Masisitimu emazuva ano elaser — kubva kumafemtosecond pulse lasers anoshandiswa mukuvhiyiwa kwemaziso uye zvinhu zvinoshandiswa pakugadzira zvinhu zvishoma kusvika kumapicosecond lasers mu semiconductor scribing uye ultrafast spectroscopy — anofanira kuisa mwenje yavo nemaworkpieces avo ne space accuracy yakayerwa muma micrometer, dzimwe nguva nanometers. Fizikisi yechiedza inogona kunge yakanaka kwazvo, asi mashandiro anoisa optical uye workpiece stages anofanira kunge akanyatsojeka.
Mukati memhando iyi yekushandiswa kwelaser chaiyo, chimwe chikamu chinoonekwa kakawanda: danho regranite rine mhepo. Musanganiswa unoita seusingabvumirani - dombo rekare rakabatana netekinoroji yemazuva ano yepneumatic bearing - danho regranite rine mhepo rave chiyero chaicho mumasisitimu elaser chaiyo nekuti rinogadzirisa, zviri nani pane chero imwe nzira, matambudziko makuru einjiniya ekufamba kusina kukweshana, kupatsanurwa kwekudengenyeka, uye kugadzikana kwemativi.
Chinyorwa chino chinoongorora misimboti yeinjiniya iri shure kwezvikamu zvegranite zvinotakura mweya, chinotsanangura kuti nei granite nemabheringi emhepo zvichiumba hukama hwakadaro hunobudirira, uye chinotevedzera mashandisirwo azvo muchimiro chemazuva ano che laser.
Mabheyaringi Emhepo: Kufamba Kusina Kukweshana PaNanometer Scale
Mabheya echinhu chinotenderera chakajairika — mabhora kana maroller anofamba munzira dzemujaho — ndiwo anoshanda zvakanyanya muhurongwa hwekufamba kwemakanika. Akavimbika, madiki, uye anokwanisa kutakura zvinhu zvakawanda. Asi ane muganhu mukuru: anoratidza maitiro ekutsvedza netsvedza, kufamba kusingawanzoitiki kunoitika sekukweshana kwesimba kunopa nzira yekukweshana kwesimba panguva yekufamba kwekutanga, uye sezvo kusasimba munzvimbo dzinokweshana kuchipindirana.
Pama macroscopic scales, stick-slip chinhu chidiki chinonetsa. Pananometer scale, chinhu chikuru chinodzivisa kufamba kwakatsetseka uye kunodzokororwa. Sisitimu yekumisa inofanirwa kuwana 10-nanometer repeatable haigone kutsungirira bearing inoratidza 100-nanometer stick-slip panguva yekutanga kufamba.
Mabheringi emhepo anobvisa kutsvedza kwetsvedza zvachose nekutsiva kubatwa kwemuchina nefirimu remhepo rakatetepa rine kumanikidzwa — kazhinji kacho 5–15 micrometers ukobvu — rinoparadzanisa zvachose danho rekufamba kubva pamusoro wereferensi. Pasina kubatwa kwemuchina, hapana kukweshana mupfungwa yetsika, hapana kutsvedza kwetsvedza, uye hapana kupera. Danho rinotsvedza mumhepo, uye kufamba kunogona kuve kwakapfava uye kunodzokororwa sezvinobvumira kutwasuka kwenzvimbo yereferensi.
Zvinorehwa nekufamba kwakarurama zvakadzama. Danho rekutakura mweya rinogona kufamba muzvikamu zve nanometers zvichigona kudzokorora izvo zvinonetsamichina yekuyerayakashandiswa kuisimbisa. Kumhanya kunogona kudzorwa kusvika pa 0.01% yakafanana pakumhanya kubva pama micrometers pasekondi kusvika pamamita pasekondi. Bearing pachayo inobatsira zvachose kusachinja-chinja kwesimba panguva yekufamba kwayo - chinhu chakakosha kune masisitimu elaser uko kukanganiswa kwesimba kunogona kukonzera kurira kwemakanika uye nzvimbo yemwaranzi yakaora.
