Pasi pezvinodiwa zvakasimba zvekunyatsojeka uye kuvimbika kwepamusoro muindasitiri yesemiconductor, kunyangwe granite iri imwe yezvinhu zvakakosha, zvimiro zvayo zvinounzawo zvimwe zvipimo. Izvi zvinotevera kusakanganiswa kwayo kukuru uye zvinonetsa mumashandisirwo anoshanda:
Kutanga, zvinhu zvacho zvakanyanya brittle uye zvakaoma kugadzirisa
Ngozi yekutsemuka: Granite ibwe rechisikigo rine masikirwo madiki-makororo uye mineral particle miganhu mukati, uye yakajairika brittle zvinhu. Mu-ultra-precision machining (sekukuya nanoscale uye yakaoma curved surface processing), kana simba risina kuenzana kana kuti maitiro ekugadzirisa asina kufanira, matambudziko akadai sekucheka uye microcrack propagation inowanzoitika, zvichiita kuti chikwekwe chebasa.
Kushanda kwakaderera kwekugadzirisa: Kuti udzivise brittle kuputsika, maitiro akakosha senge yakaderera-kumhanya kugaya nemadhaimani mavhiri ekukuya uye magnetorheological polishing inodiwa. The processing kutenderera 30% kusvika 50% kureba kupfuura simbi zvinhu, uye midziyo mari mari yakakwira (somuenzaniso, mutengo shanu-akisi linkage machining centre inodarika mamiriyoni gumi Yuan).
Yakaoma magadzirirwo zvimisikidzo: Zvakaoma kugadzira isina huremu zvimiro kuburikidza nekukanda, kuumba uye mamwe maitiro. Inonyanya kushandiswa mune akareruka maumbirwo ejometri senge mahwendefa uye zvigadziko, uye kushandiswa kwayo kunogumira mumidziyo inoda tsigiro dzisina kujairika kana kubatanidzwa kwepombi yemukati.
Chechipiri, high density inotungamirira kumutoro unorema pamidziyo
Inonetsa kubata nekuisa: Kuwanda kwegranite kunosvika 2.6-3.0 g/cm³, uye huremu hwayo hunokwana 1.5-2 nguva yesimbi yakakandwa pasi pevhoriyamu imwe chete. Semuenzaniso, huremu hwechigadziko chegranite chemuchina wephotolithography hunogona kusvika pamatani mashanu kusvika gumi, zvinoda michina yekusimudza yakatsaurirwa uye nheyo-dzinovhundutsa, izvo zvinowedzera mutengo wekuvaka fekitori uye kutumirwa kwemidziyo.
Dynamic response lag: High inertia inodzikamisa kukurumidza kwezvikamu zvinofamba zvemidziyo (senge wafer transfer marobhoti). Mumamiriro ezvinhu apo kukurumidza kutanga uye kumira kunodiwa (senge yakakwira-kumhanya yekuongorora michina), inogona kukanganisa rhythm yekugadzira uye kuderedza kushanda zvakanaka.
Chechitatu, mutengo wekugadzirisa uye kudzokorora wakakwira
Kukanganisa kwakaoma kugadzirisa: Kana kukuvara kwepamusoro kana kudhumhana kukaitika panguva yekushandiswa, inoda kudzoserwa kufekitori kuti igadziriswe kuburikidza nemidziyo yekukuya, iyo isingagone kubatwa nekukurumidza panzvimbo. Mukupesana, zvikamu zvesimbi zvinogona kugadziriswa nekukasira kuburikidza nenzira dzakadai seyekushitera uye laser cladding, zvichikonzera kupfupika kwenguva.
Iyo dhizaini iteration cycle yakareba: Misiyano mumasikirwo egranite veins inogona kukonzera kuchinjika kudiki muzvinhu zvemukati (senge thermal yekuwedzera coefficient uye damping ratio) yemabhechi akasiyana. Kana magadzirirwo emidziyo akachinja, zvivakwa zvezvinhu zvinofanirwa kuenzaniswazve, uye tsvakiridzo nekusimudzira yekuongorora kutenderera kwakarebesa.
