Semiconductor kugadzira: Mune chip yekugadzira maitiro, iyo photolithography process inoda kuendesa redunhu pateni chaizvo kune wafer. Iyo granite base yeimwe axis mhepo inoyangarara ye Ultra-chaiyo inofamba module inogona kupa yakakwirira chaiyo yekumisikidza uye yakatsiga tsigiro yewafer tafura mumidziyo yelithography. Semuyenzaniso, ASML nevamwe vagadziri vemuchina welithography vane mukurumbira pasi rose vanoshandisa granite base air floating motion modules mumidziyo yavo yepamusoro-soro, iyo inogona kudzora kurongeka kweiyo wafer padanho renanometer kuti ive nechokwadi chechokwadi cheiyo lithography pateni, nekudaro ichivandudza kubatanidzwa uye kuita kwechip.
Precision yekuyera munda: CMM ndeye chaiyo yekuyera midziyo inowanzoshandiswa mukugadzirwa kwemaindasitiri, iyo inoshandiswa kuyera saizi, chimiro uye chimiro chechokwadi cheiyo workpiece. Iyo yekupedzisira-chaiyo inofamba module yeimwe axis mhepo inoyangarara pachigadziko chegranite inogona kushandiswa sechikuva chekufamba cheCMM, inogona kuona yakakwirira-chaiyo mutsara kufamba uye kupa yakagadzikana inofamba trajectory yekuyeresa probe. Semuenzaniso, Hexagon's high-end CMM inoshandisa iyi musanganiswa kuyera zvikamu zvakakura uye zvakaoma nekuyera kuyera kusvika padanho remicron, ichipa vimbiso yakasimba yezvikamu zvehutongi hwemhando mumotokari, aerospace uye mamwe maindasitiri.
Munda weAerospace: Mukugadzirisa uye kuyedzwa kwezvikamu zvemuchadenga, kunyatsojeka kunodiwa. Semuyenzaniso, kugadzirwa kwemajeru einjini yendege kunoda kunyatso kudzora mafambiro echombo kuti ive nechokwadi chekuti blade profile yechokwadi. Iyo granite base yeimwe axis air float ultra-precision motion module inogona kuiswa kune mashanu-axis machining centre uye mimwe michina yekupa yakakwirira-chaiyo yekufamba kutonga kwechishandiso uye kuve nechokwadi chekuti machining echokwadi cheblade anogona kusangana nezvinodiwa zvekugadzira. Panguva imwecheteyo, mukusangana kweinjini yeaero, inofanirwawo kushandisa yakakwirira-chaiyo yekuyeresa michina kuti uone kurongeka kwegungano kwezvikamu. Iyo mhepo inoyangarara inofamba module yeiyo granite base inogona kupa yakatsiga rutsigiro uye kwakaringana kufamba kweyeyereso midziyo kuti ive nechokwadi chekusangana kwemhando.
Optical inspection field: Mukugadzira uye kuyedza maitiro ezvinhu zvemaziso, zvinodikanwa kuita yakakwirira-chaiyo chinzvimbo uye kuyerwa kwezvinhu zvemaziso. Semuenzaniso, kana uchigadzira yakakwirira-chaiyo optical components semagirazi uye lenzi, zvinodikanwa kushandisa interferometers nemimwe midziyo kuti uone kurongeka kwechiso. Iyo granite base yeimwe axis air floating Ultra-precision motion module inogona kushandiswa sefambo yekufambisa yeinterferometer, iyo inogona kuona iyo sub-micron yekumisikidza kurongeka uye kupa chaiyo data tsigiro yekuonekwa kwezvinhu zvemaziso. Pamusoro pezvo, mumidziyo yekugadzira laser, inodiwa zvakare kushandisa yakakwirira-chaiyo inofamba chikuva kudzora iyo scanning trajectory yelaser beam, iyo granite base yemhepo inoyangarara inofamba module inogona kusangana nechinhu ichi, kuti uwane yakakwirira-chaiyo laser processing.
Nguva yekutumira: Kubvumbi-07-2025