Mukati mekushanda kweindasitiri yesemiconductor kuenda kumagadzirirwo e nanoscale, kucheka wafer, senzira huru yekugadzira machipisi, kune zvinodiwa zvakasimba kuti michina igare zvakanaka. Hwaro hwegranite, hune simba guru rekudzivirira kutenderera uye kugadzikana kwekupisa, hwave chinhu chikuru chemidziyo yekucheka wafer, zvichipa vimbiso yakavimbika yekuwana kugadzirisa wafer nemazvo uye zvinobudirira.
Hunhu hwekudzivirira kutonhora zvakanyanya uye hunodzivirira kudedera: Kuchengetedza kurongeka kwekucheka kwemazinga e nano
Kana michina yekucheka wafer iri kushanda, kutenderera kwespindle nekukurumidza, kudedera kwechinhu chekucheka kwakakwira, uye kudedera kwezvakatipoteredza kunogadzirwa nemidziyo yakapoteredza zvese zvine chekuita nekururama kwekucheka. Kushanda kwesimbi dzesimbi dzechinyakare kwakaganhurirwa, zvichiita kuti zviome kukurumidza kuderedza kudedera, izvo zvinotungamira mukuvhunduka kwezvishandiso zvekucheka zvine micron uye zvinokonzera zvakananga zvikanganiso zvakaita semipendero yakachekwa uye mitswe pamawafer. Hunhu hwekudambisa hwakakwirira hwegranite base hwakagadzirisa dambudziko iri zvakanyanya.
Makristaro emuchicherwa egranite akabatana zvakanyanya, zvichigadzira chimiro chechisikigo chekuparadza simba. Kana kudedera kwacho kwaendeswa kuhwaro, hunhu hwacho hwemukati hunogona kushandura simba rekudedera kuita simba rekupisa, zvichiita kuti kudedera kushande zvakanaka. Ruzivo rwekuyedza runoratidza kuti pasi pemamiriro akafanana ekudedera, hwaro hwegranite hunogona kuderedza amplitude yekudedera neinopfuura 90% mukati memasekonzi 0.5, nepo hwaro hwesimbi huchida masekondi matatu kusvika mashanu. Kushanda uku kwakanaka kwekudzikisa mvura kunoita kuti chishandiso chekucheka chirambe chakasimba panguva yekucheka nanoscale, zvichivimbisa mupendero wakatsetseka wekucheka wafer uye zvinobudirira kuderedza mwero wekuchekera. Semuenzaniso, mukucheka wafer kwe5nm, michina ine hwaro hwegranite inogona kudzora saizi yekuchekera mukati me10μm, inova pamusoro pe40% yakakwira kupfuura yemidziyo ine hwaro hwesimbi.
Kuwanda kwekupisa kwakanyanya: Kunoramba kukanganiswa nekuchinja-chinja kwekupisa
Munguva yekucheka wafer, kupisa kunokonzerwa nekukweshana kwezvishandiso zvekucheka, kupera kwekupisa kubva pakushanda kwenguva refu kwemidziyo, uye shanduko mukupisa kwenzvimbo yekushandira zvese zvinogona kukonzera kuchinja kwekupisa kwezvikamu zvemidziyo. Kuwanda kwekuwedzera kwekupisa kwezvinhu zvesimbi kwakakwira (inenge 12×10⁻⁶/℃). Kana tembiricha ikachinja ne5℃, hwaro hwesimbi hurefu hwemita imwe hunogona kuchinja kusvika 60μm, zvichiita kuti nzvimbo yekucheka ichinje uye zvichikanganisa zvakanyanya kururama kwekucheka.
Kuwanda kwekuwedzera kwemafuta egranite base kunongova (4-8) ×10⁻⁶/℃, izvo zviri pasi pechikamu chimwe muzvitatu chezvinhu zvesimbi. Pasi pekuchinja kwetembiricha kumwe chete, kuchinja kwayo kwehukuru kunogona kupotsa kuregeredzwa. Data rakayerwa reimwe kambani inogadzira semiconductor rinoratidza kuti panguva yekushanda kwemaawa masere kwekucheka wafer kwakasimba, apo tembiricha yemhepo inochinja-chinja ne10℃, nzvimbo yekucheka yemidziyo ine granite base iri pasi pe20μm, nepo yemidziyo ine simbi inodarika 60μm. Kushanda kwemafuta uku kwakagadzikana kunoita kuti nzvimbo iri pakati pechishandiso chekucheka newafer irambe yakarurama nguva dzese. Kunyangwe pasi pekushanda kwenguva refu kana shanduko huru mukupisa kwezvakatipoteredza, kurongeka kwekucheka kunogona kuchengetedzwa.
Kusimba uye kuramba kupfeka: Ita shuwa kuti michina inoshanda kwenguva refu
Pamusoro pezvakanakira zvekudzivirira kudedera uye kugadzikana kwekupisa, kuomarara kwakanyanya uye kuramba kupfeka kwechigadziko chegranite kunowedzera kuvimbika kwemuchina wekucheka wafer. Granite ine kuomarara kwe6 kusvika ku7 pachikero cheMohs uye simba rekumanikidza rinodarika 120MPa. Inogona kutsungirira kumanikidzwa kukuru uye simba rekukanda panguva yekucheka uye haichinjike. Panguva iyi, chimiro chayo chakakora chinoita kuti irambe yakasimba. Kunyangwe panguva yekucheka kakawanda, pamusoro pechigadziko hachichinjike, zvichiita kuti michina irambe ichishanda nemazvo kwenguva yakareba.
Mukushandiswa kwazvinoitwa, makambani mazhinji ekugadzira mawafer akavandudza zvakanyanya goho rezvigadzirwa uye kushanda zvakanaka kwekugadzira nekushandisa michina yekucheka ine magadziko egranite. Ruzivo kubva kukambani inotungamira pasi rose inoratidza kuti mushure mekutanga michina yegranite, goho rekucheka mawafer rakawedzera kubva pa88% kusvika pamusoro pe95%, kutenderera kwekugadzirisa michina kwakawedzerwa katatu, zvichideredza mari yekugadzira uye zvichiwedzera kukwikwidzana pamusika.
Mukupedzisa, hwaro hwegranite, hune simba rayo guru rekudzivirira kubvunda, kugadzikana kwekupisa, kuomarara kwakanyanya uye kusakara, hunopa vimbiso yakakwana yekushanda kwemidziyo yekucheka wafer. Sezvo tekinoroji yesemiconductor ichifambira mberi kusvika pakunyatsojeka, hwaro hwegranite huchaita basa rakakosha mumunda wekugadzira wafer, zvichikurudzira kufambira mberi kwekuvandudzwa kweindasitiri yesemiconductor.
Nguva yekutumira: Chivabvu-20-2025