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Mumunda wekugadzira semiconductor, iko kurongeka kwewafer yekuongorora michina inosarudza zvakananga mhando uye goho remachipisi. Senheyo inotsigira iyo yakakosha yekuona zvikamu, iyo dimensional kugadzikana kwemidziyo base material inoita basa rakakosha mukushanda kwenguva refu kwemidziyo. Granite uye simbi yakakandwa zvinhu zviviri zvinowanzoshandiswa zvigadziko zvewafer yekuongorora michina. Chidzidzo chekuenzanisa chemakore gumi chakaratidza kusiyana kwakakosha pakati pavo maererano nekugadzikana kwedimensional, zvichipa mareferensi akakosha ekusarudzwa kwemidziyo. .
Yekuedza Background uye Dhizaini
Iyo yekugadzira maitiro e semiconductor wafers ane zvakanyanyisa zvinodikanwa zvekuonekwa chaiko. Kunyangwe micrometer-level dimensional deviation inogona kutungamira mukudzikira kwechip performance kana kukwenya. Kuti uongorore kugadzikana kwegranite uye simbi yakakandwa panguva yekushandiswa kwenguva refu, timu yekutsvagisa yakagadzira zviedzo zvakateedzera nharaunda chaidzo dzekushanda. Granite nesimbi dzakakandwa samples dzezvakatsanangurwa zvakafanana zvakasarudzwa ndokuiswa mukamuri yezvakatipoteredza umo tembiricha yaichinja kubva pa15 ℃ kuenda pa35 ℃ uye mwando wakachinja kubva pa30% kusvika 70% RH. Iyo mechanical vibration panguva yekushanda kwemidziyo yakafananidzwa kuburikidza netafura yekudengenyeka. Izvo zvakakosha zviyero zvemasampuli zvakayerwa kota yega yega uchishandisa yakakwirira-chaiyo laser interferometer, uye iyo data yakaramba ichinyorwa kwemakore gumi. .
Kuedza mhedzisiro: Iyo yakakwana mukana wegranite
Makore gumi e data rekuyedza anoratidza kuti iyo granite substrate inoratidza kugadzikana kunoshamisa. Coefficient yayo yekuwedzera kwemafuta yakadzikira zvakanyanya, inongoita 4.6×10⁻⁶/℃ chete. Pasi pekuchinja kwakanyanya kwekushisa, iyo dimensional kutsauka inogara ichidzorwa mukati me ± 0.001mm. Mukutarisana nekushanduka kwehunyoro, chimiro chakaomarara chegranite chinoita kuti chiite kunge chisisabatike, uye hapana shanduko inoyerwa yedimensional inoitika. Munzvimbo yemechanic vibration, iwo akanakisa ekunyorovesa maitiro egranite anonyatso kutora simba rekuzunguza, uye dimensional fluctuation idiki zvakanyanya. .
Kusiyana neizvi, kune substrate yesimbi yakakandwa, iyo yepakati coefficient yekuwedzera kwekushisa inosvika 11 × 10⁻⁶/℃ - 13 × 10⁻⁶/℃, uye iyo yakanyanya dimensional kutsauka kunokonzerwa nekushanduka kwekushisa mukati memakore gumi ndeye ± 0.05mm. Munzvimbo ine mwando, simbi yakakandwa inoita ngura uye kuita ngura. Mamwe masampuli anoratidza deformation yenzvimbo, uye kutsauka kwedimensional kunowedzera. Pasi pechiito chemechanic vibration, simbi yakakandwa ine kushomeka kwekudedera kwekunyorovesa uye saizi yayo inochinja-chinja kazhinji, zvichiita kuti zviome kuzadzisa iyo yepamusoro-chaiyo zvinodiwa zvewafer yekuongorora. .
Chikonzero chakakosha chekusiyana kwekugadzikana
Granite yakaumbwa pamusoro pemazana emamiriyoni emakore kuburikidza ne geological process. Chimiro chayo chemukati chakaoma uye chakafanana, uye makristasi emaminerari akarongeka, achibvisa kushushikana kwemukati nemasikirwo. Izvi zvinoita kuti ive isinganzwe zvakanyanya kune shanduko mune zvekunze zvinhu senge tembiricha, humidity uye vibration. Cast iron inogadzirwa nekukanda maitiro uye ine microscopic hurema hwakadai semapores nemaburi ejecha mukati. Zvichakadaro, kushushikana kwakasara kunogadzirwa panguva yekukanda kunowanzokonzera shanduko yedimensional pasi pekukurudzira kwekunze kwezvakatipoteredza. Iyo metallic zvimiro zvesimbi yakakandwa inoita kuti iite ngura nekuda kwekunyorova, ichimhanyisa kukuvadzwa kwechimiro uye kuderedza dimensional kugadzikana. .
Iko kukanganiswa kwewafer yekuongorora michina
Wafer inspection midziyo yakavakirwa pagranite substrate, ine yakagadzikana dimensional performance, inogona kuve nechokwadi chekuti iyo yekuongorora system inochengetedza yakakwira kwenguva yakareba, inoderedza kufungirwa zvisirizvo uye kutadza kuona kunokonzerwa nekudonha kwemidziyo, uye kuvandudza zvakanyanya goho rechigadzirwa. Zvichakadaro, izvo zvakaderera zvekugadzirisa zvinodiwa zvinoderedza hupenyu huzere hwekutenderera mutengo wemidziyo. Zvishandiso zvinoshandisa simbi yakakandwa substrates, nekuda kwekusagadzikana kwedimensional, inoda kugara ichigadziriswa uye kugadzirisa. Izvi hazvingo wedzera mutengo wekushandisa chete asiwo zvinogona kukanganisa kunaka kwekugadzirwa kwesemiconductor nekuda kwekusakwana kwakaringana, zvichikonzera kurasikirwa kwehupfumi. .
Pasi pemaitiro eindasitiri semiconductor kutsvaga kwepamusoro uye kunaka kwemhando yepamusoro, kusarudza granite sechinhu chekutanga chewafer yekuongorora michina pasina mubvunzo idanho rehungwaru kuona kushanda kwemidziyo uye kuwedzera kukwikwidza kwemabhizinesi. .
Nguva yekutumira: May-14-2025