Masisitimu ekufamba anonyatsojeka akakosha pakugadzira zvinhu zvemazuva ano zvemhando yepamusoro, kunyanya mu semiconductor lithography, wafer inspection, optical alignment, uye nanometer-scale metrology. Pakati pemasisitimu aya pane dambudziko guru reinjiniya: kuwana kufamba kwakapfava, kusina kukweshana, uye kunogona kudzokororwa pasina kukanganisa kunokonzerwa nekubata.

Tekinoroji yekufambisa mhepo, kana yakabatanidzwa nekugadzikana kwakanyanyazvivakwa zvegranite, inopa imwe yemhinduro dzepamusoro-soro dzedambudziko iri. Sisitimu yekubata mhepo yegranite inotsiva kubatana kwekare kwemuchina wekutenderedza kana kutsvedza nefirimu diki remhepo ine kumanikidzwa, zvichiita kuti kufamba kwekukweshana kusvike zero uye kuve kwakarurama zvikuru.

Munzvimbo dzekugadzira dzakabudirira, makambani akadai seZHHIMG anobatanidza mabhesi egranite ane density yakakura nezvikamu zvemhepo zvakagadzirwa nemazvo kuti awane masisitimu ekufamba anokwanisa kudzora nzvimbo dze micron uye kunyange nanometer.

1. Nheyo huru yeTekinoroji yeMhepo Inotakura Zvinhu

Mabheyaringi emhepo anoshanda pahwaro hwekupatsanurwa kwemvura. Pane kubvumira nzvimbo mbiri dzakasimba kuti dzibatane, mhepo ine simba inodzorwa inoiswa pakati padzo.

1.1 Kugadzirwa kweFirimu reMhepo

Sisitimu yekutakura mweya yakajairika inosanganisira:

• Nheyo yegranite isingachinji
• Ngoro inofamba kana nhanho
• Manotsi emhepo anonyatsogadzirwa kana kuti maburi emhepo
• Sisitimu yemhepo inodzorwa

Mhepo yakamanikidzwa inounzwa kuburikidza ne micro-orifices kana zvinhu zveceramic zvine maburi, zvichiita firimu rakatetepa rinowanzova pakati pe 2 kusvika 20 micrometers muukobvu.

Iyi firimu yemhepo inotsigira mutoro uye inobvisa kusangana kwakananga kwemuchina.

1.2 Zero Contact Mechanics

Kusiyana nemabheyaringi ebhora kana magwara akatsetseka, mabheyaringi emhepo anoshanda muhurongwa apo:

• Kukodzera kwekukweshana kwasvika pazero
• Kupfeka kunobviswa nepfungwa
• Hapana kufamba kwekutsvedza kwetsvimbo

Izvi zvinoita kuti mabheringi emhepo akwane kune masisitimu ekumisa zvinhu nemazvo zvikuru uko hysteresis yemuchina isingagamuchirwi.

1.3 Maitiro Ekufamba Kwemvura Mukati

Kushanda kwema "air bearing" kunoenderana zvakanyanya nekugadzikana kwe "laminar flow". Kutenderera kunotanga ne:

• Kuchinja-chinja kwedzvinyiriro
• Kusagadzikana kwenzvimbo
• Ruzha rwakawedzera mumasisitimu ekuyera

Saka, dhizaini yekubata mhepo zvakanaka inoda kugadziriswa kwesimba remagetsi (CFD) kuitira kuti mvura irambe ichiyerera zvakanaka pamusoro pekubata mhepo.

2. Basa reGranite muAir Bearing Systems

Granite haisi chinhu chinotsigira chimiro chete; inhengo inoshanda yehurongwa hwekufamba.

2.1 Kugadzikana kweChivako

Granite nhema ine density yakakura inopa:

• High modulus yekugadzikana kwe elasticity
• Kuvimbika kwenguva refu
• Kuramba kushanduka pasi pemutoro

Hunhu uhwu hwakakosha nekuti mabheyaringi emhepo anotsigira kuchengetedza kukwirira kwakafanana kwemukana pamusoro penzvimbo yese yekufamba.

