Kugadzira Semiconductor: Mukugadzira chip, photolithography inofanirwa kutamisa circuit pattern chaiyo ku wafer. Granite base ye single axis air floating ultra-precision motion module inogona kupa high precision positioning uye steel support ye wafer table mu lithography equipment. Semuenzaniso, ASML nevamwe vagadziri ve lithography vane mukurumbira pasi rose vanoshandisa granite base air floating modules mumidziyo yavo yepamusoro, iyo inogona kudzora positioning accuracy ye wafer pa nanometer level kuti ive nechokwadi chekuti lithography pattern yakarurama, nokudaro ichivandudza kubatanidzwa uye kushanda kwe chip.
Nzvimbo yekuyera nemazvo: CMM mudziyo wekuyera nemazvo unowanzoshandiswa mukugadzirwa kwemaindasitiri, unoshandiswa kuyera saizi, chimiro nenzvimbo chaiyo yebasa. Module yekufamba nemazvo ye single axis air float pachigadziko chegranite inogona kushandiswa sepuratifomu yekufamba yeCMM, iyo inogona kuita kufamba kwakanyatsojeka uye kupa nzira yakagadzikana yekufamba kweprobe yekuyera. Semuenzaniso, CMM yepamusoro yeHexagon inoshandisa musanganiswa uyu kuyera zvikamu zvakakura uye zvakaoma nekuyera nemazvo kusvika padanho re micron, ichipa vimbiso yakasimba yekudzora mhando yezvikamu mumotokari, mundege nedzimwe nzvimbo.
Munda wemuchadenga: Mukugadzirisa nekuyedza zvikamu zvemuchadenga, kunyatsoita basa kwakakosha. Semuenzaniso, kugadzira mablades einjini yendege kunoda kudzora kwakaringana kwekufamba kwechishandiso kuti ive nechokwadi chekuti blade profile yakarurama. Granite base ye single axis air float ultra-precision motion module inogona kushandiswa panzvimbo yekugadzira machine ye five-axis nemimwe michina kuti ipe kudzora kwakaringana kwekufamba kwechishandiso uye kuve nechokwadi chekuti kunyatsoita basa kweblade kunogona kusangana nezvinodiwa zvekugadzira. Panguva imwe chete, mukugadzira injini ye aero, zvakakoshawo kushandisa michina yekuyera yakanyatsoita basa kuti uone kururama kwekubatanidzwa kwezvikamu. Air floating module ye granite base inogona kupa rutsigiro rwakagadzikana uye kufamba kwakaringana kwemidziyo yekuyera kuti ive nechokwadi chekuti gungano rakanaka.
Munda wekuongorora maziso: Mukugadzira nekuyedza zvikamu zvemaziso, zvakakosha kuita nzvimbo chaiyo uye kuyerwa kwezvikamu zvemaziso. Semuenzaniso, pakugadzira zvikamu zvemaziso zvakanyatsonaka zvakaita semagirazi nemalenzi, zvakakosha kushandisa ma interferometers nezvimwe zvishandiso kuti uone kururama kwechimiro chepamusoro. Granite base ye single axis air floating ultra-precision motion module inogona kushandiswa senzvimbo yekufamba ye interferometer, iyo inogona kuona kururama kwe sub-micron positioning uye kupa rutsigiro rwedata rwakarurama rwekuona zvikamu zvemaziso. Pamusoro pezvo, mumidziyo yekugadzirisa laser, zvakakoshawo kushandisa nzvimbo yekufamba yakanyatsonaka kudzora nzira yekuongorora laser beam, granite base ye air floating module inogona kusangana nezvinodiwa izvi, kuti uwane high-precision laser processing.
Nguva yekutumira: Kubvumbi-07-2025