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Mumunda wekugadzira semiconductor, iyo inoteedzera kurongeka kwekupedzisira, iyo coefficient yekuwedzera kwekupisa ndiyo imwe yepakati paramita inokanganisa kunaka kwechigadzirwa uye kugadzikana kwekugadzira. Mukati mese maitiro kubva kufotolithography, etching kurongedza, mutsauko weiyo thermal yekuwedzera coefficients yezvinhu zvinogona kukanganisa kurongeka kwekugadzira nenzira dzakasiyana. Nekudaro, hwaro hwegranite, neiyo yekupedzisira-yakaderera kupisa kwekuwedzera coefficient, yave kiyi yekugadzirisa dambudziko iri. .
Lithography process: Thermal deformation inokonzera kutsauka kwemaitiro
Photolithography inhanho yakakosha mukugadzira semiconductor. Kuburikidza nemuchina wephotolithography, mapatani edunhu pane mask anotamirwa kumusoro kwewafer akaputirwa nephotoresist. Munguva iyi, iyo yekupisa manejimendi mukati meiyo photolithography muchina uye kugadzikana kweiyo worktable kwakakosha kwakakosha. Tora midziyo yesimbi yechinyakare semuenzaniso. Coefficient yavo yekuwedzera kwekupisa inosvika 12 × 10⁻⁶/℃. Munguva yekushanda kwemuchina wephotolithography, kupisa kunogadzirwa nelaser light source, optical lenzi uye mekiniki zvinhu zvinoita kuti tembiricha yemidziyo ikwire ne5-10 ℃. Kana iyo lithography muchina wekushanda ukashandisa chigadziko chesimbi, 1-mita-yakareba base inogona kukonzera deformation yekuwedzera ye60-120 μm, izvo zvinozotungamira kune kuchinjika kwechinzvimbo pakati pemask newafer. .
Mumagadzirirwo epamberi ekugadzira (akadai se3nm uye 2nm), iyo transistor spacing ingori mashoma nanometers. Kupisa kuduku kwakadaro kunokwana kuita kuti mufananidzo we photolithography usarudzwe, zvichiita kuti pave neabnormal transistor connections, short circuits kana mashizha akazaruka, nezvimwe zvinhu, zvichikonzera zvakananga kukundikana kwekushanda kwechip. Iyo yekupisa yekuwedzera coefficient yegireni gasi yakaderera se 0.01μm/°C (kureva, (1-2) × 10⁻⁶/℃), uye deformation pasi peiyo tembiricha shanduko inongova 1/10-1/5 yesimbi. Iyo inogona kupa yakagadzikana inotakura-inotakura chikuva yemuchina wefotolithography, kuve nechokwadi chekufambisa chaiko kweiyo photolithography pateni uye nekuvandudza zvakanyanya goho rekugadzira chip. .
Etching uye deposition: Inobata iyo dimensional kurongeka kwechimiro
Etching uye deposition ndiwo akakosha maitiro ekuvaka matatu-dimensional edunhu zvimiro pane wafer pamusoro. Munguva ye etching process, iyo reactive gasi inosangana nekemikari inopindirana neyepamusoro zvinhu zvewafer. Zvichakadaro, zvinhu zvakaita seRF magetsi uye gasi kuyerera mukati memidziyo zvinoburitsa kupisa, zvichiita kuti tembiricha yewafer uye zvinhu zvemidziyo zvikwire. Kana iyo coefficient of thermal yekuwedzera yewafer carrier kana base base yemidziyo isingaenderane neiyo yewafer (iyo coefficient yekupisa kwekuwedzera kwesilicon zvinhu ingangoita 2.6 × 10⁻⁶/℃), kushushikana kwekushisa kunogadzirwa kana tembiricha yachinja, izvo zvinogona kukonzera kutsemuka kudiki kana kuputika pamusoro peiyo wafer. .
Rudzi urwu rwe deformation ruchakanganisa kudzika kweiyo etching uye verticality yemadziro emadziro, zvichikonzera zviyero zveetched grooves, kuburikidza nemakomba uye zvimwe zvimiro kutsauka kubva pane zvinodiwa dhizaini. Saizvozvo, mune yakaonda firimu deposition process, mutsauko wekuwedzera kupisa kunogona kukonzera kushushikana kwemukati mune yakaonda firimu, zvichitungamira kune matambudziko akadai sekuputika uye peeling yefirimu, iyo inokanganisa kushanda kwemagetsi uye kuvimbika kwenguva refu kwechip. Iko kushandiswa kwemabhesi egranite ane thermal yekuwedzera coefficient yakafanana neyesilicon zvinhu zvinogona kunyatso kudzikisa kupisa kushushikana uye kuve nechokwadi kugadzikana uye kurongeka kweiyo etching uye deposition maitiro. .
