Munzvimbo yekugadzira zvinhu nemazvo uye tsvakurudzo yesainzi, kudiwa kwekutonga kufamba nemazvo kuri kuwedzera zuva nezuva. Semichina yakakosha yekuwana kufamba nemazvo, kushanda kwemodule inoyerera mhepo ine axis imwe chete kunokanganisa zvakananga kunaka kwechigadzirwa chekupedzisira uye kururama kwemhedzisiro yekutsvagisa kwesainzi. Pakati pezvinhu zvakawanda zvinopesvedzera, kushandiswa kwechigadziko chegranite kunopa mukana usingaenzaniswi uye kunova chinhu chikuru chekuona kururama kwakanaka.
Granite, mushure memamiriyoni emakore ekuchinja kwejeologi, chimiro chemukati chakanyanya kuomarara uye chakafanana. Inonyanya kuumbwa ne quartz, feldspar nezvimwe zvicherwa, chimiro ichi chakasiyana chinoita kuti granite ive nehunhu hwakanaka hwemuviri. Kana ikashandiswa sehwaro hwe single axis air float ultra-precision motion module, granite inotanga kuratidza kugadzikana kwakanyanya. Kana ichienzaniswa ne common metal material bases, granite bases dzinoratidza simba rekudzivirira deformation kana paine kusawirirana kwekunze, senge tembiricha uye mechanical vibration. Mukugadzirwa kwema chip emagetsi, kunyatsorongeka kwe chip lithography kunodiwa kuti isvike padanho re nanometer. Muchitoro chekugadzira, vibration inokonzereswa nekushanda kwemidziyo mikuru uye shanduko diki mukupisa kwemhepo zvinogona kukanganisa kunyatsorongeka kwekufamba kwemidziyo ye lithography. Single axis air floating ultra-precision motion module ine granite base inogona kuderedza vibration yekunze uye kuderedza vibration amplitude inotumirwa ku motion module neinopfuura 80%. Panguva imwe chete, kuwedzera kwayo kwakanyanya kwekupisa kunoita kuti saizi yechigadziko isashanduke zvakanyanya kana tembiricha ikachinja, zvichiita kuti module yekufamba inoyangarara yemhepo irambe ichikwanisa kuchengetedza kufamba kwakasimba munzvimbo yakaoma, zvichipa hwaro hwakakodzera hwekuisa chip lithography, uye zvichivandudza zvikuru goho rekugadzira chip.

Pamusoro pezvo, granite ine simba rakanaka rekuramba kupfekwa. Mukufamba kwe ultra-precision single-axis air float module, kunyangwe paine gas film inotsigira pakati pe air float slider ne base, kushandiswa kwenguva refu kuchaita kuti pave nekukakavadzana kwakati. Granite base, ine hunhu hwayo hwekuomarara, inogona kuramba kupfekwa kunokonzerwa nekukakavadzana uku uye kuwedzera hupenyu hwebasa re module yekufamba. Murabhoritari yekutsvagisa kwesainzi yemayunivhesiti, michina yekuedza inoshandiswa pakuona micro particle inoda ultra-precision motion module ye uniaxial air flotation kuti ishande zvakanaka kwenguva yakareba kuti iwane data rakawanda rekuyedza rakarurama. Kuramba kupfekwa kwakanyanya kwe granite base kunoita kuti kururama kwe motion module kurambe kuchikwanisa kuchengetedzwa padanho rekutanga re high precision mushure menguva yakareba yekushandiswa, zvichipa vimbiso yakavimbika yekuenderera mberi uye kururama kwebasa rekutsvagisa kwesainzi, uye kubatsira vaongorori kuongorora zvakadzama chakavanzika chenyika ye microscopic.
Module imwe chete yekufamba nemhepo inoyangarara ine granite base yakafanana ne "navigator" chaiyo yekugadzira nemazvo uye kutsvagisa kwesainzi. Granite base ine kugadzikana kwayo kwakanaka, kuramba kupfeka, yekufamba nemazvo kwemodule yekufamba nemhepo inopa rutsigiro rwakasimba, mukugadzira semiconductor, kugadzira zvishandiso zve optical, kutsvagisa kwesainzi kwepamusoro-soro nezvimwe zvinodiwa zvehunyanzvi mumunda, inoita basa rakakosha risingatsiviwi, ichisimudzira indasitiri kusvika pakunyatsojeka, uye kutungamirirwa kwemhando yepamusoro.
Nguva yekutumira: Kubvumbi-07-2025
