Puratifomu yepamusoro yegranite chaiyo ndeimwe yezvishandiso zvakakosha mukuongorora maindasitiri. Inoshanda sereferensi yedata - chimiro chechimiro cheplane yakati sandara - iyo kuyerwa kwese kwese muworkshop kunoenzaniswa pakupedzisira. Kana puratifomu yepamusoro isina kururama, kuyerwa kwese kunoitwa uchishandisa iyo kuchaendesa kusakarurama ikoko mberi, kuchisvibisa chinyararire data rekuongorora uye sarudzo dzekugadzira.
Kune akawanda maindasitiri, kusvika pakutsetseka kusvika mukati mema micrometer mashoma pamusoro peplate hombe zvinogamuchirwa. Asi padanho repamusoro - mukugadzirisa michina ye semiconductor, ma laboratories emazinga enyika, ma photolithography reference systems, uye ultra-high-high-accuracy CMM qualification - kutsetseka kunofanirwa kuongororwa kusvika pamazinga e nanometer. Mubvunzo unobva wava: unoyera sei chimwe chinhu kune chiyero chakanyatsojeka kupfuura zvishandiso zvinowanikwa kuti zviyere?
Chinyorwa chino chinoongorora misimboti, nzira, uye zvishandiso zvinoshandiswa kusimbisa uye kuwana kutsetseka kweplate yepamusoro kubva padanho re micrometer kusvika kuma nanometers.
Nei Kufara Kuchikosha Kupfuura Zvaunofunga
Kusatsetseka kweplate yepamusoro kunotsanangurwa maererano nekukanganisa kwakanyanya kunobvumidzwa (MPE) munzvimbo yese yekushanda, kunowanzoonekwa muma micrometer (μm). Giredhi AA (giredhi repamusoro rekutengeserana pasi pemitemo yakawanda yepasi rose) rinowanzoda kusatsetseka mukati me1.6 μm kune plate ye1000 × 630 mm pasi peGerman DIN 876 standard, kana mukati memipimo chaiyo pasi peAmerican ASME B89.3.7 standard.
Asi mamiriro acho ezvinhu ndiwo akakosha. Puratifomu yepamusoro "yakatsetseka" ine kutsauka kwe3 μm kubva pakuguma kusvika pakuguma yakakwana zvakakwana pakuongorora kweworkshop yese. Puratifomu yepamusoro imwecheteyo inoshandiswa sereferensi yedata yekuenzanisa nhanho yephotolithography inovavarira 10-nanometer positioning accuracy haina kukodzera zvachose - kukanganisa kwayo kwekutsetseka chete kwakakura zvakapetwa mazana matatu kupfuura kushivirira kwenzvimbo kwainofanira kutsigira.
Musiyano uyu uripo pakati pekuti "zvakanaka zvakakwana kune akawanda mashandisirwo" uye "zvakanaka zvakakwana kune akawanda mashandisirwo anonyanya kuoma" ndiyo chikonzero chaicho chinoita kuti nzira yekuyera ive yakakosha, uye nei vasiri vese vagadziri vemapuratifomu epamusoro vane kugona - kana kuti kuvimbika - kwekutarisa zvigadzirwa zvavo nemazvo padanho re nanometer.
Dambudziko Guru: Kuyera Zvausingakwanise Kuenzanisa Zvakananga
Kuyera kuenzana kwenzvimbo kusvika pa micrometer kwakajeka: isa ndiro panzvimbo inozivikanwa kuti yakatsetseka, ongorora pamusoro penzvimbo nenzira yakarongeka, uye nyora pasi kutsauka. Asi kuyera kuenzana kwenzvimbo kusvika pa nanometer kunounza dambudziko guru - hapana nzvimbo yekutarisa chaiyo yakakwana kuti ishande sechiyero chekuenzanisa.
Pachikero chenanometer, nzvimbo yega yega — kusanganisira nzvimbo dzinoratidza — ine chikanganiso chayo. Simba regiravhiti rinochinja nzvimbo dzakakura nenzira inoyerwa. Kuchinja kwekushisa kunokonzera kuwedzera kwekupisa muplate. Kunyangwe mhepo inoyerera uye ruzha rweacoustic zvinogona kuunza mhedzisiro inoonekwa. Kuyera pachako kunofanirwa kuverengera zvese izvi.
Masayendisiti eMetrology akagadzira nzira dzakasiyana-siyana dzekugadzirisa dambudziko iri, dzakawanda dzacho dzinosanganisira kupatsanura chikanganiso chemudziyo kubva pakukanganisa kwechigadzirwa kuburikidza nekuyera kusingadzoreki kunotorwa munzvimbo dzakasiyana.