Packaging stage: Thermal mismatch inokonzeresa nyaya dzekuvimbika
Mune iyo semiconductor yekurongedza nhanho, kuenderana kweiyo thermal yekuwedzera coefficients pakati pechip uye yekurongedza zvinhu (senge epoxy resin, ceramics, nezvimwewo) kwakakosha kwakakosha. Iyo yekupisa yekuwedzera coefficient yesilicon, iyo yakakosha zvinhu zvechipisi, yakadzikira, nepo iyo yeakawanda ekurongedza zvinhu yakakwira. Kana tembiricha yechip ichichinja panguva yekushandiswa, kushushikana kwekupisa kunoitika pakati pechip uye zvinhu zvekurongedza nekuda kwekusawirirana kwemafuta ekuwedzera coefficients. .
Uku kushushikana kwekupisa, pasi pemhedzisiro yekudzokororwa tembiricha kutenderera (sekudziya uye kutonhora panguva yekushanda kwechip), kunogona kutungamira kune kuneta kuputika kweanotengeswa majoini pakati pechip uye yekurongedza substrate, kana kuita kuti waya dzekubatanidza pane chip pamusoro dziwire pasi, pakupedzisira zvichikonzera kutadza kwekubatanidza magetsi kwechip. Nekusarudza kurongedza substrate zvinhu zvine mafuta ekuwedzera coefficient padhuze neayo esilicon zvinhu uye kushandisa granite bvunzo mapuratifomu ane yakanakisa kupisa kugadzikana kwekuonekwa kwechokwadi panguva yekurongedza, dambudziko rekupisa kusawirirana rinogona kudzikiswa zvinobudirira, kuvimbika kwekurongedza kunogona kuvandudzwa, uye hupenyu hwesevhisi hwechip hunogona kurebeswa. .
Production nharaunda kutonga: Iyo yakarongeka kugadzikana kwemidziyo uye zvivakwa zvefekitori
Pamusoro pekukanganisa zvakananga maitiro ekugadzira, iyo coefficient yekuwedzera kwemafuta inobatanawo neiyo yakazara nharaunda kutonga kwesemiconductor mafekitori. Mumaworkshops makuru ekugadzira semiconductor, zvinhu zvakaita sekutanga uye kumira kwemasisitimu emhepo uye kupisa kwekupisa kwemasumbu emidziyo kunogona kukonzera kushanduka kwekushisa kwezvakatipoteredza. Kana iyo coefficient yekuwedzera kwekupisa kwefekitori pasi, zvigadziko zvemidziyo uye zvimwe zvivakwa zvakanyanyisa, kushanduka kwekushisa kwenguva refu kuchaita kuti pasi ritsemuka uye nheyo yemidziyo ishanduke, zvichikanganisa kurongeka kwemidziyo chaiyo senge photolithography michina uye etching michina. .
Nekushandisa zvigadziko zvegranite sezvitsigiro zvemidziyo uye nekuzvisanganisa nemidziyo yekuvakisa fekitori ine yakaderera thermal ekuwedzera coefficients, yakagadzikana nharaunda yekugadzira inogona kugadzirwa, ichidzikisa kuwanda kweiyo michina calibration uye mutengo wekugadzirisa unokonzerwa nemamiriro ekupisa kwemafuta, uye kuve nechokwadi chekushanda kwakasimba kwenguva refu kweiyo semiconductor yekugadzira mutsara. .
Iyo coefficient yekuwedzera kwekupisa inomhanya kuburikidza nehupenyu hwese hwese semiconductor kugadzira, kubva pakusarudzwa kwezvinhu, kutonga kwemaitiro kusvika pakurongedza uye kuyedzwa. Kukanganisa kwekuwedzera kwekupisa kunoda kunyatsotariswa mune yese link. Zvigadziko zvegranite, neadzo ekupedzisira-akaderera coefficient yekuwedzera kwekupisa uye zvimwe zvivakwa zvakanakisa, zvinopa hwaro hwemuviri hwakagadzikana hwekugadzira semiconductor uye inova vimbiso yakakosha yekusimudzira kuvandudzwa kwemaitiro ekugadzira chip kune yakakwira chaiyo.
Nguva yekutumira: May-20-2025