Iko mukana wekusarudza granite base ye semiconductor wafer yekuyedza tafura.

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Mune semiconductor indasitiri, wafer yekuongorora ndiyo yakakosha link kuti ive nechokwadi chemhando nekuita kwechip, uye iko kurongeka uye kugadzikana kwetafura yekuongorora kunoita basa rakasimba mumhedzisiro yekuona. Granite base ine hunhu hwayo hwakasiyana, iva sarudzo yakanakira semiconductor wafer yekutarisa tafura, inotevera kubva kune akawanda-dimensional ongororo yako. .

Kutanga, iyo chaiyo vimbiso dimension
1. Ultra-yakakwirira flatness uye kutwasuka: Chigadziko chegranite chinogadziriswa nepamusoro-soro yekugadzira teknolojia, uye iyo flatness inogona kusvika ± 0.001mm / m kana kunyange yakakwirira yakarurama, uye kururamisa kwacho kwakanakawo. Muchigadziro chekuongorora, ndege yepamusoro-soro inopa tsigiro yakagadzikana yewafesi uye inoita kuti pave nekubatana kwakarurama pakati peprobe yezvigadzirwa zvekuongorora uye majoini ekutengesa pane wafer surface. .
2. Yakanyanya kuderera coefficient of thermal expansion: semiconductor kugadzira inonzwisisa kushanduka kwekushisa, uye coefficient yekuwedzera kwemafuta egranite yakaderera zvakanyanya, kazhinji inenge 5 × 10⁻⁶/℃. Kana iyo yekuona chikuva ichimhanya, kunyangwe tembiricha yakadzika ikachinja, saizi yegirenati inochinja zvishoma. Semuenzaniso, mumusangano wepamusoro wekushisa muzhizha, kutonhora kwesimbi yakajairwa chigadziko chekuona chigadziko chinogona kukonzera nzvimbo yakaenzana yewafesi uye michina yekuona kuti ishanduke, inokanganisa kunyatsoona; Iyo granite base yekuona chikuva inogona kuchengetedza kugadzikana, kuve nechokwadi cheyakaenzana chinzvimbo chewafesi uye yekuona michina panguva yekuona maitiro, uye inopa yakagadzikana nharaunda yepamusoro-chaiyo yekuona. .
Chechipiri, kugadzikana dimension
1. Chimiro chakagadzikana uye kusagadzikana kwekudengenyeka: Granite mushure memamiriyoni emakore ekugadzirwa kwe geological, chimiro chemukati chakaoma uye chakafanana. Munzvimbo yakaoma yefekitori ye semiconductor, kuzunguzika kunokonzerwa nekushanda kwemidziyo yeperipheral uye vashandi vanofamba-famba kunonatswa negwaro regranite. .
2. Kururamisa kwekushandisa kwenguva refu: kana ichienzaniswa nezvimwe zvinhu, granite ine kuoma kwakanyanya, kusimba kwekusapfeka kwakasimba, uye kuoma kweMohs kunogona kusvika 6-7. Iyo granite base yepasi haipfekwe nyore panguva yenguva zhinji yekurodha, kuburitsa uye kuongorora mabasa. Zvinoenderana nekushandiswa chaiko kwehuwandu hwedata, kushandiswa kwegranite base yekuyedza tafura, kuenderera mberi kwekushanda mushure memaawa 5000, kupfava uye kurongeka kwechokwadi kunogona kuchengetedzwa pane inopfuura 98% yekurongeka kwekutanga, kuderedza michina nekuda kwekupfeka kwebhesi kunokonzerwa neyakajairwa calibration uye nguva yekugadzirisa, kuderedza mutengo wekushanda kwebhizinesi, kuve nechokwadi chekuyedza kugadzikana kwekushanda kwenguva refu. .

Chechitatu, yakachena uye inopesana nekupindira dimension
1. Yakaderera guruva chizvarwa: iyo semiconductor yekugadzira nharaunda inoda kuve yakachena kwazvo, uye iyo granite zvinhu pachayo yakagadzikana uye haisi nyore kugadzira guruva. Munguva yekushanda kwepuratifomu yekuedza, guruva rinogadzirwa nehwaro rinodziviswa kusvibisa chidimbu, uye njodzi yekupfupika kwedunhu uye yakavhurika yedunhu inokonzerwa neguruva particles inoderedzwa. Munzvimbo yekutarisa yewafer yeworkshop isina guruva, iyo huruva yakatenderedza tafura ye granite base yekuongorora inogara ichidzorwa kusvika yakaderera zvakanyanya, ichisangana nekuomesera kwehutsanana zvinodiwa zveindasitiri yesemiconductor. .
2. Hapana kupindira kwemagineti: midziyo yekuona inotarisana nemagetsi emagetsi, uye granite isiri-magnetic material, iyo isingazovhiringidzi nemagetsi emagetsi emagetsi ekuona. Mukushandiswa kwekuonekwa kwe electron beam uye humwe matekinoroji ekuyedza anoda yakanyanya kukwirisa emagetsi nharaunda, gasi regranite rinoona yakagadzikana kufambisa kwechiratidzo chemagetsi chemidziyo yekuona uye inova nechokwadi chechokwadi chemhedzisiro yebvunzo. Semuyenzaniso, kana wafer ichiyedzerwa kushanda kwemagetsi kwepamusoro-soro, iyo isiri-magnetic granite base inodzivirira kukanganiswa nekuona ikozvino uye masaini emagetsi, kuitira kuti data rekuona rinonyatsoratidza maitiro emagetsi ewafer.