2.2 Kugadzikana kweThermal uye Kudzora Kudonha Kwemvura

Kufamba kwemhepo nekupisa (thermal drift) ndeimwe yenzvimbo dzinonyanya kukonzera zvikanganiso muhurongwa hwekufamba nemagetsi.

Granite ine:

• Kuwedzerwa kwekushisa kwakaderera (~4–7 × 10⁻⁶ /°C)
• Kupisa kwakanyanya
• Kupararira kwemafuta zvishoma nezvishoma

Izvi zvinoderedza:

• Kurereka kwedanho nekuda kwekupisa kusina kuenzana
• Kufamba kweZ-axis mukuyera kwenguva refu
• Zvikanganiso zvekugadzirisa muhurongwa hwemaziso

2.3 Kuderedza Kudedera

Kudzikisa kweGranite kwechisikigo kunoderedza kufambiswa kwemhepo nemhepo kubva kunze kwakaita se:

• Kudedera kwepasi
• Midziyo yemichina iri pedyo
• Masisitimu ekubata mhepo

Izvi zvakakosha pakuchengetedza kugadzikana kwenzvimbo mumashandisirwo e nanometer-scale.

3. Kugadzirwa kweSisitimu yeMapuratifomu Emhepo Anobereka Granite

Sisitimu yekubata mhepo yegranite inowanzo sanganisa masisitimu emakanika, emhepo, uye ekutonga.

3.1 Maumbirwo eMichina

Zvikamu zvikuru:

• Chikuva chepasi pegranite
• Njanji dzekufamba dzakanyatsogadzirwa pasi
• Mapedhi emhepo anopinza (emhando yeceramic ine maburi kana orifice)
• Kufamba kwechikamu chemusangano

Kureba kwechigadziko chegranite kunowanzo gadziriswa kusvika kumazinga e micron kana sub-micron zvichienderana nekirasi yekushandisa.

3.2 Sisitimu Yekudzora Pneumatic

Sisitimu yekupa mweya inosanganisira:

• Compressor yemhepo ine kumanikidzwa kwakanyanya
• Vatongi vemazvo
• Zvinodzora kuyerera
• Zvikamu zvekusefa (kubvisa mafuta, hunyoro, zvidimbu)

Kunyangwe kusvibiswa kudiki kunogona kukanganisa zvakanyanya kugadzikana kwemabheyaringi.

3.3 Maitiro Ekupa Mhinduro Nekudzora

Masisitimu epamusoro-soro anobatanidzwa:

• Ma interferometer eLaser
• Makodhi emutsetse
• Masensa ekufambisa ane simba

Masisitimu aya anobvumira kudzora kufamba kwe closed-loop ne nanometer-scale resolution.

4. Metrology uye Kushanda Kwakarurama

Masisitimu emhepo anoongororwa zvichibva pane zvakakosha zvemetrology.

4.1 Kutwasuka uye Kutsetseka

Zvikanganiso zvekururamisa zvinowanzo konzerwa ne:

• Kutsauka kwechigadziko chegranite
• Kusiyana kweukobvu hwefirimu remhepo
• Kusawirirana kwekugoverwa kwemutoro

Masisitimu epamusoro-soro anogona kuita zvinotevera:

• Kururama kwe sub-micron pamusoro pekufamba kwemita
• Kudzokororwa kwemazinga e nanometer munzvimbo dzakadzorwa

4.2 Kururama Kwekuisa Nzvimbo

Kurongeka kwenzvimbo kunoenderana ne:

• Kugadziriswa kweEncoder
• Kugadzikana kwechitenderedzo chekutonga
• Kuomarara kwefirimu remhepo

Kusiyana nemasystem emakanika, mabheyaringi emhepo anobvisa zvachose kudzorwa kwemusana.

4.3 Kusimba Kwakasimba

Kuomarara kwesimba kunotsanangura kuti sisitimu inopindura sei kumasimba ekunze.

Kuratidzwa kwemabheringi emhepo:

• Kuomarara kwakanyanya pama frequency akaderera
• Kuomarara kwakaderera pahuwandu hwepamusoro nekuda kwekumanikidzwa kwemhepo

Kuchinjana uku kunodzorwa kuburikidza nekugadzira sisitimu uye kugadzirisa preload.

