1. Kururama kwehukuru
Kufara: kufara kwepamusoro pechigadziko kunofanira kusvika padanho repamusoro, uye kukanganisa kwekufara hakufanirwe kudarika ±0.5μm munzvimbo ipi neipi ye100mm×100mm; Kune base plane yese, kukanganisa kwekufara kunodzorwa mukati me ±1μm. Izvi zvinoita kuti zvikamu zvakakosha zvemidziyo ye semiconductor, zvakaita se exposure head ye lithography equipment ne probe table ye chip detection equipment, zvigone kuiswa zvakanaka uye kushandiswa pa high-precision plane, kuve nechokwadi chekuti optical path uye circuit connection yemidziyo yacho yakarurama, uye kudzivirira displacement yezvikamu zvinokonzerwa ne evenly plane ye base, izvo zvinokanganisa kugadzirwa kwe semiconductor chips uye detection accuracy.
Kutwasuka: Kutwasuka kwemucheto wega wega wechigadziko kwakakosha. Pakureba, kukanganisa kwekutwasuka hakufanirwe kudarika ±1μm pa 1m; Kutwasuka kwekutasuka kwetafura kunodzorwa mukati me ±1.5μm. Semuenzaniso, tichitora muchina we lithography wakanyatsogadzirwa, tafura painofamba negwara rekutungamira rechigadziko, kutwasuka kwemucheto wechigadziko kunokanganisa zvakananga kutwasuka kwetafura. Kana kutwasuka kusiri kwakajairika, pateni ye lithography ichakanganiswa uye ichakanganisika, zvichikonzera kudzikira kwegoho rekugadzira chip.
Kuenzana: Kukanganisa kwekuenzana kwepamusoro nepazasi pechigadziko kunofanirwa kudzorwa mukati me ±1μm. Kuenzana kwakanaka kunogona kuve nechokwadi chekuti pakati pesimba regiravhiti pakaiswa michina, uye simba rechikamu chimwe nechimwe rakafanana. Mumidziyo yekugadzira mawafer e semiconductor, kana pamusoro nepazasi pechigadziko zvisina kufanana, wafer ichatsveyama panguva yekugadzirisa, zvichikanganisa kufanana kwemaitiro akadai sekuchekerera nekupenda, uye zvichikanganisa kuenderana kwekushanda kwemachip.
Chechipiri, hunhu hwezvinhu
Kuomarara: Kuomarara kwegranite base hardware kunofanira kusvika paShore hardness HS70 kana kupfuura. Kuomarara kwakanyanya kunogona kudzivirira kusakara kunokonzerwa nekufamba-famba kakawanda uye kukweshana kwezvikamu panguva yekushanda kwemidziyo, zvichiita kuti base irambe yakasimba mushure mekushandiswa kwenguva refu. Mumidziyo yekurongedza chip, ruoko rwerobhoti runowanzo tora chip uye kuisa pabase, uye kuomarara kwakanyanya kwebase kunogona kuve nechokwadi chekuti pamusoro payo hapasi nyore kuburitsa mavanga uye kuchengetedza kururama kwekufamba kweruoko rwerobhoti.
Kuwanda kwezvinhu: Kuwanda kwezvinhu kunofanira kunge kuri pakati pe2.6-3.1 g/cm³. Kuwanda kwakakodzera kunoita kuti hwaro huve nekugadzikana kwakanaka, izvo zvinogona kuve nechokwadi chekuti michina yacho yakasimba zvakakwana, uye hazvizokonzere matambudziko pakuiswa nekutakurwa kwemidziyo nekuda kwehuremu hwakawandisa. Mumidziyo mikuru yekuongorora semiconductor, kusimba kwehwaro hwakasimba kunobatsira kuderedza kufambiswa kwemhepo panguva yekushanda kwemidziyo uye kuvandudza kunyatsoonekwa kwayo.
Kugadzikana kwekupisa: chiyero chekuwedzera chakaenzana chiri pasi pe5×10⁻⁶/℃. Midziyo ye semiconductor inonzwa zvakanyanya kana tembiricha ichichinja, uye kugadzikana kwekupisa kwechigadziko kwakabatana zvakananga nekurongeka kwemuchina. Munguva yekugadzirwa kwe lithography, kushanduka kwekushisa kunogona kukonzera kuwedzera kana kudzikira kwechigadziko, zvichikonzera kutsauka muhukuru hwepatani yekuratidzwa. Chikamu chegranite chine chiyero chekuwedzera chakaderera chinogona kudzora shanduko yehukuru munzvimbo diki kwazvo kana tembiricha yekushanda yemuchina ichichinja (kazhinji 20-30 ° C) kuve nechokwadi chekuti lithography yakarurama.
