Mukugadzirwa kwema semiconductor, metrology yepamusoro, uye kugadzirwa kwakanyatsojeka, kudiwa kwekugadzikana, kururama, uye kufamba kusina kudedera kwasvika padanho risingachakwanisi kusangana nezvivakwa zvechinyakare zvemuchina. Kuchinja uku kuri kukurudzira mapoka einjiniya epasi rose kuti aongororezve zvinhu nemapuratifomu ekufamba anotsigira michina yavo inonyanya kusimba. Nekuda kweizvozvo, masisitimu akavakirwa pagranite—akadai sekugadzira granite chaiyo, mapuratifomu makuru ekuongorora granite, Vertical Linear Stages Granite Stages, uye magadzirirwo eGranite Air Bearing Stage epamusoro—ari kuva akakosha mumaindasitiri ane kururama kwakanyanya. Kunzwisisa kuti nei zvivakwa izvi zvichikosha, uye kuti zvinotsigira sei mashandisirwo akaita sewafer inspection, kwakakosha kune vagadziri vanokwikwidza padanho repamusoro rekururama.
Chinhu chikuru chinobatsira granite chinotanga nehunhu hwayo hwepanyama. Kusiyana nezvivakwa zvesimbi zvinounza kushushikana kwemukati, zvinotambura nekuwedzera kwekupisa, kana kutumira kudedera, granite yemhando ye black metrology inoramba yakagadzikana zvechisikigo. Kugadzikana uku kunobvumira mainjiniya kuvaka mapuratifomu akati sandara, akaomarara zvakanyanya anokwanisa kutakura mitoro inorema pasina kukanganisa kururama. Kana ikashandiswa sehwaro hukuru hwekuongorora granite, chinhu ichi chinopa mhando yehunhu hwakakwana hunodiwa kune maturusi e semiconductor, masisitimu ekuyera optical, uye mayuniti ekuongorora otomatiki anoshanda nguva dzose munzvimbo dzinoda simba.
Munyika yemasisitimu ekufamba, granite yatove kure nebasa rayo senheyo yemuchina usingashande. Nhasi, inoshanda semusana wechimiro cheVertical Linear Stages Granite Stages, uko kufamba kwakanyatsojeka muZ-axis kunofanirwa kudzokororwa pamazinga e-sub-micron kana kunyange nanometer. Matanho aya anowanzo sanganisira tekinoroji yemhepo, zvichiita kuti kufamba kusingakanganisike kunokosha kuti kuve nekururama kwenguva refu. Danho reGranite rakagadzirwa zvakanaka rinobvisa kugadzirwa kwekupisa uye kusakara kwemuchina, zvinhu zviviri zvinowanzo deredza hupenyu uye kuvimbika kwemapuratifomu ekufamba kwakanyatsojeka.
Mabheya emhepo anomiririra chimwe chezvinhu zvakakosha zvikuru zvinotungamira shanduko iyi. Gwaro reGranite Air Bearing rinopa nzvimbo inotungamira yepamusoro inokwanisa kutsigira kufamba kwakapfava, kusina kubata. Kana yakabatanidzwa muGranite Air Bearing Stage, sisitimu inogona kuchengetedza kufamba kwakasimba pasina kukanganisa kushoma kwekutevera, kunyangwe pasi pekumhanya kwakanyanya kana kutenderera kwenguva refu. Kugona uku kwakakosha zvikuru mukugadzira semiconductor, uko wafer alignment, overlay accuracy, uye micro-pattern scanning zvinoda kufamba kwakasimba zvakanyanya muma axes ese. Kusanganiswa kwekugadzikana kwegranite uye kufamba kwemhepo kwave kuonekwa sechiratidzo mukugadzira michina yepamusoro-soro.
