Granite chinhu chinozivikanwa muindasitiri yekugadzira wafer nekuda kwehunhu hwayo hwemakanika uye kugara kwenguva refu. Idombo rechisikigo rinocherwa kubva kumagodhi pasi rese uye rave richishandiswa kwemazana emakore pakuvaka kwakasiyana-siyana, kusanganisira kugadzira michina ye semiconductor. Muchinyorwa chino, tichakurukura hunhu hwegranite uye mashandisirwo ayo akasiyana-siyana mumichina yekugadzira wafer.
Zvimiro zveGranite
Granite idombo rine igneous rinoumbwa ne mica, feldspar, uye quartz. Rinozivikanwa nesimba raro rakasiyana, kuomarara, uye kugara kwenguva refu, zvichiita kuti rive chinhu chakakodzera kushandiswa chinoda kunyatsorongeka uye kururama. Granite ine coefficient yakaderera yekuwedzera kwekupisa, zvinoreva kuti haikurumidzi kana kupwanyika nekuda kwekuchinja kwetembiricha, zvichiita kuti rigare rakagadzikana. Pamusoro pezvo, granite inodzivirira ngura uye makemikari, izvo zvinoita kuti ive chinhu chakakodzera kushandiswa munzvimbo dzakaoma.
Mashandisirwo eGranite muWafer Processing Equipment
Granite chinhu chinoshandiswa zvakanyanya muindasitiri yekugadzira wafer nekuda kwemusanganiswa wayo wakasiyana wehunhu hwayo. Izvi zvinotevera ndezvimwe zvezvinoshandiswa negranite mumichina yekugadzira wafer:
1. Zvishandiso zveMetrology
Granite inowanzoshandiswa mukugadzira zvishandiso zvemetrology, zvakaita semichina yekuyera zvinhu (CMMs) uye masisitimu ekuyera optical. Zvishandiso izvi zvinoda nzvimbo dzakagadzikana dzinogona kudzivirira kudedera nekupisa. Kuoma kwakanyanya uye kuwedzera kupisa kwakaderera kwegranite kunoita kuti ive chinhu chakanakira kushandiswa kwakadaro.
2. Machuki eWafer
Machuck eWafer anoshandiswa kubata mawafer panguva yekugadzira. Machuck aya anoda nzvimbo yakati sandara uye yakagadzikana kudzivirira wafer kuti isakotame kana kukotama. Granite inopa nzvimbo yakati sandara yakasimba uye inodzivirira kukotama, zvichiita kuti ive chinhu chakanaka chewafer chucks.
3. Zvishandiso zveKupukuta Michina yeMakemikari (CMP)
Zvishandiso zveCMP zvinoshandiswa kupukuta mawafer panguva yekugadzira. Zvishandiso izvi zvinoda puratifomu yakagadzikana inogona kudzivirira kudedera nekupisa. Kuomarara kwakanaka uye kuwedzera kupisa kwakaderera kwegranite kunoita kuti ive chinhu chakanakira zvishandiso zveCMP.
4. Midziyo yekuongorora Wafer
Midziyo yekuongorora mawafer inoshandiswa kuongorora mawafer kuti aone kana paine zvikanganiso. Zvishandiso izvi zvinoda nzvimbo yakagadzikana uye yakati sandara kuti ive nechokwadi chekuti zviyero zvakarurama. Granite inopa nzvimbo yakagadzikana uye yakati sandara inodzivirira kupetwa, zvichiita kuti ive chinhu chakanakira michina yekuongorora mawafer.
Mhedziso
Mukupedzisa, granite chinhu chinoshandiswa zvakanyanya muindasitiri yekugadzira wafer nekuda kwehunhu hwayo hwemakanika uye kugara kwenguva refu. Inowanzoshandiswa mukugadzira maturusi emetrology, wafer chucks, maturusi eCMP, uye michina yekuongorora wafer. Musanganiswa wakasiyana wehunhu hwayo unoita kuti ive chinhu chakanakira mashandisirwo anoda kunyatsojeka uye kururama. Nekubatsira kwayo kwakawanda, granite ichiri sarudzo yakakurumbira yemidziyo yekugadzira wafer, uye kushandiswa kwayo kunogona kuramba kuchikura mune ramangwana.
Nguva yekutumira: Zvita-27-2023