Chechitatu, mhando yepamusoro
Kuomarara: Kuomarara kwepamusoro Kukosha kweRa pachigadziko hakupfuuri 0.05μm. Nzvimbo yakapfava zvikuru inogona kuderedza kunyungudika kweguruva netsvina uye kuderedza kukanganisa kuchena kwenzvimbo yekugadzira machipisi e semiconductor. Munzvimbo yekugadzira machipisi isina guruva, zvidimbu zvidiki zvinogona kukonzera zvikanganiso zvakaita se short circuit yechipisi, uye nzvimbo yakapfava yechigadziko inobatsira kuchengetedza nharaunda yakachena yeworkshop uye kuvandudza goho remachipisi.
Zvikanganiso zve microscopic: Pamusoro pechigadziko hazvibvumirwi kuva nematombo anooneka, maburi ejecha, maburi nezvimwe zvikanganiso. Pachiyero chidiki, huwandu hwezvikanganiso zvine dhayamita inodarika 1μm pa square centimeter hahufanirwe kudarika 3 ne electron microscopy. Zvikanganiso izvi zvinokanganisa simba rechimiro uye kutsetseka kwenzvimbo yacho, uye zvinokanganisa kugadzikana uye kururama kwemidziyo.
Chechina, kugadzikana uye kuramba kuvhunduka
Kugadzikana kwesimba: Munzvimbo yekutepfenyura inokonzereswa nekushanda kwemidziyo ye semiconductor (vibration frequency range 10-1000Hz, amplitude 0.01-0.1mm), kutenderera kwenzvimbo dzekuisa makiyi pachigadziko kunofanirwa kudzorwa mukati me ±0.05μm. Tichitora michina yekuyedza ye semiconductor semuenzaniso, kana kuzununguka kwemudziyo uye kuzununguka kwenzvimbo yakapoteredza zvikaendeswa kuchigadziko panguva yekushanda, kururama kwechiratidzo chekuyedza kunogona kukanganiswa. Kugadzikana kwakanaka kwesimba kunogona kuve nechokwadi chemhedzisiro yebvunzo yakavimbika.
Kudzivirira kudengenyeka kwenyika: Hwaro hunofanira kunge huine mashandiro akanaka ekudengenyeka kwenyika, uye hunogona kuderedza simba rekudengenyeka nekukurumidza kana hukangoerekana hwaitika (sekunge kutenderera kwemvura inoyerera), uye kuve nechokwadi chekuti nzvimbo yezvikamu zvakakosha zvemuchina inochinja mukati me ± 0.1μm. Mumafekitori e semiconductor munzvimbo dzinonyanya kudengenyeka kwenyika, mabhesi anodzivirira kudengenyeka kwenyika anogona kudzivirira michina inodhura ye semiconductor, zvichideredza njodzi yekukuvara kwemidziyo uye kukanganiswa kwekugadzirwa kwayo nekuda kwekudengenyeka.
5. Kugadzikana kwemakemikari
Kuramba Kuora: Hwaro hwegranite hunofanira kutsungirira ngura yemakemikari akajairika mukugadzirwa kwe semiconductor, senge hydrofluoric acid, aqua regia, nezvimwewo. Mushure mekunyikwa mu hydrofluoric acid solution ine huwandu hwe40% kwemaawa makumi maviri nemana, mwero wekurasikirwa kwemhando yepamusoro haufanirwe kudarika 0.01%; Nyika mu aqua regia (huwandu hwehydrochloric acid kune nitric acid 3:1) kwemaawa gumi nemaviri, uye hapana zviratidzo zvakajeka zvengura pamusoro. Maitiro ekugadzira semiconductor anosanganisira maitiro akasiyana-siyana ekucheka nekuchenesa makemikari, uye kuramba kwakanaka kwengura kwehwaro kunogona kuve nechokwadi chekuti kushandiswa kwenguva refu munzvimbo yemakemikari hakuna kukanganiswa, uye kururama uye kusimba kwechimiro zvinochengetwa.
Kudzivirira kusvibiswa: Chinhu chepasi hachina kunyorova zvakanyanya kwezvinhu zvinosvibisa zvinowanikwa munzvimbo yekugadzira semiconductor, zvakaita semagasi eorganic, maion esimbi, nezvimwewo. Kana zvikaiswa munzvimbo ine 10 PPM yemagasi eorganic (semuenzaniso, benzene, toluene) uye 1ppm yemaion esimbi (semuenzaniso, maion emhangura, maion esimbi) kwemaawa makumi manomwe nemaviri, shanduko yekushanda inokonzerwa nekunyudzwa kwezvinosvibisa panzvimbo yepasi haina kukosha. Izvi zvinodzivirira zvinosvibisa kuti zvisafambe kubva panzvimbo yepasi kuenda kunzvimbo yekugadzira machip zvichikanganisa kunaka kwemachip.
Nguva yekutumira: Kurume-28-2025