Indasitiri yepasi rose ye semiconductor iri kuita basa guru rekutsvaga "Angstrom Era," uko miganhu ye transistor inoyerwa muhupamhi hwemaatomu mashoma chete. Sezvo lithography uye zvishandiso zvekuongorora zvichichinja kuenda kumasikirini aya, kudiwa kwekugadzikana kwechimiro kwachinja kubva pa "macro" kuenda ku "nano." Pakati pekuchinja uku pane zvinhu zvekare sePasi pacharo: Precision Granite.
Kunyange zvazvo vazhinji vachiona granite sedombo riri nyore, kana tichitarisadanho rekuisa nanopositioningkana kuti sisitimu yekuongorora wafer inokurumidza, iceramic yeunyanzvi hwepamusoro. Kunzwisisa musiyano uripo pakati pezvishandiso zve metrology zvepakutanga nemapuratifomu ekufambisa epamusoro kwakakosha kune maOEM ari kutsvaga kusundira miganhu yezvinogona kuitika mukugadzira silicon.
Granite CMM vs. Granite Surface Plate: Kunzwisisa Kuchinja Kweinjiniya
Mumarabhoritari mazhinji ekudzora mhando,Granite Pamusoro Platechinhu chinowanikwa kwose kwose—chinhu chakavimbika, chakatsetseka chekuyera nemaoko. Zvisinei, pane pfungwa isiriyo yekuti plate yepamusoro nechigadziko cheGranite CMM (Coordinate Measuring Machine) zvinogona kuchinjana. Kubva pamaonero einjiniya, zvinomiririra mazinga maviri akasiyana ekuoma.
Purati yepamusoro yakagadzirwa kuti isatsvedzerere. Basa rayo guru nderekuti irambe yakati sandara pasi pemutoro usingatsvedzere. Kusiyana neizvi, hwaro hwegranite hweCMM kana danho rekunyatsojeka hunofanira kubata mutoro unoshanduka. Sezvo bhiriji reCMM richifamba kana mota inomhanyisa danho rewafer paGs dzakawanda, granite haifanire kungoramba ichikombama chete, asiwo torsion uye harmonic resonance.
Mainjiniya eZHHIMG anosarudza "Black Granite" kuti ishandiswe nenzira inochinja-chinja nekuda kwekuwanda kwayo uye chimiro chayo chezviyo zvakapfava. Kunyange zvazvo plate yepamusoro ingashandisa mhando ine maburi akawanda, CMM base inoda Young's Modulus yepamusoro kuti ive nechokwadi chekuti "snap" yekufamba nekukurumidza haishandure kuita structural ringling iyo inogona kukanganisa data rekuyera.
Matanho Ekugadzirisa Zvinhu Zvakakwana Mukugadzira Semiconductor: Nheyo yeGoho
Mukugadzirwa kwema semiconductor, throughput uye goeth ndizvo zvinonyanya kukosha. Zvese zvinoenderana nekushanda kwematanho ekururamaIngave iri danho rewafer mumuchina weDUV/EUV lithography kana sisitimu yekuisa zvinhu mumudziyo weAutomated Optical Inspection (AOI), zvinhu zvepasi zvinofanira kubatsira kudzokorora kwe sub-nanometer.
Dambudziko guru mukugadzira ikupisa. Mamota emagetsi nema actuator zvinogadzira simba guru rekupisa. Dai hwaro hwechikuva hwakagadzirwa nearuminiyamu kana simbi, kuwedzera kwekupisa kwaizokonzera kuti wafer ibve pakurongeka, zvichikonzera "zvikanganiso zvekufukidza" zvinoparadza machipisi ese.
Kuwanda kwemafuta eGranite (CTE) kunovimbisa kuti kunyangwe mota dzichipisa, "mepu" chaiyo yechikuva inoramba yakadaro. Uyezve, ZHHIMG inopa zvikamu zvegranite zvakagadzirwa nenzira dzakabatana dzekutakura mweya. Nekuti granite inogona kusungirirwa kuita segirazi rakatsetseka, inoshanda senzvimbo yakakwana yemabheringi emhepo, ichibvumira matanho "kuyerera" pafirimu diki remhepo isina kukweshana uye zero stiction.
Fizikisi yeNanopositioning Stage Base
Patinopinda munyika yedanho rekuisa nanopositioning, tiri kubata nemafambiro madiki pane bvudzi remunhu nechikamu che10,000. Padanho iri, kudedera ndiko muvengi. Mafurati eindasitiri anowanzo kudedera nguva dzose nekuda kwemasisitimu eHVAC, kufamba kwetsoka, uye michina iri pedyo.
Granite inoshanda sefirita hombe inopinza pasi. Nekuda kwehukuru hwayo hwakawanda uye damping yemukati yakanyanya, inonyudza kudengenyeka kwepamusoro-soro isati yasvika kuma sensors anonzwa kana wafer pachayo. Iyi "passive isolation" ndiyo chikonzero nei vatengesi vepamusoro-soro ve lithography pasi rose vachivimba neZHHIMG kuti ipe hwaro hwakasimba, hwakagadzikana hwematanho avo anoenderana ne vacuum. Granite yedu inogadziriswa zvakanyanya kuti ive nechokwadi chekuti hapana gasi rinobuda, zvichiita kuti ive yakakodzera nzvimbo dzine vacuum yakawanda inodiwa kune ma electron-beam uye EUV processes.
Kusvika Pamuganhu: ZHHIMG Advantage
Kuchinja kubva padombo risina kugadzirwa kuenda kuchinhu chemhando ye semiconductor rwendo rwemwoyo murefu zvikuru. Kunyange zvazvo CNC ichikuya ichitisvitsa pedyo, giredhi rekupedzisira re "Super-Precision" rinowanikwa kuburikidza nekubata nemaoko. Iyi inzira iyo mainjiniya eZHHIMG anoshandisa ma "abrasive paste" uye mafambiro emaoko kuti vabvise zvidimbu zve micron panguva imwe chete.
Kunedanho rekuisa nanopositioning, kutsetseka hakusi iko chete kunodiwa; kufanana uye kutenderera kwenzvimbo dzinotungamira zvakakoshawo. Chivako chedu chinoshandisa ma-laser trackers uye mazinga emagetsi ane resolution ye 0.1 arc-seconds kuti chionekwe kuti axis yega yega yakarongeka zvakakwana. Iyi nhanho yehunyanzvi inoita kuti kana mutengi akaisa ma linear motors nema encoders ake, hwaro hwemakanika huve pedyo ne "hwakakwana" sezvinobvumirwa nefizikisi.
Kuratidza Ramangwana Rakanaka
Sezvo indasitiri iri kufambira mberi kuenda kuma node e2nm zvichienda mberi, zvinodiwa zvekuchena kwezvinhu uye kugadzikana kwezvikamu zvichawedzera. Kubatanidzwa kwegranite nezvimwe zvinhu zvepamusoro-soro—zvakadai semabhiriji ecarbon fiber kana ceramic vacuum chucks—ndiyo nzira inotevera yekudzora kufamba.
ZHHIMG inoramba yakazvipira kuva zvinopfuura kungopa chete; tiri vadyidzani vanoshanda pamwe chete muchikamu chepasi rose chekutengesa zvinhu zve semiconductor. Nekupa hwaro hwakasimba hunodiwa kuchizvarwa chinotevera chematanho ekugadzirisa zvinhu, tiri kubatsira kuvaka michina inovaka remangwana.
Nguva yekutumira: Kukadzi-02-2026