Nei Granite Iri Nzvimbo Yakakodzera Yekutarira Mhepo Inotakura Zvinhu
Danho rekutakura mweya rakangofanana nepamusoro paro. Nzvimbo yekurekodha inofanira kusangana nezvinodiwa zvakawanda panguva imwe chete.
Chekutanga, kutsetseka. Mabheyaringi emhepo anonzwa zvikanganiso zvechimiro chepamusoro nekuti ukobvu hwefirimu remhepo (kazhinji 5–15 μm) hwakafanana nehukuru hwekushivirira kutsetseka kwepamusoro kunogona kuwanikwa mukukuya nekurovera nemazvo. Kutenderera kwekumusoro kwe1 μm kunokonzera shanduko ye1 μm mugedhi remhepo - izvo zvinoshandura zvakananga kuita kukanganisa kwenzvimbo yakatwasuka ye1 μm pachidanho. Kune sisitimu inotarisa kururama kwe100-nanometer, nzvimbo yekureferensi inofanira kunge yakati sandara kusvika pakakwirira kupfuura 100 nanometers pamusoro penzvimbo yese yekufamba.
Chechipiri, kuomarara kwepazasi. Firimu remhepo riri mubearing yemhepo rinogadzikiswa nehunhu hwemhepo inoyerera pakati pebearing pad nereference surface. Kuomarara kwakanyanya kwepazasi kunokanganisa firimu remhepo, kunoita kuti pave nekumanikidzwa kwakasiyana, uye kuunza ruzha mukufamba kwechikuva. Kuomarara kwepazasi kuri pasi peRa 0.05 μm (50 nanometers) kunowanzo diwa kuti pave nekushandiswa kwakanaka kwebearing yemhepo.
Chechitatu, kuomarara uye kuramba kupfeka. Kunyange zvazvo mabheringi emhepo akagadzirirwa kudzivirira kusangana, dzimwe nguva kusangana kunogona kuitika panguva yekutanga, kumira kwekukurumidzira, kana zviitiko zvekukundikana kwekupa mweya. Nzvimbo yekunongedzera inofanira kunge yakaoma zvakakwana kuti idzivirire kukora kana kukuvara kubva muzviitiko izvi. Granite, ine kuomarara kweMohs kwe6–7 (kunokonzerwa zvakanyanya nehuwandu hwayo hwe quartz), inopa kuramba kupfeka kuri nani kupfuura aruminiyamu kana mapurasitiki mazhinji, uye inoenzaniswa kana kuti iri nani pane simbi yakaoma pachinangwa ichi.
Chechina, kugadzikana kwekupisa. Mukana wemhepo uri mubearing yemhepo iparameter yejometri inodzorwa nemazvo. Kuwedzera kwekupisa kunochinja mukana kunochinja kuomarara kwebearing uye kugona kwemutoro — uye kunochinja nzvimbo yekunongedzera yedanho. Kuwanda kwekupisa kweGranite kwakaderera uye kwakafanana, pamwe chete nehuremu hwayo hwekupisa hwakakwira (kupindura kunononoka kune shanduko dzetembiricha), kunopa kugadzikana kunodiwa nesystem yelaser chaiyo.
Cheshanu, hunhu husina magineti uye husina kufambisa simba. Masisitimu mazhinji ekuisa malaser anoshandisa madhiraivha emota ane mutsara, ayo anogadzira minda yemagineti. Base remuchina weferromagnetic rinobatana neminda iyi, zvichikonzera kusagadzikana kwesimba uye zvinogona kukonzera kutenderera kwe calibration sezvo nhoroondo yemagineti yezvinhu ichichinja. Hunhu hweGranite husina magineti uye husina kufambisa simba hunobvisa kusangana uku zvachose.
