Granite chinhu chakakurumbira muindasitiri yekugadzira wafer nekuda kweiyo yakasarudzika makina zvivakwa uye kusimba.Ibwe rechisikigo rinocherwa kubva kumatombo pasi rose uye rakashandiswa kwemazana emakore nekuda kwezvinangwa zvakasiyana-siyana zvekuvaka, kusanganisira kugadzira michina yesemiconductor.Muchikamu chino, tichakurukura zvimiro zvegranite uye mashandisirwo ayo akasiyana muwafer processing equipment.
Zvivakwa zveGranite
Granite idombo regneous iro rinoumbwa nemica, feldspar, uye quartz.Iyo inozivikanwa nekuda kwesimba rayo rakasiyana, kuoma, uye kusimba, zvichiita kuti ive chinhu chakanakira maapplication ayo anoda kurongeka kwepamusoro uye huchokwadi.Granite ine yakaderera coefficient of thermal kuwedzera, izvo zvinoreva kuti haina kuwedzera kana chibvumirano nekuda kwekushanduka kwekushisa, zvichiita kuti inyatsogadzikana.Pamusoro pezvo, granite inoshingirira mukuora uye makemikari, izvo zvinoita kuti ive chinhu chakanakira kushandiswa munzvimbo dzakaoma.
Zvishandiso zveGranite muWafer Processing Equipment
Granite chinhu chinoshandiswa zvakanyanya muindasitiri yekugadzira wafer nekuda kwekusanganiswa kwayo kwezvivakwa.Zvinotevera ndezvimwe zvekushandiswa kwegranite muwafer processing equipment:
1. Metrology Zvishandiso
Granite inowanzo shandiswa mukugadzira maturusi emetrology, akadai semichina yekuyeresa (CMMs) uye optical kuyerwa masisitimu.Zvishandiso izvi zvinoda nzvimbo dzakagadzikana dzinogona kuramba kuzunguzika uye kupisa.Iyo yakanyanya kuomarara uye yakaderera kupisa kwekuwedzera kwegranite inoita kuti ive chinhu chakanakira maapplication akadaro.
2. Wafer Chucks
Wafer chucks anoshandiswa kubata wafers panguva yekugadzira.Aya machucks anoda nzvimbo yakati sandara uye yakatsiga kudzivirira wafer kubva mukutenderera kana kukotama.Granite inopa nzvimbo yakati sandara iyo yakagadzikana zvakanyanya uye isingaenderere kuhondo, ichiiita yakanakisa zvinhu zvewafer chucks.
3. Chemical Mechanical Polishing (CMP) Zvishandiso
Zvishandiso zveCMP zvinoshandiswa kupurisa mawafer panguva yekugadzira.Zvishandiso izvi zvinoda chikuva chakatsiga chinogona kuramba kutenheka uye kupisa.Kuomarara kwakanyanya uye kuderera kwekuwedzera kwemafuta egranite kunoita kuti ive chinhu chakanakira CMP maturusi.
4. Wafer Inspection Equipment
Wafer yekuongorora michina inoshandiswa kuongorora mawaferi ehurema uye nekukanganisa.Zvishandiso izvi zvinoda nzvimbo yakagadzikana uye yakati sandara kuti ive nechokwadi chekuyerwa chaiko.Granite inopa yakagadzika uye yakati sandara nzvimbo isingaenderane nehondo, ichiita kuti ive yakanakira zvinhu zvewafer yekuongorora michina.
Mhedziso
Mukupedzisa, granite chinhu chinoshandiswa zvakanyanya muindasitiri yekugadzira wafer nekuda kweakasarudzika makinika zvivakwa uye kusimba.Inowanzo shandiswa mukugadzira metrology maturusi, wafer chucks, CMP maturusi, uye wafer yekuongorora michina.Iyo yakasarudzika musanganiswa wezvivakwa inoita kuti ive yakanakira zvinhu zvekushandisa zvinoda kurongeka kwepamusoro uye kurongeka.Nemabhenefiti ayo mazhinji, granite inoramba iri sarudzo yakakurumbira yewafer processing equipment, uye kushandiswa kwayo kungangoramba kuchikura mune ramangwana.
Nguva yekutumira: Zvita-27-2023