor kuburikidza nedata rekuyedza chairo.
Zvinodiwa zvakasimba zvekugadzikana kwekupisa kwemidziyo yekuyera mukugadzirwa kwesemiconductor
Maitiro ekugadzira ma semiconductor akaomarara uye akanyatsojeka, uye upamhi hwemitsara yedunhu pa chip hwapinda padanho re nanometer. Mukuita kwakadai kwekugadzira kwakanyatsojeka, kunyangwe shanduko diki yekushisa inogona kukonzera kuwedzera kwekupisa uye kudzikira kwezvikamu zvemidziyo, zvichikonzera zvikanganiso zvekuyera. Semuenzaniso, mukuita kwe photolithography, kana kururama kwekuyera kwemidziyo yekuyera kukasiyana ne nanometer imwe chete, zvinogona kukonzera matambudziko akakomba akadai sema short circuits kana ma open circuits mumatunhu ari pa chip, zvichikonzera kubviswa kwe chip. Zvinoenderana nehuwandu hwe data reindasitiri, pakuchinja kwega kwega kwe 1℃ mukupisa, puratifomu yemidziyo yekuyera yesimbi yechinyakare inogona kuchinja mativi e nanometers akati wandei. Nekudaro, kugadzirwa kwe semiconductor kunoda kuti kunyatsoyera kudzorwe mukati me ±0.1 nanometers, izvo zvinoita kuti kugadzikana kwekupisa kuve chinhu chakakosha pakuona kana michina yekuyera ichikwanisa kusangana nezvinodiwa zvekugadzira semiconductor.
Zvakanakira zvedzidziso zvekugadzikana kwekupisa kwemapuratifomu egranite
Granite, sedombo rechisikigo, ine crystallization yemukati mesimbi, chimiro chakasimba uye chakafanana, uye ine mukana wechisikigo wekugadzikana kwekupisa. Kana tichitaura nezvekuwedzera kwekupisa, chiyero chekuwedzera kwekupisa kwegranite chakaderera zvikuru, kazhinji chinotangira pa4.5 kusvika 6.5×10⁻⁶/K. Kusiyana neizvi, chiyero chekuwedzera kwekupisa kwezvinhu zvesimbi zvakaita sealuminium alloys chakakwira kusvika pa23.8×10⁻⁶/K, inova yakapetwa kakawanda kupfuura granite. Izvi zvinoreva kuti pasi pemamiriro akafanana ekuchinja kwekushisa, shanduko yepuratifomu yegranite idiki zvikuru pane yepuratifomu yesimbi, iyo inogona kupa chiyero chakasimba chemidziyo ye semiconductor metering.
Pamusoro pezvo, chimiro chegirazi chegranite chinoita kuti ikwanise kupinza kupisa zvakanaka. Kana mashandiro emuchina achigadzira kupisa kana tembiricha yekunze ikachinja, chikuva chegranite chinogona kukurumidza uye zvakaenzana kubvisa kupisa, kudzivirira kupisa kwakanyanya kana kutonhorera zvakanyanya, nokudaro zvichichengetedza kugadzikana kwetembiricha yese yepuratifomu uye zvichiwedzera kuve nechokwadi chekugadzikana kwekuyera.
Maitiro uye nzira yekuyera kugadzikana kwekupisa
Kuti tinyatsoongorora kugadzikana kwekupisa kwepuratifomu yegranite mumidziyo yekuyera yesemiconductor, takagadzira hurongwa hwekuyera hwakasimba. Sarudza chishandiso chekuyera wafer che semiconductor chakanyatsogadzirwa, chine puratifomu yegranite yakanyatsogadzirwa. Munzvimbo yekuedza, shanduko yekupisa yakajairika muworkshop yekugadzira semiconductor yakaedzwa, kureva kuti, kudziyisa zvishoma nezvishoma kubva pa20℃ kusvika 35℃ uye kutonhora kudzokera ku20℃. Maitiro ese akatora maawa masere.