Nzira dzeKuyera Zvikuru neZvishandiso
Ma level emagetsi uye masensa ekutsvedza ndezvimwe zvezvishandiso zvinoshanda zvikuru pakusarudzandiro yepamusorokusatsetseka munzvimbo dzakakura. Zvishandiso zvakaita seWYLER Leveltronic series (Switzerland) zvinowana ma resolutions emakona e0.001 mm/m kana kupfuura — zvakaenzana nekuona musiyano wekukwirira kwe1 micrometer pamusoro pemita imwe. Nekufamba-famba pamusoro penzvimbo nenzira yakarongwa mu grid pattern (Union Jack method, cross pattern, kana full grid), nyanzvi yemetrology inogona kugadzira mepu yakazara ye topographic yepamusoro.
Laser interferometry inopa mukana wekuchinja-chinja pakuyera kuti isatsvedzerere padanho re sub-micrometer ne nanometer. Chishandiso chakadai seRenishaw XL-80 laser interferometer chinogona kuyera kusimuka kusvika pakakwirira kupfuura nanometer imwe chete padaro remamita akati wandei. Pakuyera pamusoro peplate, laser beam inonangidzirwa paplate ukuwo optical flat kana reference mirror ichitevera nzira inodzorwa; kutsauka mubeam rinoratidzwa kunoratidza chimiro chepamusoro.
Kuyera kuenzana kwepakati pechipimo uchishandisa maflats e optical — girazi rakakwenenzverwa zvakanyanya kana kuti silica yakasanganiswa ine zvikanganiso zvechimiro zviri pasi pe 30 nanometers — kunogona kuratidza kururama kwemaplate epamusoro kusvika ku nanometer munzvimbo dzine mazana emamirimita emasikweya panguva imwe chete. Mainterferometer akazara anoshandiswa mumasangano emetrology enyika anogona kuyera nzvimbo dzedhayamita ye 600 mm muchiyero chimwe chete.
Masensa ekufambiswa kwesimba uye mapurobhu emhepo anopa imwe nzira, ine nanometer-level resolution uye kugona kuongorora pamusoro pasina kubata. Izvi zvinowanzo shandiswa pamwe chete nemagranite chaiwo kana ceramic reference stages - ayo pachawo anoshanda semota reference - achigadzira system yekuyera yega.
Nzira yeMapurati Matatu: Kuzviongorora Kunotsamira
Imwe yenzira dzekare dzakasimba dzekuwana nekusimbisa kuti mativi acho akaenzana pasina referensi yepamusoro inzira yeplate nhatu. Munzira iyi, mahwendefa matatu anonamirwa pamwe chete munhevedzano chaiyo yekutenderera nekuenzanisa. Masvomhu emaitiro acho anovimbisa kuti chero kukanganisa kwakarongwa muplate imwe kunoonekwa kuburikidza nekudyidzana kwayo nemamwe maviri - mahwendefa acho pamwe chete anotsanangura plane yakatsetseka pane chero referensi yekunze.
Nzira iyi ine maplate matatu ndiyo hwaro hwekare hwekugadzirwa kwemaplate epamusoro akarurama uye ichiri kukosha nanhasi. Kushandiswa kwayo kwemazuva ano kunobatanidza hunyanzvi hwechinyakare hwekurovera maoko nekuyera kwemagetsi kutungamira maitiro ekugadzirisa - mhizha dzine hunyanzvi dzinogona "kuverenga" pamusoro nemanzwiro, pamwe chete nemazinga emagetsi anoyera zvinoonekwa nemaoko.
Mugumisiro wacho unoenderana: kutenderera kwega kwega kwekumonera, kuyera, uye kubvisa zvinhu zvinosarudzwa kunoita kuti ndiro dzese nhatu dzive pedyo nekutsetseka kwakakwana. Chinhu chinogumira hachisi nzira asi mwoyo murefu, hunyanzvi, uye maturusi ekuyera aripo evanhu vari kuita basa.
Basa reNzvimbo yekuyera
Padanho re nanometer, nzvimbo yekuyera inova chikamu chehurongwa hwekuyera. Tembiricha haifanirwe kudzorwa kwete chete kusvika pamutengo wezita asi kune tight band - kazhinji ±0.5°C kana kupfuura - nekuti kuwedzera kwekupisa kweplate yegranite yemita imwe pa0.1°C chete mazana mananometers. Hunyoro hunokanganisa pamusoro pegranite pachayo uye refractivity yemhepo iyo laser interferometry beams inofamba nayo. Kudengenyeka kubva pachivako, HVAC, kana michina iri pedyo kunounza dynamic position errors iyo inoshatisa static flatness measurements.
