Chii chinonzi Wafer Processing Equipment granite zvikamu?

Wafer processing equipment inoshandiswa mune semiconductor kugadzira process kushandura silicon wafers kuita akabatanidzwa maseketi.Inosanganisira huwandu hwemakina akaomesesa uye zviridzwa zvinoshandiswa kuita akati wandei akakosha mabasa, anosanganisira wafer kuchenesa, etching, deposition, uye kuyedza.

Granite zvikamu zvakakosha zvikamu zvewafer processing equipment.Izvi zvikamu zvinogadzirwa negireniti yechisikigo, inova dombo regneous rinoumbwa nequartz, feldspar, uye mica.Granite yakanakira kugadzira wafer nekuda kweiyo yakasarudzika mechanical, thermal, uye chemical properties.

Mechanical properties:

Granite chinhu chakaomarara uye chakaomerwa chinoramba kupfeka uye deformation.Iine huremu hwepamusoro-kusvika-huremu, zvinoreva kuti inogona kumira mitoro inorema pasina kuputika kana kuputsa.Ichi chivakwa chinoita kuti ive sarudzo yakanakisa yemhando yepamusoro-chaiyo zvinhu zvinoda kurongeka kwakanyanya.

Thermal properties:

Granite ine yakaderera coefficient of thermal kuwedzera, izvo zvinoreva kuti haina kuwedzera kana chibvumirano zvakanyanya kana yasangana nekushanduka kwekushisa.Ichi chivakwa chinoita kuti ive chinhu chakanakira kushandiswa muwafer processing equipment, uko kutonga kwekushisa kwakakosha.

Chemical properties:

Granite inodzivirira zvakanyanya kumakemikari ekuora, izvo zvinoita kuti ive yakakodzera kushandiswa munzvimbo dzakaoma dzemakemikari.Iyo haiite nemaasidhi mazhinji, mabhesi, kana zvinonyungudutsa, izvo zvinoita kuti ive sarudzo yakanakisa yemakemikari etching maitiro anoshandiswa mukugadzira wafer.

Granite components chinhu chakakosha chewafer processing equipment.Iwo anoshandiswa mune akati wandei maitiro akakosha, anosanganisira wafer kuchenesa, etching, uye deposition.Vanopa chikuva chakasimba uye chakasimba chemidziyo, iyo inovimbisa mhedzisiro yakarurama uye yakavimbika.

Muchidimbu, michina yekugadzira wafer yakakosha pakugadzirwa kwemaseketi akabatanidzwa, uye zvikamu zvegranite zvinoita basa rakakosha mukushanda kwayo.Izvi zvikamu zvinogadzirwa neakasikwa granite, iyo inopa yakasarudzika mechini, inopisa, uye makemikari zvimiro izvo zvakanakira kugadzira wafer.Zvikamu zvegranite zvinopa chikuva chakasimba uye chakasimba chemidziyo, iyo inovimbisa mhedzisiro yakarurama uye yakavimbika.