Mundima yekugadzira semiconductor, iyo inotsvaga kunyatsojeka, coefficient yekuwedzera kwekupisa ndeimwe yezvikamu zvikuru zvinokanganisa kunaka kwechigadzirwa uye kugadzikana kwekugadzirwa. Mukati memaitiro ese kubva paphotolithography, etching kusvika pakurongedza, mutsauko uripo mu coefficients yekuwedzera kwekupisa kwezvinhu unogona kukanganisa kunyatsogadzirwa nenzira dzakasiyana-siyana. Zvisinei, granite base, ine coefficient yayo yekuwedzera kwekupisa yakaderera, yave kiyi yekugadzirisa dambudziko iri.
Maitiro eLithography: Kushanduka kwemafuta kunokonzera kutsauka kwemaitiro
Photolithography idanho guru mukugadzirwa kwema semiconductor. Kuburikidza nemuchina we photolithography, mapatani edunhu ari pamasiki anotamisirwa pamusoro pewafer yakafukidzwa ne photoresist. Munguva iyi, manejimendi yekupisa mukati memuchina we photolithography uye kugadzikana kwetafura yebasa zvakakosha zvikuru. Tora zvinhu zvesimbi zvechinyakare semuenzaniso. Coefficient yavo yekuwedzera kupisa inenge 12×10⁻⁶/℃. Munguva yekushanda kwemuchina we photolithography, kupisa kunogadzirwa ne laser light source, optical lenses uye mechanical components zvichaita kuti tembiricha yemuchina ikwire ne5-10 ℃. Kana tafura yebasa yemuchina we lithography ichishandisa base yesimbi, base ine urefu hwemita imwe inogona kukonzera expansion deformation ye60-120 μm, izvo zvinotungamira kuchinjwa kwenzvimbo pakati pemasiki newafer.
Mumaitiro ekugadzira epamberi (akadai se3nm ne2nm), nzvimbo yetransistor inongova nanometers shoma. Kushanduka kudiki kwakadaro kwekupisa kwakakwana kukonzera kuti patani yephotolithography isarongeka, zvichikonzera kubatana kwetransistor kusina kujairika, mashort circuits kana ma open circuits, nezvimwe zvinetso, zvichikonzera kutadza kushanda kwemachip. Iyo thermal expansion coefficient yegranite base yakaderera se0.01μm/°C (kureva, (1-2) ×10⁻⁶/℃), uye kushanduka pasi pekuchinja kwetembiricha kwakafanana kunongova 1/10-1/5 chete yesimbi. Inogona kupa puratifomu yakagadzikana inotakura mutoro yemuchina wephotolithography, ichivimbisa kutamiswa kwakarurama kwepatani yephotolithography uye ichivandudza zvakanyanya goho rekugadzira machip.
Kucheka nekuisa: Zvinokanganisa kururama kwechimiro
Kucheka nekuisa zvinhu ndiwo maitiro akakosha ekuvaka zvivakwa zvemasekete ane mativi matatu pamusoro pewafer. Munguva yekucheka, gasi rinoita reactive rinopinda mumakemikari nechinhu chiri pamusoro pewafer. Panguva iyi, zvinhu zvakaita seRF power supply uye gasi rinodzora kuyerera kwemhepo mukati memuchina zvinogadzira kupisa, zvichiita kuti tembiricha yewafer nezvikamu zvemuchina zvikwire. Kana coefficient yekuwedzera kwekupisa kwewafer carrier kana base yemuchina isingaenderane neyewafer (coefficient yekuwedzera kwekupisa kwesilicon material inenge 2.6×10⁻⁶/℃), kushushikana kwekupisa kuchagadzirwa kana tembiricha ikachinja, izvo zvinogona kukonzera kuputika kudiki kana kutenderera pamusoro pewafer.
Rudzi urwu rwekuchinja ruchakanganisa kudzika kwekucheka uye kumira kwemadziro eparutivi, zvichiita kuti saizi yemigero yakachekwa, kuburikidza nemaburi nezvimwe zvivakwa zvisiyane nezvinodiwa zvekugadzira. Saizvozvowo, mukuita kwekuisa firimu rakatetepa, musiyano wekuwedzera kwekupisa unogona kukonzera kushushikana kwemukati mufirimu rakatetepa rakaiswa, zvichikonzera matambudziko akadai sekutsemuka nekubviswa kwefirimu, izvo zvinokanganisa mashandiro emagetsi uye kuvimbika kwenguva refu kwechip. Kushandiswa kwegranite bases ine thermal expansion coefficient yakafanana neye silicon materials kunogona kuderedza zvinobudirira thermal stress uye kuve nechokwadi chekugadzikana uye kururama kwemaitiro ekuisa nekuisa.