Ndosaka marabhoritari akakomba ekuyera zvinhu - uye vagadziri vegranite vanonyatsoongorora - vachiisa mari yakawanda munzvimbo dzinodzorwa. Imba inodzorwa nekupisa nehunyoro yakavakwa nechinangwa chayo ine pasi rakaparadzana, makomba anodzivirira kudedera akatenderedza miganhu, uye macrane akanyarara pamusoro pedenga haisi yeumbozha - chinhu chinodiwa kuti uwane uye usimbise magiredhi epamusoro ekuti zvinhu zvisatsvedze.
Makomba anodzivirira kudedera (anowanzo 500 mm upamhi uye 2000 mm kudzika kwakakomberedza imba yekuyera) anobatanidza pasi rekuyera kubva mukudedera kwechivako. Matanda akaumbwa kubva pakongiri yakasimba kwazvo kusvika pakukora kwe1000 mm kana kupfuura anopa huremu nekuomarara kunodiwa kudzivirira kusagadzikana kunochinja-chinja. Mari iyi yezvivakwa inosarudza zvakananga kuti mazinga ehutete anogona kusvikwa sei uye kusimbiswa nemugadziri.
Kutevedzana kweCalibration: Cheni yeKuvimba
Kuyera kuti zvinhu zvakati sandara zvinongovimbika sezvishandiso zvakashandiswa pakuigadzira — uye zvishandiso izvozvo zvinovimbika chete kana kuyera kwazvo kuchigona kuteverwa nezvinodiwa nenyika nepasi rose. Mukuenzanisa kwakarurama, iyi cheni yekutevedza haisi yekusarudza: ndiyo hwaro hwekuyerwa kwekuvimbika.
Tsanangudzo yeSystème international d'unités (SI) yemita ikozvino yave kuwanikwa kuburikidza nekumhanya kwechiedza uye mwero wefrequency yelaser inochengetwa neNational Metrology Institutes (NMIs) — senge NIST muUnited States, PTB muGermany, NPL muUnited Kingdom, uye NIM muChina. Zvitupa zveCalibration zvinopihwa neProvince kana National Metrology Institutes zvinopa humbowo hwakanyorwa hwekuti chimwe chinhu chakaenzaniswa nemwero wepamusoro unoteverwa neizvi zvakakosha.
Kune mugadziri wegranite anonyatsoongorora, kuva nezvishandiso zvese zvekuyera zvakaongororwa nemasangano emetrology ane mvumo - ane zvitupa zvinoteverwa zvichienderana nechiyero chenyika - zvinoreva kuti hunhu hwe flatness hwakataurwa pazvigadzirwa zvavo hahusi huwandu husina kurongeka asi zviyero zvinoteverwa neSI zvine kusava nechokwadi kwakayerwa.
Mhedziso: Kuyera Hakusi Kungosimbisa - Kugadzira
Kuyera kuenzana kweplate yepamusoro ne nanometer hakusi kungoongorora chete hunhu hwekupedzisira. Chikamu chakakosha chemaitiro ekugadzira, kutungamira danho rega rega rekugadzirisa panguva yekurovera uye kupa mhinduro dzinotungamira pamusoro kusvika kune zvinodiwa. Pasina kugona kuyera nemazvo, hapana kugona kugadzira nemazvo.
Kugona kuwana uye kusimbisa kuti nanometer yakatsetseka sei mumapureti egranite inomiririra muganhu chaiwo wesimba - uyo unoparadzanisa vashoma vevagadziri vane hunyanzvi hwepamusoro pasi rose kubva kune vazhinji. Zvinoda zvinhu zvakakodzera, michina yakakodzera, nharaunda yakakodzera, zvishandiso zvakakodzera, zvakagadziriswa zvinoenderana nezvinodiwa, zvinoshandiswa nevanhu vane kudzidziswa uye ruzivo kuti vazvishandise nemazvo.
Kune vanoshandisa mapuratifomu epamusoro akanyatsogadzirwa — kungave mumarabhoritari emunyika, makambani emidziyo ye semiconductor, kana zvivakwa zveCMM zvepamusoro — kunzwisisa kuti mapuratifomu avo anoyerwa sei hachisi chinhu chisinganzwisisike. Izvi zvinosarudza zvakananga kana kuyerwa kwakaitwa pamapuratifomu iwayo kuchigona kuvimbwa nako.
Nguva yekutumira: Chikumi-30-2026