Iv. Zvishandiso Zvishoma uye Matambudziko Ezvakatipoteredza
Matombo echisikigo haagone kudzokororwa: Yepamusoro-mhando granite (yakadai se "Jinan Green" uye "Sesame Nhema" inoshandiswa mumasemiconductors) inotsamira pane chaiwo tsinga, ine mashoma matura uye migodhi yayo inorambidzwa nemitemo yekuchengetedza kwezvakatipoteredza. Nekuwedzera kweiyo semiconductor indasitiri, panogona kuve nenjodzi yekusagadzikana yekupihwa kwezvinhu.
Kugadzirisa nyaya dzekusvibiswa: Panguva yekucheka nekukuya maitiro, huwandu hukuru hweguruva regranite (rine silicon dioxide) rinogadzirwa. Kana isina kubatwa nemazvo, inogona kukonzera silicosis. Uyezve, mvura yetsvina inoda kurapwa nesedimentation isati yaburitswa, ichiwedzera kuchengetedza kwezvakatipoteredza.
Shanu. Kusakwana kuenderana nemaitiro ari kubuda
Vacuum nharaunda zvinogumira: Mamwe ma semiconductor maitiro (akadai sevacuum coating uye electron beam lithography) inoda kuchengetedza yakakwira vacuum state mukati memidziyo. Nekudaro, iwo madiki-pores ari pamusoro pegranite anogona adsorb gasi mamorekuru, ayo anoburitswa zvishoma nezvishoma uye anokanganisa kugadzikana kweiyo vacuum degree. Naizvozvo, kuwedzera kwepamusoro densification kurapwa (senge resin impregnation) inodiwa.
Electromagnetic kuenderana nyaya: Granite chinhu chinodzivirira. Mumamiriro ezvinhu apo static magetsi ekubuda kana electromagnetic shielding inodiwa (senge wafer electrostatic adsorption mapuratifomu), marata esimbi kana mafirimu ekuitisa anofanirwa kusanganiswa, kuwedzera kuoma kwechimiro uye mutengo.
Indasitiri mhinduro nzira
Pasinei nekukanganisa kwataurwa pamusoro, iyo semiconductor indasitiri yakagadziridza kushomeka kwegranite kuburikidza nehunyanzvi hwekuvandudza tekinoroji:
Composite chimiro dhizaini: Inotora musanganiswa we "granite base + simbi furemu", ichifunga zvese kusimba uye kusareruka (semuenzaniso, imwe photolithography yemuchina wekugadzira inonyudza chimiro chealuminium alloy mujinga regranite, ichidzikisa huremu ne40%).
Artificial synthetic alternative materials: Gadzira ceramic matrix composites (senge silicon carbide ceramics) uye epoxy resin-based artificial matombo kutevedzera kugadzikana kwekupisa uye kudzungudza kuramba kwegranite, uku uchiwedzera kugadzirisa kuchinjika.
Intelligent yekugadzirisa tekinoroji: Nekuunza AI algorithms kukwidziridza nzira yekugadzirisa, kudzvinyirira simulation kufanotaura njodzi dzekutsemuka, uye kubatanidza kutariswa kwepamhepo kugadzirisa maparamendi munguva chaiyo, chiyero chekugadzirisa chakaderedzwa kubva pa5% kusvika pazasi 1%.
Summary
Iko kukanganisa kwegranite muindasitiri yesemiconductor kunobva pamutambo pakati pezvimiro zvayo zvechisikigo uye zvinodiwa mumaindasitiri. Nekufambira mberi kwetekinoroji uye nekuvandudzwa kwezvimwe zvekushandisa, mamiriro ekushandisa ayo anogona kudzikira zvishoma nezvishoma akananga ku "isingadzokerike musimboti mareferensi zvikamu" (senge hydrostatic gwara renjanji yemashini ephotolithography nemapuratifomu ekuyera ekupedzisira-chaiyo), zvishoma nezvishoma zvichipa nzira kune zvimwe zvinochinjika zveinjiniya mune zvisiri-yakakosha zvimiro zvikamu. Mune ramangwana, maitiro ekuenzanisa kuita, mutengo uye kusimudzira ichave nyaya iyo indasitiri inoenderera mberi nekuongorora.
Nguva yekutumira: May-24-2025