Granite imhando yedombo rakaoma iro rave chinhu chakakosha muindasitiri yekugadzira semiconductor.Zvimiro zvayo zvinoibvumira kutsungirira kupisa kwakanyanya, izvo zvinoita kuti ive yakakodzera kushandiswa mumatanho akasiyana-siyana ekugadzira semiconductor mudziyo kugadzira.Nekuda kweizvozvo, kuungana kwegranite kwakawana nzvimbo dzakakura dzekushandisa mune semiconductor yekugadzira maitiro ezvigadzirwa zvemidziyo.
Imwe yeanonyanya kushandiswa kushandiswa kwekusangana kwegranite kuri mukuvaka kwepamusoro-chaiyo muchina maturusi zvimiro.Kuoma uye kugadzikana kwegranite kunoita kuti zvikwanise kuburitsa maturusi chaiwo uye akarurama asina deformation shoma kana isina.Iyi nhanho yehutsanana inodiwa mukugadzira semiconductor maitiro senge ion implantation, uko danda rinofanira kutungamirwa nemazvo pawafer.
Kumwe kushandiswa kwekusangana kwegranite mukugadzira semiconductor kuri mukuvaka kwemichina yemetrology.Metrology midziyo yakakosha mukugadzira semiconductor maitiro sezvainoyera uye nekuona chokwadi chemidziyo iri kugadzirwa.Granite's dimensional kugadzikana, kuderera kwekuwedzera kwemafuta, uye yakanakisa vibration yekunyorovesa zvivakwa zvinoita kuti ive chinhu chesarudzo mukuvaka kwe metrology michina.Izvi zvinosanganisira nzvimbo dzakakura dzegranite dzinoshandiswa mukuita uye kuongorora kwewafers.
Matafura eOptical ndiyo imwe nzvimbo yekushandiswa kwakawanda kwekusangana kwegranite muindasitiri yesemiconductor.Matafura eOptical anoshandiswa mukuyedzwa kwemidziyo yemaziso senge waveguides yekutaurirana kwedata.Granite's flatness, kuderera kwekuwedzera kwekushisa, kusimba kwepamusoro, uye kugadzikana kwemuchina zvinogonesa kuti ipe nzvimbo yakagadzikana yekumisikidza nekumisikidza kwemaziso.Matafura eGranite Optical anogona kupa kugadzikana uye kusimba kunodiwa kuita kwakaringana, kuyedza chaiko kwemidziyo yemaziso.
Granite inowanawo kushanda mukuvaka kwewafer chucks nematanho.Munguva yekugadzira semiconductor, kurongeka chaiko, uye kutonga chinzvimbo kwakakosha.Wafer chucks, inobata mawafers munzvimbo panguva yekugadziriswa, inofanirwa kuchengetedza chinzvimbo ichienderana nekupisa kwakanyanya uye vacuum mamiriro.Granite ine yakanakisa dimensional kugadzikana pamusoro peakasiyana tembiricha uye inokwanisa kumira vacuum mamiriro, zvichiita kuti ive yakakodzera kuvakwa kwewafer chucks.Matanho anoshandiswa mukufamba kwemawafer kubva pane imwe nzvimbo kuenda kune imwe anoenda kuburikidza nebhasikoro kutevedzana kwekufamba panguva yekugadzira semiconductor.Gungano regranite rinopa kugadzikana uye kusimba kunodiwa kutakura kuenderera uye kudzokorora kutenderera kwekufamba.
Muchidimbu, kushandiswa kwekusangana kwegranite muindasitiri yekugadzira semiconductor kwakakura.Zvimiro zvayo senge dimensional kugadzikana, kuderera kwekuwedzera kwemafuta, kuomarara kwepamusoro, uye kudedera kunyorova kunoita kuti ive chinhu chakanakira kushandiswa mumatanho akasiyana-siyana ekugadzira semiconductor mudziyo wekugadzira.Kubva pakuvaka kwepamusoro-chaiyo muchina maturusi uye metrology michina kusvika kumatafura emaziso uye nhanho dzewafer uye chucks, hunhu hwegranite hunoita basa rakakosha mukupa kugadzikana, huchokwadi, uye kudzokororwa kunodiwa kuti uwane yepamusoro-mhando semiconductor mudziyo kugadzira.
Nguva yekutumira: Zvita-06-2023