Mukuita kweiyo semiconductor indasitiri inoenda yakanangana nanoscale kugadzira maitiro, wafer kucheka, sechinhu chakakosha mukugadzira chip, ine zvakanyanya kuomarara zvinodiwa zvekugadzikana kwemidziyo. Iyo granite base, ine yakatanhamara vibration kuramba uye kugadzikana kwemafuta, yave chinhu chakakosha chewafer yekucheka michina, ichipa vimbiso yakavimbika yekuwana yakakwirira-chaiyo uye yakakwirira-inoshanda wafer processing. .
Yakanyanya kunyorovesa uye anti-vibration maitiro: Kuchengetedza nano-level yekucheka chaiko
Kana iyo wafer yekucheka michina iri kushanda, iyo yakakwirira-kumhanya kutenderera kweiyo spindle, iyo yakakwirira-frequency vibration yekucheka chishandiso, uye kudengenyeka kwezvakatipoteredza kunogadzirwa nemidziyo yakatenderedza zvese zvichave nekukanganisa kwakakosha pakucheka chaiko. Iko kunyorovesa kuita kwechinyakare mabhesi esimbi kunogumira, zvichiita kuti zviome kukurumidza kudzikisira kuzunguzika, izvo zvinotungamira kune micron-level jitter yekucheka maturusi uye zvakananga kukonzera kuremara senge chipped edges uye kutsemuka pawafers. Iyo yakakwirira yekunyorovesa maitiro eiyo granite base yakagadzirisa dambudziko iri. .
Iyo yemukati yemaminerari makristasi egranite yakanyatso kupindirana, ichigadzira yakasikwa simba dissipation chimiro. Kana iyo vibration ichiendeswa kune hwaro, iyo yemukati microstructure inogona kukurumidza kushandura iyo vibration simba kuita inopisa simba, ichiwana inobudirira vibration attenuation. Dhata rekuyedza rinoratidza kuti pasi penzvimbo imwechete yekuzunguza, chigadziko chegranite chinogona kudzikisira kuzunguzika kweamplitude neinopfuura 90% mukati memasekonzi 0.5, nepo chigadziko chesimbi chinoda masekonzi matatu kusvika mashanu. Uku kuita kwakatanhamara kwekunyorovesa kunovimbisa kuti chishandiso chekucheka chinoramba chakagadzikana panguva yekucheka nanoscale, kuvimbisa kutsetseka kwemupendero wewafer yekucheka uye nekunyatso kudzikisa chipping rate. Semuyenzaniso, mu5nm wafer yekucheka process, midziyo ine granite base inokwanisa kudzora ukuru hwechipping mukati me10μm, inodarika 40% yakakwira kupfuura yemidziyo ine base yesimbi. .
Ultra-yakaderera coefficient yekuwedzera kwekupisa: Inopokana nekufurirwa kwekushanduka kwekushisa
Munguva yekucheka kwewafa, kupisa kunokonzerwa nekukweshera kwemidziyo yekucheka, kupisa kupisa kubva pakushanda kwenguva refu kwemidziyo, uye shanduko yekushisa kwenzvimbo yewekishopu inogona kukonzeresa deformation yemidziyo yemidziyo. Iyo coefficient yekuwedzera kwekupisa kwezvinhu zvesimbi yakakwira (inenge 12 × 10⁻⁶/℃). Kana tembiricha ichichinja ne5 ℃, 1-mita-yakareba simbi base inogona kuita deformation ye60μm, zvichiita kuti nzvimbo yekucheka ichinje uye ichikanganisa zvakanyanya kuchekwa kwayo. .
Iyo coefficient yekuwedzera kwekushisa kwechigadziko chegranite chete (4-8) × 10⁻⁶/℃, iyo iri pasi pechetatu chezvigadzirwa zvesimbi. Pasi pehumwe tembiricha shanduko, kushanduka kwayo kwedimensional kunogona kuregererwa. Iyo yakayerwa data yeimwe semiconductor yekugadzira bhizinesi inoratidza kuti panguva ye8-awa inoenderera yakakwira-yakanyanya kusimba wafer yekucheka, kana ambient tembiricha ichichinja ne10 ℃, nzvimbo yekucheka yemidziyo ine base yegranite isingasviki 20μm, nepo iyo yemidziyo ine chigadziko chesimbi inodarika 60μm. Uku kugadzikana kwekushanda kwekushisa kunovimbisa kuti nzvimbo yakaenzana pakati pechigadziro chekucheka uye chifukidzo chinoramba chiri chakarurama nguva dzose. Kunyangwe pasi pekushanda kwenguva refu kuenderera mberi kana kuchinja kwakanyanya mukupisa kwezvakatipoteredza, kuwirirana kwekucheka kwakarurama kunogona kuchengetedzwa. .
Rigidity uye kupfeka kuramba: Ita shuwa kushanda kwakasimba kwenguva refu kwemidziyo
Pamusoro pezvakanakira vibration kuramba uye kugadzikana kwemafuta, iyo yakanyanya kuomarara uye kupfeka kuramba kweiyo granite base inowedzera kuwedzera kuvimbika kweiyo wafer yekucheka michina. Granite ine kuoma kwe6 kusvika ku7 pachiyero cheMohs uye simba rekumanikidza rinopfuura 120MPa. Iyo inogona kumirisana nekumanikidza kukuru uye simba rekuita panguva yekucheka uye haina kukonzeresa deformation. Zvichakadaro, chimiro chayo chakaomarara chinochipa nekunaka kupfeka kuramba. Kunyangwe panguva yekucheka mashandiro anowanzoitwa, pamusoro pechigadziko hachiwanzo kupfeka, kuve nechokwadi chekuti midziyo inochengetedza yakakwirira-chaiyo kushanda kwenguva yakareba. .
Mumashandisirwo anoshanda, mazhinji mabhizinesi ekugadzira wafer akavandudza zvakanyanya goho rechigadzirwa uye kugona kwekugadzira nekutora michina yekucheka ine mabhesi egranite. Dhata kubva kune inotungamira pasi rose yakawanikwa inoratidza kuti mushure mekutanga granite base midziyo, goho rekucheka wafer rakawedzera kubva pa88% kusvika pamusoro pe95%, kutenderera kwekugadzirisa kwemidziyo kwakawedzerwa katatu, zvichidzika kuderedza mutengo wekugadzira uye kuwedzera kukwikwidza kwemusika. .
Mukupedzisa, iyo granite base, ine yakanakisa vibration kuramba, kugadzikana kwemafuta, kusimba kwakanyanya uye kupfeka kuramba, inopa yakazara vimbiso yekushanda kwewafer yekucheka michina. Sezvo tekinoroji yesemiconductor ichifambira mberi yakanangana nepamusoro, mabhesi egranite achaita basa rakakosha mumunda wekugadzira wafer, kusimudzira kuenderera mberi kwekuvandudza kweindasitiri yesemiconductor.
Nguva yekutumira: May-20-2025