♦ Alumina (Al2O3)
Iyo chaiyo ceramic zvikamu zvinogadzirwa neZhonghui Nyanzvi yekugadzira Kugadzira (Zhhimg) inogona kugadzirwa neyakagadzirwa Ceramic Raw, Tembiricha yakakwira inotsikiswa uye yakakurumidza kurodha, kurongeka kwemakwikwi, kupindirana kweiyo Mhando dzakasiyana dzeCeramics dzinogona kuitwa maererano nezvinodiwa zvevatengi, zvakadai: dema, rima, kupfeka, uye zvinogona kushandiswa kwenguva yakareba mukupisa kwakanyanya, vacuum uye zvakashatisa gasi nharaunda.
Inoshandiswa zvakanyanya mumidziyo yeMicononductor yekugadzira: mapuranga (ceramic bracket), subtrate (base), ruoko / Bridge (manipulator),
| Chigadzirwa Zita | Yakanyanya Kuchenesa 99 Alumina Ceramic Square Tube / Pipe / Tsvimbo | |||||
| Index | Unit | 85% Al2O3 | 95% Al2O3 | 99% Al2O3 | 99,5% Al2O3 | |
| Density | g / cm3 | 3.3 | 3.65 | 3.8 | 3.9 | |
| Kubata kwemvura | % | <0.1 | <0.1 | 0 | 0 | |
| Kutadza kupisa | ℃ | 1620 | 1650 | 1800 | 1800 | |
| Kuomesa | Mohs | 7 | 9 | 9 | 9 | |
| Kukotama Simba (20 ℃)) | MPA | 200 | 300 | 340 | 360 | |
| Simba rekumanikidza | Kgf / cm2 | 10000 | 25000 | 30000 | 30000 | |
| Nguva yakareba kushanda tembiricha | ℃ | 1350 | 1400 | 1600 | 1650 | |
| Max. Kushanda tembiricha | ℃ | 1450 | 1600 | 1800 | 1800 | |
| Vhoriyumu kupesana | 20 ℃ | Ω. cm3 | > 1013 | > 1013 | > 1013 | > 1013 |
| 100 ℃ | 1012-1013 | 1012-1013 | 1012-1013 | 1012-1013 | ||
| 300 ℃ | > 109 | > 1010 | > 1012 | > 1012 | ||
Kushandisa kwekuchenesa kwakanyanya Alumina ceramics:
1. Zvishandiso kuMicononductor Equipment: Ceramic vacuum Chuck, Kucheka Disc, kuchenesa disc, ceramic chuck.
2. WAFER KUTAMBUDZIRA KWEMAHARA
3. LED / LCD Flat Panel Ratidza Indasitiri: Ceramic Nozzle, Ceramic Grinding Disc, Simudza Pini, Pin Rail.
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5. Kupisa-kupokana uye kwemagetsi kuzvidza zvikamu: ceramic fani.
Parizvino, Aluminium oxide ceramics inogona kugovaniswa mukuchena kwakanyanya uye cereracs. Iyo yakanyanya yekuchena aluminium oxide ceramics series inoreva zvinyorwa zveCeramic zvine zvinopfuura 99.9% Al₂o₃. Nekuda kwekutonhora kwaro kushanya kusvika muna 1650 - 1990 ° C uye its transming waslength ye1 ~ ~ Mune indasitiri yemagetsi, inogona kushandiswa seyakanyanya-frequency inosimbisa zvinyorwa zveIC substrates. Maererano nezvirimo zvakasiyana zveAluminium oxide, zvakajairika Aluminium oxide ceramic matsvene anogona kukamurwa kuita maCeramics 99, ma ceramics 95, ma ceramics kusvika makumi masere nemasere nemakumi mapfumbamwe nemashanu. Dzimwe nguva, maCereracs aine 80% kana 75% yeAluminium oxide inoverengerwa seyakajairika aluminium oxide ceramic shedhi. Pakati pavo. 95 aluminium ceramics inonyanya kushandiswa seCorrosion-inodzivirira kupfeka chikamu. 85 Cereracs inowanzo kusanganiswa mune zvimwe zvivakwa, nekukonzera kugadzirisa kwemagetsi uye nemakaniki simba. Inogona kushandisa molybdenum, niobium, tantalum uye zvimwe zvisimbiso zvesimbi, uye zvimwe zvinoshandiswa seyemagetsi vacuum.