5. Mashandisirwo Emaindasitiri

Masisitimu ekugadzira mhepo yegranite anoshandiswa zvakanyanya muzvikamu zvekugadzira zvepamusoro.

5.1 Indasitiri yeSemiconductor

Mashandisirwo anosanganisira:

• Matanho ekuongorora chifukidziro
• Masisitimu ekugadzirisa lithography
• Nzvimbo yemasiki emufananidzo

Masisitimu aya anoda kudzokorora kwemazinga e nanometer.

5.2 Magadzirirwo Emagetsi Akanyatsonaka

Inoshandiswa mu:

• Masisitimu ekugadzirisa malenzi
• Kuisa danda reLaser panzvimbo
• Kugadzika kwekuyera pakati pemaferometric

5.3 Kurongeka kweMetrology

Mapuratifomu egranite ane mhepo anoshandiswa mu:

• Masisitimu eCMM epamusoro-soro
• Michina yekuyera yeOptical coordinate
• Masisitimu ekuongorora masensa akawanda

5.4 Kugadzira Kwepamusoro

Kusanganisira:

• Masisitimu ekugadzira michina midiki
• Mapuratifomu ekugadzirisa laser eFemtosecond
• Masisitimu ekugadzirisa ekuwedzera ekugadzira

6. Matambudziko ekubatanidza zvinhu

Kugadzira sisitimu yekuisa mhepo yegranite kunosanganisira kutengeserana kwakawanda kweinjiniya.

6.1 Zvinodiwa paKuti Nzvimbo Ive Yakadzikama

Mabheyaringi emhepo anoda kupararira kwemukana wemhepo wakafanana zvikuru. Chero kutsauka kwegranite flatness kunokanganisa zvakananga:

• Kugoverwa kwemutoro
• Kufamba zvakanaka
• Kururama kwenzvimbo

6.2 Kunzwa Kwemhepo

Mashandiro ehurongwa anoenderana ne:

• Kugadzikana kwekumanikidzwa
• Kufanana kwekuyerera
• Mazinga ane utachiona

Kunyangwe zvidimbu zve micron-scale zvinogona kukanganisa mashandiro emhepo.

6.3 Kubatanidza kweThermal-Mechanical

Kuwedzera kwegranite nezvikamu zvekuvaka kunofanirwa kuenzaniswa zvakanaka kudzivirira:

• Kutsveyama kwedanho
• Kudonha kweZ-axis
• Kukanganiswa kwejiyometri

7. Maitiro Ekugadzira uye Kuenzanisa

Masisitimu ekugadzira mhepo yegranite akagadzirwa nemazvo anoda nzvimbo dzakagadziriswa dzekugadzira.

Matanho akajairika ekuita anosanganisira:

1. Kugadzira granite kwakaomarara
2. Kugadzikana kwekupisa
3. Kukuya nekukwesha nemazvo
4. Kubatanidzwa kwemhepo inobereka
5. Kusimbiswa kweMetrology
6. Kurongeka kweLaser calibration

Vagadziri vepamusoro vakaita seZHHIMG vanoshandisa nzvimbo dzakagadziriswa dzine kugadzikana kwetembiricha kazhinji mukati me ±1°C kuitira kuve nechokwadi chekuti jiometri inodzokororwa.

8. Mabhenefiti Pamusoro peMasisitimu Ekutakura Michina

Mabheyaringi emhepo anobvisa zvipingamupinyi zvakawanda zvehurongwa hwemakanika.

Mhedziso

Masisitimu emhepo ane granite anomiririra imwe yemhinduro dzepamusoro-soro dzekudzora kufamba kwakanyatsojeka mukugadzirwa kwemazuva ano. Nekubatanidza kugadzikana kwechimiro chegranite ine density yakakura nehunhu husina kukweshana hwekuparadzanisa firimu remhepo, masisitimu aya anowana mwero wekururama, kudzokororwa, uye kugadzikana kwenguva refu.

Sezvo maindasitiri e semiconductor ne precision engineering achiramba achifambira mberi ne nanometer tolerances uye kunyange sub-nanometer tolerances, mapuratifomu e granite air bearing acharamba ari tekinoroji huru inobatsira kune ma metrology echizvarwa chinotevera uye ma manufacturing systems.