Kufambira mberi uku kwave nemhedzisiro huru muindasitiri ye semiconductor, kunyanya mukuongorora mawafer. Masisitimu ekuongorora anofanirwa kusiyanisa vibration, kuchengetedza flat yakakwana, uye kupa kudzora kufamba kusina kukanganisa uku uchibata mawafer akapfava pa nanometer-level tolerances. Chimiro chakavakirwa pagranite chinopa hwaro hunoita kuti izvi zvikwanisike. Kuwanda kwezvinhu izvi kunotora micro-vibrations kubva kumota, michina yakakomberedza, uye kunyange zvinhu zvezvakatipoteredza, zvichiita kuti masisitimu e optical anzwe anowana puratifomu yakachena uye yakagadzikana yekushanda nayo. Sezvo ma node ekugadzira achiderera uye zvinodiwa zvekuongorora zvichiwedzera kuoma, masisitimu ekufamba anotsigirwa negranite ari kuratidza kukosha kuchengetedza goho uye kuchengetedza kusimba kwewafer.
Kune vanovaka michina, kukosha kwezvivakwa zvegranite kunopfuura zvakanakira zvekushandisa. Kufambira mberi kwekubatanidza granite nemazvo kunoreva kuti mafuremu emuchina akaomarara, zvinhu zvinoiswa mukati, matanho ekudzika pasi, uye nhungamiro dzemhepo zvinogona kugadzirwa sechivakwa chakabatana. Izvi zvinoderedza nguva yekubatanidza, zvinobvisa matambudziko ekuenderana, uye zvinoita kuti muchina wekupedzisira urambe wakagadzikana kwenguva refu. Nekuvandudzwa kuri kuramba kuchiitwa muhunyanzvi hwekugadzira, zvikamu zvegranite zvinogona kugadzirwa nekutsungirira kwakasimba, zvichiita kuti chinhu chacho chikwane kune michina yesemiconductor neoptical yechizvarwa chinotevera.
Chimwe chinhu chinoita kuti granite ishandiswe muEurope, United States, neAsia inyaya yekuti granite inogara kwenguva refu. Kusiyana nezvinhu zvesimbi zvinoda kuputirwa, kunyoroveswa, kana kugadziriswa kakawanda, granite inochengetedza kunaka kwayo pamusoro pasina kugadziriswa kwakanyanya. Kana ikashandiswa paGranite stage kana pachigadziko chikuru chekuongorora, kuramba kwechinhu ichi kuchinjika kunoita kuti sisitimu ishande zvakanaka kwemakore mazhinji ekushandiswa. Kumakambani ane chekuita nemutengo wehupenyu, kugadzikana uku kwenguva refu kunopa kudzoka kunoyerwa pakudyara.
Sezvo maindasitiri achifambira mberi kune mwero wepamusoro wekururama, granite iri kuramba ichizivikanwa sehwaro hwekugadzira zvinhu zvakagadzikana zvikuru. Ingave inotsigira danho rekutakura mhepo rinomhanya zvakanyanya kana kugadzira hwaro hwemuchina wekuongorora wakarurama zvakanyanya, granite inoita kuti mashandiro ayo asakanganiswe nekuchinja kwezvakatipoteredza kana kushushikana kwemakanika. Nekukura kwekudiwa kwe semiconductor, kuwedzera kwe automation, uye matekinoroji epamusoro e optical, kukosha kwemapuratifomu akavakirwa pa granite kucharamba kuchikwira.
ZHHIMG inoramba yakazvipira kusimudzira kugona kwekugadzirisa granite nemazvo. Kuburikidza nemaitiro ekugadzira akanyatsogadziriswa, kutonga kwakasimba kweISO, uye kuvandudzwa kuri kuitwa kwezvivakwa zvakagadzirwa zvakaita sekugadzira granite nemazvo, Granite Air Bearing Stage, uye Vertical Linear Stages Granite Stages, kambani inotsigira vatengi vanovimba nekururama kwakakwana mumabasa akakosha. Sezvo kuongororwa kwewafer, nanometer metrology, uye automation yepamusoro-soro zvichichinja, granite icharamba iri pakati peinjiniya yemazuva ano yemazvo—inovimbwa nekugadzikana kwayo, kugara kwayo zvakanaka, uye kushanda kwayo.
Nguva yekutumira: Mbudzi-28-2025