Papuratifomu yegranite yechishandiso chekuyera, mawafer esilicon akajairika anoiswa, uye ma sensor ekuchinja ane nanoscale akarurama anoshandiswa kutarisa shanduko dzenzvimbo pakati pemawafer esilicon nepuratifomu panguva chaiyo. Panguva iyi, ma sensor akawanda ekupisa akanyatsojeka akarongwa munzvimbo dzakasiyana papuratifomu kuti atarise kugoverwa kwetembiricha pamusoro pepuratifomu. Munguva yekuedza, data rekuchinja uye data retembiricha rakarekodhwa maminetsi gumi nemashanu ega ega kuti ive nechokwadi chekuti data rakakwana uye rakarurama.
Data rakayerwa uye ongororo yemhedzisiro
Hukama huripo pakati pekuchinja kwekushisa nekuchinja kwehukuru hwepuratifomu
Data rekuyedza rinoratidza kuti kana tembiricha yakwira kubva pa20℃ kusvika pa35℃, shanduko muhukuru hwe granite platform idiki kwazvo. Mushure mekuverenga, mukati memaitiro ese ekupisa, kuwedzera kwakanyanya kwepuratifomu kunongova 0.3 nanometers, izvo zvakaderera zvakanyanya pane error tolerance range yekururama kwekuyera mumaitiro ekugadzira semiconductor. Munguva yekutonhora, saizi yepuratifomu inogona kudzokera zvachose kumamiriro ekutanga, uye chiitiko chekunonoka chekuchinja kwehukuru chinogona kufuratirwa. Hunhu uhwu hwekuchengetedza shanduko dzakaderera zvakanyanya kunyangwe pasi pekuchinja kukuru kwekushisa hunoratidza zvizere kugadzikana kwakanyanya kwekupisa kwepuratifomu ye granite.
Kuongororwa kwekufanana kwekupisa pamusoro pepuratifomu
Data rakaunganidzwa ne sensor yekupisa rinoratidza kuti panguva yekushanda kwemidziyo uye maitiro ekuchinja kwekushisa, kugoverwa kwekushisa pamusoro pe granite platform kwakafanana zvikuru. Kunyangwe panguva yedanho apo tembiricha inochinja zvakanyanya, musiyano wetembiricha pakati penzvimbo yega yega yekuyera pamusoro pepuratifomu unogara uchidzorwa mukati me ±0.1℃. Kugoverwa kwetembiricha kwakafanana kunodzivirira kushanduka kwepuratifomu kunokonzerwa nekushushikana kwekupisa kusina kuenzana, zvichiita kuti nzvimbo yekuyera ive yakatsetseka uye yakagadzikana, uye inopa nzvimbo yekuyera yakavimbika yemidziyo ye semiconductor metrology.
Zvichienzaniswa nemapuratifomu echinyakare ezvinhu
Data rakayerwa repuratifomu yegranite rakaenzaniswa neremidziyo yekuyera semiconductor yemhando imwe chete ichishandisa puratifomu yealuminium alloy, uye musiyano wacho waive wakakosha. Pasi pemamiriro akafanana ekuchinja kwetembiricha, kuwedzera kwakarongeka kwepuratifomu yealuminium alloy kwakakwira kusvika 2.5 nanometers, inova inopetwa kasere pane puratifomu yegranite. Panguva iyi, kugoverwa kwetembiricha pamusoro pepuratifomu yealuminium alloy hakuna kuenzana, musiyano wetembiricha wepamusoro uchisvika 0.8℃, zvichikonzera kushanduka kuri pachena kwepuratifomu uye zvichikanganisa zvakanyanya kururama kwekuyera.
Munyika chaiyo yemidziyo ye metrology ye semiconductor, mapuratifomu e granite, ane kugadzikana kwawo kwakanyanya kwekupisa, ave chinhu chikuru mukuona kuti kuyera kwakarurama. Data rakayerwa rinoratidza zvakasimba kushanda kwakanaka kwepuratifomu ye granite mukupindura kuchinja kwekupisa, zvichipa rutsigiro rwehunyanzvi rwakavimbika kuindasitiri yekugadzira semiconductor. Sezvo maitiro ekugadzira semiconductor achifambira mberi kusvika pakunyatsojeka, mukana wekupisa wekugadzikana kwemapuratifomu e granite uchawedzera kuzivikanwa, zvichiramba zvichitungamira hunyanzvi hwetekinoroji nekukura muindasitiri.
Nguva yekutumira: Chivabvu-13-2025