Mubasa rekugadzira ma semiconductor, kururama kwemidziyo yekuongorora mawafer kunosarudza zvakananga kunaka uye goho remachipisi. Sehwaro hunotsigira zvikamu zvekuongorora kwepakati, kugadzikana kwezvikamu zvemidziyo yepakutanga kunoita basa rakakosha mukushanda kwenguva refu kwemidziyo. Granite nesimbi yakakandwa zvinhu zviviri zvinoshandiswa zvakanyanya zvemidziyo yekuongorora mawafer. Chidzidzo chekuenzanisa chemakore gumi chakaratidza mutsauko mukuru pakati pazvo maererano nekugadzikana kwezvikamu, zvichipa mareferensi akakosha ekusarudza michina.
Kumashure uye Dhizaini Yekuyedza
Maitiro ekugadzira mawafer e semiconductor ane zvinodiwa zvakanyanya kuti aonekwe akarurama. Kunyangwe kutsauka kwe micrometer-level kunogona kukonzera kudzikira kwekushanda kwemachip kana kutokwesha. Kuti vaongorore kugadzikana kwe granite nesimbi yakakandwa panguva yekushandiswa kwenguva refu, timu yekutsvagisa yakagadzira kuyedza kwakatevedzera mamiriro chaiwo ekushanda. Samples dze granite nesimbi yakakandwa dzine specification imwechete dzakasarudzwa ndokuiswa mukamuri rezvakatipoteredza uko tembiricha yaichinja-chinja kubva pa15℃ kusvika 35℃ uye hunyoro hwaichinja kubva pa30% kusvika 70% RH. Kudengenyeka kwemuchina panguva yekushanda kwemidziyo kwakaenzaniswa kuburikidza netafura yekudengenyeka. Zviyero zvakakosha zvesamples zvaiyerwa kota yega yega uchishandisa laser interferometer yakanyatsojeka, uye data racho rairamba richirekodhwa kwemakore gumi.
Mhedzisiro yekuyedza: Kubatsira kukuru kwegranite
Makore gumi eruzivo rwekuyedza anoratidza kuti granite substrate inoratidza kugadzikana kunoshamisa. Kuwanda kwayo kwekuwedzera kwekupisa kwakaderera zvikuru, ichiita avhareji ye4.6×10⁻⁶/℃ chete. Kana tembiricha ikachinja zvakanyanya, kutsauka kwehukuru hwegranite kunogara kuchidzorwa mukati me ±0.001mm. Kana paine shanduko dzehunyoro, chimiro chayo chakasimba chinoita kuti isakanganiswe, uye hapana shanduko dzinoyerwa dzehukuru dzinoitika. Munzvimbo yekutenderera kwemechanical, hunhu hwakanaka hwekunyorova hwegranite hunonyatso tora simba rekudengenyeka, uye kuchinja kwehukuru hwehukuru kudiki kwazvo.
Kusiyana neizvi, kune substrate yesimbi yakakandwa, avhareji yekuwedzera kwayo kwekupisa inosvika 11×10⁻⁶/℃ - 13×10⁻⁶/℃, uye kutsauka kwakanyanya kunokonzerwa nekuchinja kwetembiricha mukati memakore gumi i±0.05mm. Munzvimbo ine hunyoro, simbi yakakandwa inogona kuita ngura uye ngura. Mimwe mienzaniso inoratidza kushanduka kwenzvimbo, uye kutsauka kwehukuru kunowedzera. Pasi pechiito chekudengenyeka kwemuchina, simbi yakakandwa haina simba rekudzivirira kudonha kwesimba uye saizi yayo inochinja-chinja kazhinji, zvichiita kuti zviome kusangana nezvinodiwa zvekuongorora wafer.
Chikonzero chakakosha chekusiyana kwekugadzikana
Granite yakagadzirwa kwemazana emamiriyoni emakore kuburikidza nemaitiro e geological. Maumbirwo ayo emukati akakora uye akafanana, uye makristaro emaminerari akarongwa zvakanaka, zvichibvisa kushushikana kwemukati nemasikirwo. Izvi zvinoita kuti isanyanya kunzwa shanduko dzekunze dzakadai sekupisa, hunyoro uye kudedera. Simbi yakagadzirwa nemaitiro ekukanda uye ine zvikanganiso zvidiki zvakaita semaburi nemaburi ejecha mukati. Panguva imwecheteyo, kushushikana kunobva panguva yekukanda kunogona kukonzera shanduko dzehukuru nekuda kwekukurudzirwa kwenzvimbo yekunze. Hunhu hwesimbi hwesimbi inoita kuti ive nengura nekuda kwehunyoro, zvichikurumidzisa kukuvara kwechimiro uye kuderedza kugadzikana kwehukuru.
Kukanganiswa kwemidziyo yekuongorora mawafer
Midziyo yekuongorora mawafer yakavakirwa pa granite substrate, ine mashandiro ayo akagadzikana, inogona kuve nechokwadi chekuti system yekuongorora inogara yakanyatsojeka kwenguva yakareba, kuderedza kusafunga zvakanaka uye kusaonekwa kunokonzerwa nekudonha kwekururama kwemidziyo, uye kuvandudza zvakanyanya goho rezvigadzirwa. Panguva imwecheteyo, zvinodiwa zvishoma zvekugadzirisa zvinoderedza mutengo wehupenyu hwese hwemidziyo. Midziyo inoshandisa substrates dzesimbi dzakagadzirwa, nekuda kwekugadzikana kwakashata kwehukuru, inoda kuongororwa nguva nenguva uye kugadziriswa. Izvi hazvingowedzera mari yekushandisa chete asiwo zvinogona kukanganisa mhando yekugadzirwa kwema semiconductor nekuda kwekusanyatsojeka, zvichikonzera kurasikirwa kwehupfumi.
Zvichitevera mafambiro eindasitiri yesemiconductor ekutsvaga kunyatsojeka uye mhando yepamusoro, kusarudza granite sechishandiso chekutanga chemidziyo yekuongorora wafer pasina mubvunzo inzira yekuchenjera yekuona kuti michina inoshanda zvakanaka uye kuwedzera kukwikwidzana kwemabhizinesi.
Nguva yekutumira: Chivabvu-14-2025