Precision hydrostatic air inoyangarara papuratifomu: Granite base yakakandwa ine zvinoshamisa nemazvo.

Pamberi pekugadzira nemazvo uye tsvakiridzo yesainzi, mutsara wega wega wekukanganisa unogona kuve "nzira" inodzivirira kubuda. Semidziyo yakakosha yekuwana yakakwira chaiyo inofamba kutonga, kuita kweiyo chaiyo static pressure air inoyangarara inofamba papuratifomu ine chekuita nemhando uye kubudirira kwemhedzisiro. Pakati pezvinhu zvakawanda zvinopesvedzera, chigadziko chegranite, chine hunhu hwayo husingaenzaniswi, chave chinhu chakakosha chekuvimbisa kuita kwakanakisa kwepuratifomu.
Granite, mushure memamiriyoni emakore ekuchinja kwe geological kushatirwa, chimiro chemukati chakaomeswa uye chakafanana, kunyanya nequartz, feldspar uye mamwe mamineral akabatana zvakanyanya. Ichi chakasarudzika chimiro chakasarudzika chinopa iyo granite base nhevedzano yezvakatanhamara zvivakwa.

Kunyanya kugadzikana, kuparadzaniswa nekuvhiringidza kunze
Vibration munharaunda yekunze muvengi wekurongeka kwechokwadi static pressure air inoyangarara chikuva. Kudengenyeka kunoitwa nekushanda kwemichina mikuru uye midziyo mufekitari uriri uye traffic yakatenderedza inogona kuendeswa kupuratifomu inofamba kuburikidza nepasi. Zvisinei, chigadziko chegranite chakafanana ne "shongwe inodzivirira kudengenyeka kwenyika" yakasimba. Yayo yakaoma sekristaro dhizaini inogona kunyatso kuvharira uye kudzikisira kuzunguzika, uye kuburikidza neanoshanda bvunzo, iyo vibration amplitude inotumirwa kuchikuva inogona kuderedzwa neinopfuura 80%. Mumusangano wekugadzira semiconductor chip, iyo photolithography inoda kurongeka kwenzvimbo kuti isvike padanho re nanometer, uye iyo chaiyo static pressure air floating movement platform inotsigirwa negranite base inogona kuve nechokwadi chekushanda kwakadzikama kweiyo chip lithography midziyo munzvimbo yakaoma yevibration, kuzadzisa nemazvo kunyora kwemaitiro edunhu, uye kugadzirisa zvakanyanya goho.
Kugadzikana kwakanaka kwekushisa, kusatya kuchinja kwekushisa
Kuchinja kwematembiricha kuchaita kuti zvinhu zvakawanda zviwedzere uye zvidiki, izvo zvinokanganisa kurongeka kwemidziyo. Nekudaro, chigadziko chegranite chinoratidza kugadzikana kwekupisa kwekupisa, uye coefficient yekuwedzera kwekupisa kwakadzikira, kazhinji pa5-7 × 10⁻⁶/℃. Mundima yekuongorora nyeredzi, iyo chaiyo static yekumanikidza mhepo inoyangarara yekufamba chikuva inoshandiswa kugadzirisa zvakanaka lens hombe dzeteresikopu, ine granite base, kunyangwe pakatarisana nekushanduka kukuru kwekusiyana kwetembiricha pakati pemasikati neusiku, inogona kuve nechokwadi chekuti kurongeka kwema lens kunochengetedzwa pamwero we-sub-micron, zvichibatsira vanoongorora zvemuchadenga kuti vatarise zviri pachena machinjiro emudenga akadzama.
High kuoma uye kupfeka kuramba kuti ave nechokwadi kushandiswa kwenguva refu
Mukufamba kwenguva kweiyo chaiyo static kumanikidza mweya inoyangarara chikuva, kunyangwe paine mhepo inoyangarara tsigiro pakati pepuratifomu nechigadziko, pachine imwe nhanho yekukwesha. Granite kuomarara kwakakwira, kuomarara kweMohs kunogona kusvika 6-7, neakanakisa kupfeka kuramba. Murabhoritari yesainzi yemidziyo, iyo inogara ichishandiswa chaiyo static kumanikidza mhepo inoyangarara kufamba chikuva, hwaro hwayo hwegranite hunogona kurwisa kurasikirwa kwekupokana kwenguva refu, zvichienzaniswa neyakajairwa base, inogona kuwedzera kutenderera kwepuratifomu neinopfuura makumi mashanu muzana, kuderedza mitengo yekugadzirisa michina, uye kuve nechokwadi kuenderera kwebasa resainzi rekutsvagisa.
Sarudzo yegranite base yechaiyo static pressure air inoyangarara inofamba chikuva ndiyo yekupedzisira kutsvaga kwekurongeka, kugadzikana uye kusimba. Muminda yekugadzira semiconductor, optical instrument kugadzira, aerospace, tsvakiridzo yesainzi uye kuyedzwa, izvo zvinoda kunyatsoita chokwadi, iyo chaiyo static kumanikidza mhepo inoyangarara yekufambisa chikuva inotsigirwa negirenati iri kuita basa rakakosha risingadzokerike, kusimudzira kusimukira kwemaindasitiri akasiyana siyana kune yakakwira chaiyo.