Masisitimu eFemtosecond Laser: Zvinodiwa Zvakawanda Pakuisa Nzvimbo Yakakodzera
Malaser eFemtosecond anogadzira mapulse mapfupi pane 1 picosecond — bhiriyoni yechikamu chimwe chete chemamiriyoni chesekondi. Panguva idzi, kudyidzana kwelaser-matter kwakasiyana zvakanyanya nekushandiswa kwelaser yakajairika: zvinhu zvinodzikiswa nekukurumidza zvekuti kupisa hakuna nguva yekupararira muzvinhu zvakatenderedza, zvichigonesa kucheka nemazvo nenzvimbo dzine kupisa dzakayerwa mu nanometers kwete mamilimita.
Kugona uku kunoshandiswa mukuvhiyiwa kwe corneal (LASIK), kugadzira michina yemagetsi nemazvo, kugadzira zvinhu zvinoshandiswa pakushandisa photonics, uye kugadzira mwaranzi ye ultraviolet (EUV) ye lithography yechizvarwa chinotevera. Mukushandiswa kwega kwega, nzvimbo ye laser focus kana tichienzanisa ne workpiece inofanira kudzorwa kusvika pakukwirira kwakaenzana nehukuru hwe spot ye laser - kazhinji 1–10 micrometers.
Saka, sisitimu yekuisa zvinhu panzvimbo yefemtosecond laser workpiece stage inofanira kuwana kururama kwe1–10 μm pamusoro penzvimbo dzekufamba dzinogona kusvika 300 mm kana kupfuura — dynamic range ye1:30,000 kana kupfuura. Inofanira kuita izvi nekugadzikana kwespeed kwakasimba zvakakwana kuti igadzire kudzika kwakafanana kwechinhu chiri mukati meworkpiece. Uye inofanira kuita izvi mupakeji diki, inoenderana neroom cleanroom inobatanidzwa ne laser's optical delivery system.
Matanho egranite ane mhepo anogadzirisa zvese zvinodiwa izvi. Chigadziko chegranite chinopa kufamba kwakapfava, kusina kukweshana kunodiwa kuti kumhanya kwakafanana kuve kwakaenzana. Hwaro hwegranite hunopa kutsetseka uye kuomarara kunodiwa kuti zvive zvakarurama. Kugadzikana kwekupisa kwesystem iyi kunochengetedza geometry ye laser-to-workpiece sezvo michina ichidziya uye ichisvika pakuenzana.
Masisitimu ePicosecond Laser muKugadzira Zvemagetsi
Malaser ePicosecond anoshanda pakati pe nanosecond (common pulsed) nefemtosecond lasers maererano nenguva yekurova kwemoyo uye hunhu hwekugadzirisa. Anoshandiswa zvakanyanya mukugadzira zvemagetsi zvinosanganisira PCB kuburikidza nekuboorera, laser scribing yemasero ezuva matete, kucheka magirazi nesafire zvemagetsi evatengi, uye marking uye traceability coding yezvikamu zvemagetsi.
Mukushandiswa uku kwemaindasitiri, simba rekushandisa zvinhu zvakakosha — sisitimu yekuisa zvinhu inofanira kufamba nekukurumidza pakati pezvinhu uku ichichengetedza kururama kunodiwa kuti irove zvinangwa panzvimbo chaiyo. Kusanganiswa kwekumhanya kwakanyanya uye kururama kwakanyanya ndizvo chaizvo zvinogadziriswa matanho egranite ane mweya: mabheyaringi emhepo anogonesa kumhanya kwakanyanya pasina kukanganisa kwekukurumidza kunokonzerwa nekukweshana, nepo kuomarara uye kunyorova kwegranite kunodzivirira ma resonances emakanika ayo anoganhurira kururama pakumhanya kwakanyanya.
