Mumakamuri akanyarara kwazvo pasi pano—mafekitori ekugadzira ma semiconductor—hondo yakanyarara iri kurwiwa nemuvengi asingaonekwe: kudedera. Sezvo indasitiri yepasi rose ye microelectronics iri kufamba ichienda kumiganhu ye logic gate ye 2nm zvichikwira, kushivirira kusagadzikana kwemakanika kwapera. Munzvimbo idzi dzakamanikidzwa, dzakadzorwa zvakanyanya, mashandiro e lithography kana metrology tool yemamiriyoni akawanda emadhora akabatanidzwa zvakanyanya pasi payo. Ndokusaka kudiwa kwegranite isina vibration ye fabzvivakwa zvashanduka kubva pakuva zvemhando yepamusoro kuita chinhu chakakosha pakugadzirisa goho.
Masisitimu echinyakare ekuparadzanisa ma "vibration isolation" anowanzo tarisa pama "active air bearings" kana "complex electronic damping". Zvisinei, nyanzvi dzeinjiniya dzakanyanya kusimba muEurope neNorth America dzinoziva kuti masisitimu anoshanda chete se "passive stability" ye "base" yavo. Granite yechisikigo, kunyanya kana yagadziriswa kuita semiconductor grade granite surface plate standard, inopa huwandu hwemamorekuru ayo zvinhu zvekugadzira zvinonetseka kutevedzera. Maumbirwo ekristalline ema "gabbro" ne "granite deposits" eZHHIMG akasarudzwa anoshanda se "natural low-pass filter", achitora simba re "high-frequency micro-acoustic" risati ragona kushandurwa kuita "tool-tip displacement".
Patinokurukura nezvendiro yepamusoro yegranite yegiredhi re semiconductor, tiri kutaura nezvedanho rekunyatsojeka rinopfuura metrology yakajairwa yeindasitiri. Muworkshop yakajairika, plate yeGiredhi 00 ingakwana pakutarisa zvikamu zvemakanika. Mumamiriro ezvinhu e semiconductor, mainjiniya eZHHIMG anofanirwa kufunga nezvekururama kwevolumetric, hygroscopy yepamusoro, uye kugadzikana kwezviyo kwenguva refu. Chero kuchinja kweibwe ne microscopic mumakore mashanu kunogona kutungamira mukurasikirwa kukuru kwekutarisa muEUV (Extreme Ultraviolet) scanner. Nokudaro, kugadzirisa kwedu kunosanganisira nguva yakaoma yekurerutsira kushushikana, zvichibvumira dombo kusvika padanho re geological equilibrium risati ratanga kurongeka kwekupedzisira kwekunyatsojeka.
Kukosha kwegranite isina vibration ye fabKushandiswa kwacho kuri kuwedzerwa nekuwedzera kwezvinodiwa zvekugadzirwa kwewafer yemazuva ano. Mota dzinomhanya zvakanyanya, dzinofambisa matanho ewafer nekukurumidza kunoshamisa, dzinogadzira masimba akakosha ekuita basa. Pasina hwaro hukuru, husina simba, uye hunoderedza kudedera, masimba aya anogadzira kutenderera kunosara kunoda "nguva yekugadzikana" pakati pezviyero. Nekushandisa mhinduro yegranite ine mass akawanda yeZHHIMG, vashandisi vemafab vanogona kuderedza zvakanyanya nguva iyi yekugadzikana, vachishandura zvakananga kuita wafer dzakawanda paawa uye mutengo wakaderera wekuva muridzi.
Zvinhu zvakatipoteredza zviri muchimiro chemba zvinoitawo basa rakakosha mukusarudza zvinhu. Imba yekugezera inzvimbo inonyanya kugadzikana apo kuchinja-chinja kwekupisa, zvisinei nekuti kudiki, kunogona kukonzera kuti zvinhu zviwedzere kana kupfupika. ZHHIMG'sndiro yepamusoro yegranite yegiredhi re semiconductorzvigadzirwa zvinosarudzwa nekuda kwekuwedzera kwekupisa kwakaderera zvakanyanya (CTE). Kana zvikabatanidzwa netekinoroji yedu yekubatanidza nzira yekutonhodza, mabhesi aya egranite anopa puratifomu isingachinji-chinji yekupisa iyo inochengetedza kupfava kwayo pasinei nekupisa kunogadzirwa nezvinhu zvemagetsi zviri pamusoro payo.
Tichitarisa mafambiro eindasitiri yakakura, kuchinja kuenda ku300mm uye saizi dzewafer dze450mm dzinokwanisa kuita zvinoda zvikamu zvakakura uye zvakagadzikana zvechivakwa. Chiyero ichi chinopa dambudziko reinjiniya rakasiyana: kuchengetedza kutsetseka kwakakwana pamusoro penzvimbo yakakura uku uchiita shuwa kuti dombo rinoramba "risina kudedera." ZHHIMG yakagadzirisa izvi nekudyara mumichina yakagadzirwa, yakakura yeCNC yekukuya uye yekurovera inogona kuwana kushivirira kwe micron-level mumamita akati wandei ematombo. Izvi zvinoita kuti sezvo michina yakagadzirwa ichikura muhukuru, kugadzikana kwenheyo hakuderedzi.
Kupfuura hardware, pfungwa dzeZHHIMG dzakadzika midzi mukujeka kwehunyanzvi uye kushandira pamwe chete kwemainjiniya. Tinonzwisisa kuti kune OEM (Original Equipment Manufacturer) muUnited States kana European Union, kuvimbika kwecheni yekugovera kwakakosha sekusimba kwedombo. Magwaro edu ekudzora hunhu anopa "chitupa chekuzvarwa" chakazara chechinhu chimwe nechimwe chegranite isina vibration ye fabkuendeswa, kutsanangura kwakabva dombo, kuumbwa kwemineral, uye mhedzisiro yekuyedzwa kwe ultrasonic. Iyi nhanho yekusimbisa inoita kuti kana hwaro hweZHHIMG hwaiswa, huve chinhu chinogara chiripo uye chakavimbika chenhaka yefab.
Sezvo njere dzekugadzira nemakombiyuta ane simba repamusoro zvichikonzera mari itsva yekudyara mumasemiconductor, kutsvaga nzvimbo "yakanyarara zvakakwana" kuri kuenderera mberi. ZHHIMG inoramba yakazvipira kune izvi, ichivandudza hunyanzvi hwekuenzanisa matombo kuti igadzirise matambudziko ezvimiro zve nano zvemangwana. Tinotenda kuti ramangwana retekinoroji rakavakirwa pahwaro hwakasimba, uye tinodada nekupa mhinduro dzakagadzikana, dzemhando yepamusoro dzegranite surface plate kune vagadziri venguva yedhijitari.
Kubatanidzwa kwedombo reZHHIMG rekugadzirisa zvinhu muchivako hakusi kungosarudza chivakwa chete—kuzvipira kune mwero wepamusoro-soro wekuongorora zvinhu. Sezvo indasitiri iri kutarisa kumakore gumi anotevera ekugadzira zvinhu zvitsva, kuvapo kwakanyarara uye kusingazununguki kwegranite rekugadzirisa zvinhu kucharamba kuri gamba rakanyarara rekubudirira kwewafer goho.
Nguva yekutumira: Kurume-05-2026