Danho rekurongedza: Kusawirirana kwekupisa kunokonzera matambudziko ekuvimbika
Muchikamu chekurongedza che semiconductor, kuenderana kwema coefficients ekuwedzera kwekupisa pakati pechip nezvinhu zvekurongedza (senge epoxy resin, ceramics, nezvimwewo) kwakakosha zvikuru. Coefficient yekuwedzera kwekupisa yesilicon, chinhu chikuru chemachips, yakaderera, nepo yezvakawanda zvezvinhu zvekurongedza yakakwira. Kana tembiricha yechip ikachinja panguva yekushandiswa, kushushikana kwekupisa kuchaitika pakati pechip nezvinhu zvekurongedza nekuda kwekusawirirana kwema coefficients ekuwedzera kwekupisa.
Kushushikana uku kwekupisa, pasi pemhedzisiro yekudzokororwa kwekupisa (senge kupisa nekutonhodza panguva yekushanda kwechip), kunogona kukonzera kuneta kwekutsemuka kwemajoini e solder pakati pechip ne substrate yekurongedza, kana kukonzera kuti waya dze bonding dziri pamusoro pechip dziwire pasi, zvichizoguma nekukundikana kwekubatana kwemagetsi kwechip. Nekusarudza zvinhu zve substrate yekurongedza zvine thermal expansion coefficient iri pedyo neye silicon materials uye kushandisa granite test platforms dzine kugadzikana kwakanaka kwekupisa kuti zvionekwe zvakarurama panguva yekurongedza, dambudziko rekusawirirana kwekupisa rinogona kuderedzwa zvinobudirira, kuvimbika kwepakeji kunogona kuvandudzwa, uye hupenyu hwebasa hwechip hunogona kuwedzerwa.
Kudzora nharaunda yekugadzira: Kugadzikana kwakarongeka kwemidziyo nezvivakwa zvefekitori
Pamusoro pekukanganisa zvakananga maitiro ekugadzira, chiyero chekuwedzera kwekupisa chakabatanawo nekudzora kwezvakatipoteredza kwemafekitori ema semiconductor. Mumaworkshop makuru ekugadzira ma semiconductor, zvinhu zvakaita sekutanga nekumira kwema air conditioning systems uye kupisa kwemidziyo zvinogona kukonzera kuchinja kwekupisa kwezvakatipoteredza. Kana chiyero chekuwedzera kwekupisa kwepasi pefekitori, mabhesi emidziyo nezvimwe zvivakwa chakanyanya kukwira, shanduko dzekupisa kwenguva refu dzichakonzera kuti pasi ritsemuke uye hwaro hwemidziyo huchinje, nokudaro zvichikanganisa kururama kwemidziyo chaiyo senge michina ye photolithography nemichina ye etching.
Nekushandisa mabhesi egranite sekutsigira michina uye kuasanganisa nezvinhu zvekuvaka zvefekitori zvine ma coefficients ekuwedzera kupisa kwakaderera, nzvimbo yekugadzira yakagadzikana inogona kugadzirwa, zvichideredza kuwanda kwekuongororwa kwemidziyo uye mari yekugadzirisa inokonzerwa nekushanduka kwekupisa kwezvakatipoteredza, uye kuve nechokwadi chekuti mutsetse wekugadzira we semiconductor unoshanda kwenguva refu.
Kuwanda kwekuwedzera kwekupisa kunofamba kuburikidza nehupenyu hwese hwekugadzira semiconductor, kubva pakusarudza zvinhu, kudzora maitiro kusvika pakurongedza uye kuyedza. Mhedzisiro yekuwedzera kwekupisa inofanirwa kutariswa zvakanyanya mune zvese zvinongedzo. Mabhesi egranite, ane chiyero chakaderera kwazvo chekuwedzera kwekupisa uye mamwe maitiro akanaka, anopa hwaro hwakasimba hwekugadzira semiconductor uye anova vimbiso yakakosha yekusimudzira kuvandudzwa kwemaitiro ekugadzira chip kusvika pakunyatsojeka.
Nguva yekutumira: Chivabvu-20-2025