Chimwe chinobatsira mukugadzirwa kwezvinhu zvemagetsi ndechekuti system yekutakura mweya inodzokororwa kuburikidza nemabhiriyoni emafambiro ekufamba. Muchina wekuchera wePCB unogadzira zviuru zvemabhodhi pazuva unounganidza huwandu hwakawanda hwema cycles muhupenyu hwawo hwekushanda. Hunhu hwema air bearing hunoreva kuti kururama kwesystem mugore rechishanu kwakafanana nekwezuva rekutanga - chinhu chisingakwanise kuenzaniswa nema rolling element bearing, ayo anoratidza kupera zvishoma nezvishoma uye kuperera kwekururama nekufamba kwenguva.
Matambudziko eKubatanidza uye Mhinduro
Kubatanidza nhanho yegranite ine mweya muhurongwa hwe laser hwekunyatsojeka kunosanganisira zvinhu zvakawanda zveinjiniya zvinopfuura nhanho yacho pachayo. Mhepo yakachena, yakaoma pakumanikidzwa kwakarongeka inodiwa - inowanzosefetwa kusvika pakuchenesa kweClass 0 uye kumanikidzwa kwakadzika kusvika ±0.1% kana kupfuura. Sisitimu yemhepo haifanirwe kuunza kudedera kana kumanikidzwa kunopararira muchikamu. Kudzora tembiricha yemhepo kunodzivirira kuwedzera kwekupisa sezvo mhepo yakamanikidzwa inopfuura nemuhurongwa.
Hwaro hwegranite hunofanira kuiswa uye kutsigirwa nenzira inochengetedza kuti husatsvedzerere kana huchiremerwa. Kuisa kinematic — uchishandisa nzvimbo nhatu dzekutsigira dzakarongwa kudzivirira chero kupinzwa kwakanyanyisa — ndiyo tsika yakajairika. Zvivako zvekutsigira pachazvo zvinofanirwa kunge zvakagadzikana pakupisa uye zvakaparadzaniswa nepasi pechivako.
Kutarisira tambo dzema "motion axes" — kuendesa tambo dzemagetsi, ma "encoder signals", "pneumatic lines", uye "vacuum lines" kunzvimbo inofamba pasina kuisa masimba anovhiringidza nzvimbo yenzvimbo — kunoda kugadzirwa kwakanyatsonaka. Ma "direct-drive linear motors" emazuva ano anobvisa ma "gearbox" nema "drive screws", zvichideredzawo kusagadzikana kwesimba kusingadzokororwe kunoderedza kunyatsorongeka kwenzvimbo.
Mhedziso
Matanho egranite ane mhepo anomiririra pfungwa yekugadzira: sarudza mhinduro yakanakisa iripo kune yega yega inodiwa neinjiniya, kunyangwe mhinduro iyoyo ichibva kune imwe nzira isingatarisirwi. Mabheringi emhepo anogadzirisa kukweshana nekusakara pachikero chenanometer nenzira dzisingagoneke nemabheringi emakanika. Granite inogadzirisa kugadzikana kwehukuru, kudzikamisa vibration, uye mhando yepamusoro nenzira dzisingagoneke nesimbi - zvirinani kwete pasina mutengo wakakwira uye kuomarara.
Musanganiswa uyu waratidza kushanda kwawo kwemakumi emakore muzvirongwa zve laser zvinonyatsodiwa pasi rose. Sezvo tekinoroji ye laser ichiramba ichifambira mberi — ichienda kuma pulses mapfupi, saizi diki dzemapoinzi, uye kushivirira kwakasimba kwemaitiro — matanho egranite anotsigira masisitimu iwayo achafanira kufambira mberi pamwe chete nawo. Vagadziri vanokwanisa kupa kunyatsojeka kunodiwa, kwakasimbiswa uye kwakavimbiswa, vacharamba vari vadyidzani vakakosha mukuvandudza tekinoroji ye laser.
Nguva yekutumira: Chikumi-30-2026