Kugadzirwa kwezvinhu zvakagadzirwa nesimbi zvakanyatsonaka kunoda michina yeCNC yepamusoro-soro. Pasina kuparadzaniswa zvakanyanya kubva mukutenderera kwepasi uye kudedera kwemaindasitiri, hazvigoneke kuwana kushivirira kwe sub-micron geometric. Mota yega yega inopfuura, crane iri pedyo, uye compressor yekudzora mamiriro ekunze zvinounza mafungu madiki-diki anogona kukanganisa kutenderera uye kuyera mabhesi e granite akakodzera, mabheyaringi emhepo, uye zvikamu zveceramic.
Kuti izvi zvisaitike, zvivakwa zvemaindasitiri zvinofanirwa kubata nzvimbo yekugadzira zvinhu sechinhu chakabatanidzwa muhurongwa hwemetrology.
Fizikisi yeKusimbaradza Nheyo
Mapasi ekongiri emumaindasitiri anowanzova neukobvu hwe150 mm kusvika 300 mm. Kunyange zvazvo akakwana pakugadzirwa kwezvinhu zvakajairwa uye pakuumbwa kwakawanda, haana kukwana zvachose pakugadzirwa kwenanometer. Kana paine zvinhu zvinorema, pasi rakajairwa rinoita sediaphragm, richitumira kudedera kwepasi kusingawanzoitiki zvakananga muzvishandiso zvebasa.
Kuti zvibviswe kukanganisa uku, nharaunda dzekugadzira dzakabudirira dzinoshandisa hurongwa hwekuvaka hwakazara nezvikamu zvakasiyana-siyana:
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Nheyo dzeMauto Dzakakora Zvikuru: Kudira kongiri yakasimbiswa kusvika pakadzika kwe1000 mm kunoita kuti pave nechinhu chikuru chisina simba. Huremu uhwu hunodzikamisa mafungu ane frequency yakaderera (1 - 10 Hz) asati asvika pamuchina.
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Matare Ekudzikisa Makomba: Kucheka migero yakatsaurirwa yekudzikisa makomba munzvimbo dzekugadzira—ine saizi chaiyo yakaita sehupamhi hwe500 mm uye kudzika kwe2000 mm—kunobatanidza nzvimbo yekugadzira chaiyo kubva kune imwe nzvimbo yese. Matare aya akazadzwa nezvinhu zve elastomeric zvinotora simba kuti zvideredze mafungu e lateral shockwaves.
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Kunyarara kweAcoustic neMechanical: Macrane epamusoro ne gantry hoists ndiwo manyuko makuru eruzha rusina ruzha rwakawanda uye kudedera kwechimiro. Kushandisa masisitimu ekufamba pamusoro anogadzirwa ne acoustic-insulated, akanyarara-running akanyarara kunodzivirira mafungu ekumanikidza acoustic kuti asakanganise mazinga emagetsi anonzwa uye laser interferometers panguva yekuyera.
Kuwirirana Kwezvakatipoteredza: Tembiricha uye Hunyoro
Kuwedzera kwekupisa ndiko kunokonzera kukanganisa kukuru kwejometri mugranite chaiyouye kugadzirwa kweceramic. Kuchinja kwetembiricha ye0.5 ℃ chete kunogona kukonzera kuti mubhedha wegranite we5000 mm ugone kuchinjika kupfuura zvinobvumidzwa.
Kuti zvive nekururama kwakaringana, mamiriro ekugadzirisa uye ekuunganidza anofanira kutevedzera mitemo yakasimba:
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Nzvimbo Yose Yakavharirwa Nezvakatipoteredza: Kugadzira kunofanirwa kuitwa mudzimba dzakakura, dzakavharirwa (semuenzaniso, 10,000㎡) uko tembiricha yakavharirwa pa20℃ ± 0.2℃ uye hunyoro hwakanyatsodzorwa.
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Kutarisira Kumhanya Kwemhepo: Masisitimu emhepo anofanirwa kugadzirwa kudzivirira kukwira kwemhepo zvakananga, zvine simba pamusoro pegranite, zvichidzivirira kupisa kwenzvimbo.
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Kutevedzera Semiconductor Cleanroom: Kugadzira kwekupedzisira kwe multi-axis granite gantries, linear motor stages, uye ultra-precision air bearingings kunoda nzvimbo dzakagadzirwa, dzisina guruva dzinotevedzera semiconductor fab yemushandisi wekupedzisira. Izvi zvinoita kuti pasave netsvina inokanganisa nzvimbo dzine mhepo, iyo inowanzova pakati pe5μm ne15μm.
Pfupiso
Kugadzira zvinhu nemazvo hakugone kuwanikwa munzvimbo yakajairika yemaindasitiri. Kugadzikana kwepasi pefekitori, kupatsanurwa kwenheyo, uye kutonga kwakakwana kwe thermodynamics yekamuri rakachena zvinoumba hwaro hwesimba remetrological. Kuisa mari munheyo dzakakura dzisina simba uye kupatsanurwa kweperimeter ndiyo chete nzira yakasimbiswa yekuona kuti kugadzira zvinhu zve sub-micron kunoramba kwakasimba, kuchidzokororwa, uye kuchiteverwa.
Nguva yekutumira: Chikumi-15-2026