Muchikamu chakakosha chekugadzira chip - wafer scanning, iko kurongeka kwemidziyo kunosarudza kunaka kwechip. Sechikamu chakakosha chemidziyo, dambudziko rekuwedzera kwekupisa kweiyo granite muchina base rakwezva kutarisisa kwakawanda.
Iyo coefficient yekuwedzera kwekupisa kwegranite kazhinji iri pakati pe4 ne8 × 10⁻⁶/℃, iyo yakaderera zvakanyanya kupfuura yesimbi uye marble. Izvi zvinoreva kuti kana tembiricha yachinja, kukura kwayo kunochinja zvishoma. Zvisinei, zvinofanira kuonekwa kuti kuwedzera kwekushisa kwepasi hakurevi kuti hakuna kuwedzera kwekushisa. Pasi pekuchinja kwakanyanya kwekushisa, kunyangwe kuwedzera kudiki kunogona kukanganisa nanoscale kurongeka kwewafer scanning.
Munguva yewafer scanning process, pane zvikonzero zvakawanda zvekuitika kwekuwedzera kwekupisa. Kuchinja kwetembiricha mumusangano, kupisa kunoitwa nekushanda kwemidziyo yemidziyo, uye tembiricha yakakwira pakarepo inounzwa nelaser processing zvese zvinokonzeresa kuti granite base "iwedzere uye chibvumirano nekuda kwekushanduka kwekushisa". Kana chigadziko chichinge chawedzera kupisa, kutwasanuka kwenjanji yekutungamira uye kupfava kwepuratifomu kunogona kutsauka, zvichikonzera kutadza kwekufamba kwetafura yewafer. Iwo anotsigira optical components anozochinjawo, zvichikonzera kuti scanning beam "itsauke". Kushanda nguva dzose kwenguva yakareba kuchaunganidzawo zvikanganiso, zvichiita kuti kurongeka kuwedzere uye kuipa.
Asi usanetseka. Vanhu vatova nemhinduro. Mukutaura kwezvinhu, mitsipa yegranite ine yakaderera coefficient yekuwedzera kwekushisa ichasarudzwa uye inotungamirirwa nekukwegura kwekukwegura. Panyaya yekudzora tembiricha, tembiricha yewekishopu inodzorwa chaizvo pa23±0.5 ℃ kana kutodzikira, uye chigadziriso chinopisa chekupisa chinozogadzirirwawo chigadziko. Panyaya yekugadzira dhizaini, zvimiro zvesymmetrical uye zvinochinjika zvinotsigirwa zvinogamuchirwa, uye chaiyo-nguva yekutarisa inoitwa kuburikidza nekushisa sensors. Iko kukanganisa kunokonzerwa nekupisa kwekupisa kunogadziriswa zvine simba nema algorithms.
Midziyo yepamusoro-soro senge ASML lithography michina, kuburikidza nenzira idzi, chengetedza kupisa kwekuwedzera kwechigadziko chegranite mukati mechikamu chidiki kwazvo, zvichiita kuti wafer scanning isvike padanho renanometer. Naizvozvo, chero bedzi ichinyatsodzorwa, iyo granite base inoramba iri sarudzo yakavimbika yewafer scanning michina.
Nguva yekutumira: Jun-12-2025