| Mhando yepamusoro (inomiririra kukosha) | Chigadzirwa Zita | AES-12 | AES-11 | AES-11c | AES-11F | AES-22s | AES-23 | Al-31-03 | |
| Chemical composition yakaderera-sodium nyore nyore kutadza chigadzirwa | H₂o | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| Lol | % | 0.1 | 0.2 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | |
| Fe₂0₃ | % | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | |
| Sio₂ | % | 0.03 | 0.03 | 0.03 | 0.03 | 0.02 | 0.04 | 0.04 | |
| Na₂o | % | 0.04 | 0.04 | 0.04 | 0.04 | 0.02 | 0.04 | 0.03 | |
| MGO * | % | - | 0.11 | 0.05 | 0.05 | - | - | - | |
| Al₂0₃ | % | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | |
| Pakati petsika Diameter (Mt-3300, Laser Ongororo nzira) | μm | 0.44 | 0.43 | 0.39 | 0.47 | 1.1 | 2.2 | 3 | |
| α Crystal size | μm | 0.3 | 0.3 | 0.3 | 0.3 | 0.3 ~ 1.0 | 0.3 ~ 4 | 0.3 ~ 4 | |
| Kuumba density ** | g / cm³ | 2.22 | 2.22 | 2.2 | 2.17 | 2.35 | 2,57 | 2,56 | |
| Kutadza density ** | g / cm³ | 3.88 | 3.93 | 3.94 | 3.93 | 3.88 | 3.77 | 3.22 | |
| Kuderera kwemuyero wemutsara wekutadza ** | % | 17 | 17 | 18 | 18 | 15 | 12 | 7 | |
* MGO haina kubatanidzwa mukuverenga kwekuchena kweAl₂o₃.
* Hapana Scaling PoWord 29.4mpa (300kg / cm²), kusunga tembiricha ndeye 1600 ° C.
AES-11 / 11c / 11f: Wedzera 0.05 ~ 0.1% MGo, iyo Sprameity yakanaka, saka inoshanda kuAluminium oxide ine kuchena kweanopfuura 99%.
AES-22s: inoratidzwa nekukwira kwakanyanya kukura kwerudzi rwekudzikama uye kuderera kwemutsara wemutsara, zvinoshanda kuti tishandise fomu rekukanda uye zvimwe zvigadzirwa zvikuru-zviyero zvine chekuita nekunyatsoita.
AES-23 / AES-31-0-0-03: Iyo ine yakakwirira yekuumba density, iyo thiskitropy uye yezasi viscosity kupfuura aes-22s. Iyo yekutanga inoshandiswa kune ceramics apo iyo yekupedzisira ichishandiswa semvura inogadzirisa zvinhu zve fireproofing, kuwana mukurumbira.
♦ Silicon Carbide (Sic) maitiro
| General Hunhu | Kuchena kwezvinhu zvikuru zvikamu (WT%) | 97 | |
| Ruvara | Nhema | ||
| Density (g / cm³) | 3.1 | ||
| Kubata kwemvura (%) | 0 | ||
| Maitiro emuchina | Simba rinoshanduka (MPA) | 400 | |
| Mudiki Moduus (GPA) | 400 | ||
| Vickers kuomesa (GPA) | 20 | ||
| Hunhu hunowedzera | Yakakura inoshanda tembiricha (° C) | 1600 | |
| Inowedzera yekuwedzera inoenderana | RT ~ 500 ° C | 3.9 | |
| (1 / ° C x 10-6) | RT ~ 800 ° C | 4.3 | |
| Thermal Discount (w / m x k) | 130 110 | ||
| Thermal kuvhunduka kupokana δt (° C) | 300 | ||
| Maitiro emagetsi | Vhoriyumu kupesana | 25 ° C | 3 x 106 |
| 300 ° C | - | ||
| 500 ° C | - | ||
| 800 ° C | - | ||
| Dielectric nguva dzose | 10GHZ | - | |
| Difelectric Kurasikirwa (x 10-4) | - | ||
| Q factor (x 104) | - | ||
| Dielectric breakdown voltage (KV / mm) | - | ||
♦ Silicon Nitride Ceramic
| Zvinhu | Unit | Si₃n₄ |
| Sinttering Nzira | - | Kumanikidzwa kwegesi kuchikarira |
| Density | g / cm³ | 3.22 |
| Ruvara | - | Grey grey |
| Mvura Yekunze Rate | % | 0 |
| Mudiki Moduguerus | GPA | 290 |
| Vickers kuomesa | GPA | 18 - 20 |
| Simba rekumanikidza | MPA | 2200 |
| Kukotama Simba | MPA | 650 |
| Inobata | W / mk | 25 |
| Thermal kuvhundutsa kuramba | Δ (° C) | 450 - 650 |
| Maximum anoshanda tembiricha | ° C | 1200 |
| Vhoriyumu kupesana | · · Cm | > 10 ^ 14 |
| Dielectric nguva dzose | - | 8.2 |
| Difectric Simba | KV / MM | 16 |